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Spray coating, spraying powder, spraying powder manufacturing method and spray coating manufacturing method

A manufacturing method and coating technology, which can be applied in the direction of fusion spraying, chemical instruments and methods, semiconductor/solid-state device manufacturing, etc., and can solve the problems of life reduction and other problems

Active Publication Date: 2019-10-25
SHIN ETSU CHEM IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, in general, yttrium fluoride, which is a representative of rare earth fluorides, is white. Therefore, after use, residues of resist decomposition products adhere to the components of plasma etching equipment using halogen gas, causing discoloration to brown parts.
In addition, due to the influence of plasma etching, the phenomenon of partially discoloring from white to black (Hall defect caused by the color center, etc.) occurs, so the cleaning of this part is focused. Long life, but the life is reduced by cleaning

Method used

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  • Spray coating, spraying powder, spraying powder manufacturing method and spray coating manufacturing method
  • Spray coating, spraying powder, spraying powder manufacturing method and spray coating manufacturing method
  • Spray coating, spraying powder, spraying powder manufacturing method and spray coating manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0129] Add 1 liter of phenol solution diluted to 3% with ethanol to 1 kg of ytterbium fluoride (average particle size: 40 μm) powder with an oxygen concentration of 3.4%, mix for 5 minutes, dry, and bake for 2 hours with a nitrogen flow at 800°C. Furthermore, the granulated powder was subjected to reduced pressure (1×10 -2 torr or less) at 1000°C for 2 hours to produce powder for thermal spraying. The spraying powder is L * a * b * L in chromaticity representation * : 42.3, a * : -0.30, b * : Black at -0.65, the carbon concentration in the powder is 1.3%. In addition, the oxygen concentration was 2.9%.

[0130] Using this thermal spraying powder, a film was deposited on an aluminum alloy member by plasma spraying using argon or hydrogen gas to form a film having a thickness of about 200 μm. The L of the sprayed coating was measured * a * b * Chroma, the result is L * : 45.2, a * : -0.53, b * : -0.62, the carbon concentration is 1.1%. In addition, the oxygen conc...

Embodiment 2

[0136] Yttrium fluoride (average particle size: 40 μm) powder having an oxygen concentration of 0.2% was immersed in a 30% sucrose aqueous solution, stirred for 10 minutes, filtered, and dried. This yttrium fluoride powder was calcined for 2 hours in a nitrogen flow at 800° C., and sieved through a #100 sieve to obtain a powder for thermal spraying. The spraying powder is L * a * b * L in chromaticity representation * : 72.23, a * : -0.02, b * : 3.12 gray, the carbon concentration in the powder is 0.235%. In addition, the oxygen concentration was 0.75%.

[0137] Using this thermal spraying powder, a film was deposited on an aluminum alloy member by plasma spraying using argon or hydrogen gas to form a film having a thickness of about 200 μm. The L of the sprayed coating was measured * a * b * Chroma, the result is L * : 76.18, a * : 0.04, b * : 3.77, the carbon concentration is 0.015%. In addition, the oxygen concentration was 1.1%.

[0138] The sputtering membe...

Embodiment 3

[0140] Add 4 liters of 2% aqueous solution of acrylic binder to 150 g of white yttrium oxide (average particle diameter 1.1 μm) powder and 850 g of yttrium fluoride (average particle diameter 3 μm) powder and mix to prepare a slurry, and use a spray dryer This was granulated and dried, and then sieved through a #100 sieve to obtain yttrium fluoride (average particle diameter: 36 μm) powder, thereby obtaining a powder for thermal spraying. The spraying powder is L * a * b * L in chromaticity representation * : 88.46, a * : 3.63,b * : The gray color of -2.85, the carbon concentration in the powder is 1.46%, and the oxygen concentration is 3.37%. In addition, X-ray diffraction of the powder was carried out, and it was observed that YF 3 and Y 2 o 3 peak.

[0141] Using this thermal spraying powder, a film was deposited on an aluminum alloy member by plasma spraying using argon or hydrogen gas to form a film having a thickness of about 200 μm. The L of the sprayed coatin...

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Abstract

Provided is a spray coating containing a rare earth fluoride and / or a rare earth acid fluoride, wherein carbon is contained therein at 0.01-2% by mass or titanium or molybdenum is contained therein at1-1000 ppm, and wherein, in the case in which an acid fluoride is not contained therein, the spray coating is gray to black in which, in terms of the L*a*b* chromaticity, L* is 25-64, a* is -3.0 to +5.0, and b* is -4.0 to +8.0, and, in the case in which an acid fluoride is contained therein, the spray coating is white or gray to black in which, in terms of the L*a*b* chromaticity, L* is equal toor greater than 25 and less than 91, a* is -3.0 to +5.0, and b* is -6.0 to +8.0. By forming this coating on a plasma resistant member, a partial color change is reduced, the situation in which said member is washed in a manner that causes partial deterioration thereof when being removed and washed is eliminated, and thus, a member that is capable of reliably realizing the original longevity thereof is obtained.

Description

technical field [0001] The present invention relates to a thermal spray coating containing fluoride of a rare earth element, or the fluoride of a rare earth element and oxyfluoride of a rare earth element, a powder for thermal spraying for obtaining the thermal spray coating, and a method for producing the powder for thermal spraying And the manufacturing method of this spray coating. Background technique [0002] In recent years, since rare earth fluorides are relatively stable at high temperatures, in order to reduce initial particles and prolong the life of components by using rare earth fluorides in plasma-resistant components, a rare earth fluoride sprayed coating has been formed. Component development. For example, it is a member for a plasma etching apparatus using a halogen gas. [0003] However, in general, yttrium fluoride, which is a representative of rare earth fluorides, is white. Therefore, after use, residues of resist decomposition products adhere to parts ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C4/04C01F17/00H01L21/302C01F17/259C01F17/265
CPCC23C4/134C23C4/10C01F17/265C01F17/10C01P2006/62C01P2006/63C01P2006/64C01P2004/61C23C4/04H01L21/302C09D5/033C09D7/61C08K3/16C08K2003/221C08K2201/014C01F17/259C01P2002/52H01J37/32477C01F17/206C23C4/11C09D1/00C09D5/03C04B2237/36C04B35/5156C04B35/50B32B9/005C04B2237/34
Inventor 浜谷典明植原一郎
Owner SHIN ETSU CHEM IND CO LTD
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