The invention discloses a high-speed
laser processing device and method for
ceramic substrate micropores, and aims to solve the problem of low
ceramic substrate micropore
processing efficiency. The device is characterized in that a
laser outputs
laser pulses to a
light beam forming unit, the laser pulses are expanded and collimated and then reach a focusing unit comprising a
galvanometer scanning head, and the focusing unit is used for focusing the
ceramic substrate micropores; the
galvanometer scanning head is connected with a high-speed micro-motion compensation mirror module, laser pulses reach a motion platform which continuously moves at a
constant speed in the
machining direction through a focusing unit, a sample table for bearing a workpiece is arranged on the motion platform, and a real-time position feedback device is arranged on one side of the motion platform. And the position feedback device, the
galvanometer scanning head, the high-speed micro-motion compensation mirror module and the laser are in
signal connection with a
control system, so that a laser pulse focus is always aligned with a target hole site. Real-time synchronous laser
machining of the platform in a high-speed continuous motion state can be achieved, the
machining efficiency reaches ten thousand holes in a second level, and meanwhile high precision and high quality of micropore machining are guaranteed.