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87 results about "Gallium antimonide" patented technology

Gallium antimonide (GaSb) is a semiconducting compound of gallium and antimony of the III-V family. It has a lattice constant of about 0.61 nm. It has a band gap of 0.67 eV.

Double-surface polishing method for gallium antimonide wafer

The invention relates to a double-surface polishing method for a gallium antimonide wafer. The double-surface polishing method comprises the following steps of: grouping wafer thickness measurement; initially cleaning a wafer; adhering the wafer; polishing a back surface; dismantling the wafer; adhering the wafer and polishing a positive surface; secondly cleaning the wafer; placing the wafer with polished double surfaces in a solution prepared from cleaning liquid and purified water in volume ratio of 1:(3-10) for ultrasonic cleaning at 50-100 DEG for 10-30min, washing by using the purified water; corroding chemically: preparing corrosion liquid according to a proportion of CH3COOH, H2O and HF in volume ratio of (10-30):(5-15):1; and checking and packing. According to the double-surface polishing method for the gallium antimonide wafer, disclosed by the invention, the gallium antimonide (100) wafer with polished double surfaces can be machined in batch, the method is simple and practical, the maneuverability is strong, and the polished yield is up to 90%; simultaneously, a problem of oxidation of the polished gallium antimonide wafer is released. The gallium antimonide wafer polished by the double-surface polishing method disclosed by the invention is not larger than 20 microns in warping degree, not larger than 4 microns in wafer surface flatness, 0.1-0.2 micron in surface roughness and not larger than 5 microns in total thickness of the wafer, and the defects of the polished wafer, such as dirt, fog, scratch, particles, cracking, orange peel and crow claw, are not detected.
Owner:GRINM ELECTRO OPTIC MATERIALS

Semiconductor material polishing method and polishing solution for polishing gallium antimonide substrate

In order to overcome the defects that when a soft semiconductor material such as gallium antimonide is polished by adopting a CMP (Chemical Mechanical Polishing) process in the prior art, metal ions and the like contained in a polishing abrasive and a polishing solution are easily attached to the surface of a polished object, scratches are generated on the surface of the polished object, and the service life of the polishing solution is short, the invention provides a semiconductor material polishing method and a polishing solution for polishing a gallium antimonide substrate. According to the method, a semiconductor material with the Mohs hardness of 1.5-6 is polished. A first step is rough polishing, and a polishing solution containing a hard abrasive is adopted to conduct mechanical polishing on a semiconductor material substrate slice. A second step is medium polishing, and a medium polishing solution comprises a soft polishing abrasive, a weak acid oxidizing agent, organic acid, a hydrophilic nonionic surfactant and deionized water. A third step is fine polishing, and a fine polishing solution comprises a weak acid oxidizing agent, organic acid and deionized water. When the polishing method is adopted for polishing a semiconductor material, corrosion pits and scratches are eliminated, pits are reduced, and a material with good surface roughness is obtained.
Owner:SUZHOU KUNYUAN OPTOELECTRONICS CO LTD

Gallium-antimonide-based semiconductor device provided with interface passivation layer and preparation method thereof

The invention discloses a gallium-antimonide-based semiconductor device provided with an interface passivation layer and a preparation method thereof. The gallium-antimonide-based semiconductor device provided with the interface passivation layer comprises a first conductive type impurity gallium antimonide substrate (101), a second conductive type impurity injection layer (102), a source electrode and drain electrode layer (103), a passivated gate medium (104) and a grid electrode (105) which are sequentially arranged from bottom to top. When the gallium-antimonide-based semiconductor device is prepared, an interface of the gallium antimonide semiconductor device is passivated by introducing plasma containing the fluorine element, and therefore a plurality of fluorine passivation interface layers are formed. Stable metal-fluorine keys are formed through fluorine passivation treatment, and volume defects in the gate medium and gate medium / gallium antimonide interface traps are obviously reduced. The metal-fluorine keys are reflected onto the gallium-antimonide-based semiconductor device, so gate leakage and interface-state density are reduced, and the stability and electrical properties of the device are further greatly improved.
Owner:SOUTHEAST UNIV

Preparation method of in-situ electrifying type indium arsenide/gallium antimonide superlattice semiconductor sample of transmission electron microscope

The invention belongs to the technical field of nanometer functional materials, and specifically relates to a preparation method of an of in-situ electrifying type indium arsenide/ gallium antimonidesuperlattice semiconductor sample of a transmission electron microscope. The preparation method comprises three steps of preparing high-temperature conductive adhesive, preparing a superlattice material transmission sample, and preparing an in-situ electrode, wherein the indium arsenide/ gallium antimonide superlattice semiconductor sample suitable for the characterization test of the transmissionelectron microscope can be prepared by oppositely adhering the conductive adhesive, and mechanically thinning and other processes, and then the sample is connected to a four-electrode transmission electron microscope sample stand through an enamel insulated wire, therefore, the in-situ electrifying test of the transmission electron microscope can be carried out. According to the preparation method, an arsenide/ gallium antimonide superlattice semiconductor is a classic and practical infrared photoelectric detecting device for researching the physical mechanism between a microstructure and current carrier property and the conveying mechanism of a current carrier in an electrifying working state, and the arsenide/ gallium antimonide superlattice semiconductor assists the design of photoelectric devices such as an infrared detector and a quantum cascade laser.
Owner:FUDAN UNIV

Surface cleaning method of gallium antimonide substrate and second-type antimonide-base superlattice material

The invention relates to a surface cleaning method of a gallium antimonide substrate and a second-type antimonide-base superlattice material. The method includes the steps of packing a sample into a high-vacuum chamber, wherein the vacuum degree is higher than 1*10 <-6> Torr; raising the temperature of the sample to a target temperature value and maintaining the temperature of the sample; releasing a beam of an atomic hydrogen source to cover the sample continuously for 1-50 minutes till oxidative products on the surface of the sample are completely removed, wherein the vacuum degree is 1*10 <-6> - 1*10 <-5> Torr during the process; closing the atomic hydrogen source, and executing a subsequent material generation process in the same vacuum system. According to the surface cleaning method,at a low temperature, through assistance of the atomic hydrogen, an oxidation layer and other remaining impurities on the surface are removed, so that damage caused by high temperature to the material surface or each interface of the superlattice can be avoided; the surface roughness of the material is low after cleaning, the subsequent generation of the material is greatly facilitated, and higher interface quality can be achieved.
Owner:SUZHOU KUNYUAN OPTOELECTRONICS CO LTD

Indium gallium antimonide crystal growing furnace with traveling wave magnetic field

The invention provides an indium gallium antimonide crystal growing furnace with a traveling wave magnetic field. The indium gallium antimonide crystal growing furnace comprises a magnetic field generation mechanism, a vertical lifting mechanism and a furnace body supporting mechanism. The magnetic field generation mechanism is composed of an iron core, a three-phase conduction insulated wire, andan insulated protective shell; the three-phase conduction insulated wire is connected to a power supply; the power supply generates electric current, and the electric current generates a travelling wave magnetic field in a horizontal coil. By applying a travelling wave magnetic field in the crystal growing furnace, when the direction of the lorentz force caused by the travelling wave magnetic field is downward, the melted material of indium gallium antimonide in a crucible is conveyed under the action of the lorentz force so that the convection process of the melted material can be accelerated and cold and hot area distribution in a furnace hearth can be more uniform. Meanwhile, a rectangular wave current generator is used for periodically controlling phase displacement signals of the three-phase current in the coil, so that uniform distribution of the melted material is facilitated, macrosegregation is obviously weakened, and indium gallium antimonide crystal ingots with lower dislocation and better crystal quality are obtained.
Owner:TIANJIN POLYTECHNIC UNIV

Method for controlling thickness of oxide layer on surface of gallium antimonide single crystal

The invention discloses a method for controlling the thickness of an oxide layer on the surface of a gallium antimonide single crystal, and the method comprises the steps: carrying out the dewaxing treatment of a gallium antimonide polished wafer through a wax melting agent diluent, and then washing the dewaxed gallium antimonide polished wafer with deionized water; the gallium antimonide polished wafer is placed in an organic solution to be treated and then washed with deionized water; treating the gallium antimonide polished wafer with a chemical corrosive liquid, and then washing the gallium antimonide polished wafer with deionized water; and the gallium antimonide polished wafer is subjected to nitrogen sealing after being dried. The wax melting agent diluent, the organic solution and the chemical corrosive liquid are sequentially used for conducting surface wax melting process treatment on the gallium antimonide polished wafer, adsorption of surface particles can be improved, a natural oxide layer generated on the surface can be removed, the contact time of gallium antimonide single crystals and the external environment is shortened, and therefore the thickness of the oxide layer on the surface of gallium antimonide is effectively controlled, and the surface quality of the gallium antimonide polished wafer is improved. The use requirements of epitaxial materials are met.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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