Zr-B-N nanocomposite coating with high hardness and high toughness and preparation method thereof
A nanocomposite coating, high toughness technology, applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problem of reducing the bonding force of amorphous/nanocrystalline layer, reducing the high temperature performance of coating, destroying nano Composite structure and other issues, to achieve good impact load performance, improve coating toughness, and good repeatability
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Embodiment 1
[0036]In this embodiment, a Zr-B-N coating is deposited on a mirror-polished single-crystal Si wafer ((100) crystal plane), and the size of the substrate is 50mm×10mm×0.7mm. Before coating, the substrate was ultrasonically cleaned in alcohol solution for 20 minutes, then dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on V-TECH AS610 pulsed DC magnetron sputtering coating machine, which is also equipped with arc ion plating cathode, and the target materials are respectively metal Cr target and compound ZrB 2 Target (purity is 99.9wt.%), metal Cr target is used for ion bombardment cleaning and deposition of CrN transition layer on the surface of the substrate, compound ZrB 2 The target is used to deposit Zr-B-N coating; the working gas and reaction gas are respectively high-purity Ar (purity 99.999%) and N 2 +H 2 (gas volume ratio N 2 :H 2 =9:1).
[0037] First, the background vacu...
Embodiment 2
[0040] In this embodiment, a Zr-B-N coating is deposited on a mirror-polished YG8 cemented carbide substrate, and the size of the substrate is 30mm×30mm×3mm. The substrate is first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone, degreasing agent, ultrapure water and alcohol solution in sequence, dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The deposition process and process parameters are the same as in Example 1.
[0041] Figure 4 It is the hardness test result of Zr-B-N coating deposited on the cemented carbide substrate. It can be seen that the fluctuation of the coating hardness test value is small, ranging from 39 to 43GPa, and the average value of 5 measurements is 41.9±1.2GPa, indicating that the coating hardness is relatively high. The bonding strength between the coating and the substrate is tested by the scratch method. The tip radius of the diamond scratch head...
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