Method for making modular spot converting distributed-feedback Prague laser by using quantum trap confounding

A quantum well hybrid and mode-spot converter technology, which is applied in the direction of lasers, phonon exciters, laser components, etc., can solve the problems of small process tolerance, increased radiation loss, and low reliability of devices, so as to reduce crystal growth the number of times, reduce the effect of Auger complex, and reduce the number of growth
CN1909310AInactive Publication Date: 2007-02-07INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
Publication Date
2007-02-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a method for using quantum well mixing to produce mode speckle conversion distributed feedback Bragg lasers, which comprises: growing n-type indium phosphate buffer layer on the substrate; using silica dioxide to mask the distributed feedback Bragg lasers, and generating point corrosion on the characteristic indium phosphate pour buffer layer at the mode speckle converter; corroding the silica dioxide protective layer; heating chip, keeping warm and annealing; corroding the protective layer; grating the whole chip; corroding the characteristic indium phosphate pour buffer layer; etching the upper and lower ridge pilot structures on the converter; cleaning the chip; growing p-type indium phosphate layer, indium gallium arsenic phosphate etching stopping layer, p-type indium phosphate package and high-doping p-type indium gallium arsenic ohm electrode contact layer; growing silica dioxide insulated layer on the whose chip; opening electrode window at the laser, and splashing p electrode; extending the substrate; boiling n electrode at the back; slicing the sample into tubular core.
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Description

technical field

[0001] The invention relates to the use of quantum well hybrid and asymmetric double waveguide technology, and the common wet etching and photolithography process to manufacture a monolithic integrated semiconductor distributed feedback (DFB) laser and a mode spot converter. Background technique

[0002] The output spot of the semiconductor laser (LD) used in the optical fiber communication system is small (less than 2 μm in diameter) and has an elliptical shape; while the intrinsic spot of the glass single-mode fiber connected to the semiconductor laser is relatively large (about 8-10 μm in diameter) , in a symmetrical round shape. The difference in the size and shape of the eigenmode field between the laser and the single-mode fiber leads to a large mode mismatch between the two, low coupling efficiency, and small offset tolerance. In order to couple the elliptical spot output by the semiconductor laser to the optical fiber with high quality and high effic...

Claims

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