The invention discloses a mid-
infrared laser based on three-device on-
chip integration and a preparation method thereof, relates to the crossing field of a
semiconductor laser technology and an
optical communication technology, and solves the problem that the existing
quantum cascade laser QCL technology cannot give consideration to both high modulation rate and high power. An intermediate
infrared laser comprises a QCL unit, an EAM unit and an SOA unit which are sequentially arranged on a substrate. The substrate comprises a semi-insulating InP (
Indium Phosphate); the QCL unit, the EAM unit and the SOA unit share the same
ridge-shaped
waveguide structure and grow through
epitaxy butt joint. The method provided by the invention is suitable for a mid-
infrared band space communication scene with high requirements on the
laser modulation rate, the output power and the single-mode stability.