Zr-B-N nanocomposite coating with high hardness and high toughness and preparation method thereof

A nanocomposite coating, high toughness technology, applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problem of reducing the bonding force of amorphous/nanocrystalline layer, reducing the high temperature performance of coating, destroying nano Composite structure and other issues, to achieve good impact load performance, improve coating toughness, and good repeatability

Active Publication Date: 2020-09-11
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] After research, it is found that the vacuum degree in the vacuum chamber is only 10 -8 Pa, the presence of oxygen impurities cannot be detected in the coating, and the residual oxygen impurities in the vacuum chamber are easy to react with B to form amorphous phase B 2 o 3 , resulting in the non-dense amorphous

Method used

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  • Zr-B-N nanocomposite coating with high hardness and high toughness and preparation method thereof
  • Zr-B-N nanocomposite coating with high hardness and high toughness and preparation method thereof
  • Zr-B-N nanocomposite coating with high hardness and high toughness and preparation method thereof

Examples

Experimental program
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Embodiment 1

[0036]In this embodiment, a Zr-B-N coating is deposited on a mirror-polished single-crystal Si wafer ((100) crystal plane), and the size of the substrate is 50mm×10mm×0.7mm. Before coating, the substrate was ultrasonically cleaned in alcohol solution for 20 minutes, then dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on V-TECH AS610 pulsed DC magnetron sputtering coating machine, which is also equipped with arc ion plating cathode, and the target materials are respectively metal Cr target and compound ZrB 2 Target (purity is 99.9wt.%), metal Cr target is used for ion bombardment cleaning and deposition of CrN transition layer on the surface of the substrate, compound ZrB 2 The target is used to deposit Zr-B-N coating; the working gas and reaction gas are respectively high-purity Ar (purity 99.999%) and N 2 +H 2 (gas volume ratio N 2 :H 2 =9:1).

[0037] First, the background vacu...

Embodiment 2

[0040] In this embodiment, a Zr-B-N coating is deposited on a mirror-polished YG8 cemented carbide substrate, and the size of the substrate is 30mm×30mm×3mm. The substrate is first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone, degreasing agent, ultrapure water and alcohol solution in sequence, dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The deposition process and process parameters are the same as in Example 1.

[0041] Figure 4 It is the hardness test result of Zr-B-N coating deposited on the cemented carbide substrate. It can be seen that the fluctuation of the coating hardness test value is small, ranging from 39 to 43GPa, and the average value of 5 measurements is 41.9±1.2GPa, indicating that the coating hardness is relatively high. The bonding strength between the coating and the substrate is tested by the scratch method. The tip radius of the diamond scratch head...

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Abstract

The invention discloses a Zr-B-N nanocomposite coating with high hardness and high toughness and a preparation method thereof, and belongs to the technical field of nanocomposite coating preparation.The Zr-B-N nanocomposite coating comprises an amorphous BN phase and a ZrB2 crystal phase, wherein the ZrB2 phase preferentially grows along a (001) crystal face. The Zr-B-N nanocomposite coating is deposited on a metal or alloy matrix with a pulsed DC magnetron sputtering technology. In order to improve the binding force between the coating and the matrix, Ar gas is introduced before coating, ionbombardment cleaning is performed on the surface of the matrix through an arc ion plating Cr target, then mixed gas of N2 and H2 is introduced, and a CrN transition layer is deposited; and then, a Crtarget power supply is turned off, a ZrB2 target is connected to a pulsed DC magnetron sputtering cathode, and the Zr-B-N coating is deposited in a mixed atmosphere of Ar, N2 and H2. The Zr-B-N nanocomposite coating is good in preparation repeatability, and industrial production is easy. The prepared Zr-B-N nanocomposite coating has high hardness and elastic modulus and good wear resistance, thestructure is dense, and the binding force between the coating and the matrix is large.

Description

technical field [0001] The invention relates to the technical field of composite coating and its preparation, in particular to a Zr-B-N nanocomposite coating with high hardness and high toughness and a preparation method thereof. Background technique [0002] With the rapid development of modern material manufacturing technology, various difficult-to-machine materials with high hardness and high toughness are increasing. Although the performance of engineering materials has been improved, it also leads to increased tool wear when processing materials. The development of tool coating technology has significantly improved the wear resistance and impact toughness of the tool, improved the cutting performance of the tool, and improved the processing efficiency and service life of the tool. ZrB 2 The coating is a close-packed hexagonal crystal structure with high thermal conductivity and good thermal shock resistance, while ZrB 2 The coating also has the advantages of high hard...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C23C14/32C23C14/02
CPCC23C14/3485C23C14/35C23C14/06C23C14/0057C23C14/0641C23C14/325C23C14/0021C23C14/022
Inventor 王铁钢许人仁张雅倩李壮刘艳梅曹凤婷
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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