Preparation method of flexible base material and thin film for vacuum reel-to-reel coating

Abstract

The invention discloses a method for preparing a flexible base material and film for vacuum roll-to-roll coating. The whole roll of stainless steel is used as the base material, and the first layer of lower electrode film is prepared using molybdenum sodium target material, which is formed by high-temperature CIGS evaporation. The sodium element will enter the CIGS film layer through the diffusion process to improve the efficiency of the battery. The buffer layer uses a sputtered zinc-magnesium-oxygen film layer to replace the traditional CdS film in the water bath method, so that the CIGS solar cell can realize the whole roll. Production, use the roll-to-roll sputtering machine to plate the lower electrode (MoNa), buffer layer (ZnMgO) and transparent conductive film (95ITO) layer, and then use the roll-to-roll evaporation machine to prepare the CIGS absorbing layer, so as to realize the production of CIGS battery in the whole world It is completed under a vacuum process to ensure large-area uniformity, greatly improve the production efficiency and yield of the cell, greatly reduce manpower hours, improve the quality and performance of the film, and meet the production needs of CIGS thin-film solar cells.

Description

technical field [0001] The invention relates to a preparation method of a flexible base material and a thin film for vacuum roll-to-roll coating, and belongs to the field of solar photovoltaics. Background technique [0002] The demand for global energy is increasing year by year. With the rising awareness of energy conservation and environmental protection, the development of renewable energy is a common goal in the world. In terms of renewable energy, regardless of hydropower, wind power, and geothermal power generation, it is necessary to use kinetic energy conversion to obtain conversion efficiency. Solar power generation is a power generation system that converts sunlight into electrical energy. There are no moving parts in a solar power generation system, unlike wind power, hydraulic power, geothermal power generation systems that require rotating machinery, so there will be no high temperature, high pressure and Noise and other troubles will not cause environmental bu...

AI Technical Summary

Problems solved by technology

[0008] In order to prepare a large number and large area of ​​the absorbing layer film, the current process method is to use the sputtering precursor and the post-selenization process, in which the early precursor metal The thin film is designed as a single element or binary alloy metal using multi-gun sputtering, which requires many process passes, long time and instability of the low melting point alloy process. However, because the precursor layer contains indium elements with low melting point, traditional coating The parameters will increase the surface roughness of the precursor film (>300nm), and the CIGS surface after high-temperature selenization in the future will not be able to achieve ideal planarization, which is not conducive to the preparation of subsequent buffer layers and optical window layers, and the formation of absorption The temperature of the layer phase change is lowered, resulting in the subsequent selenization cannot continue to diffuse into the precursor thin film for reaction, making the selenization incomplete and the conversion efficiency cannot be effectively improved. Due to the above reasons, the manufacturing cost is increased and the process yield and production rate are reduced.

Moreover, before the present invention, CIGS solar cells were mostly produced in a monolithic manner, the mass production rate was low, the required labor was more, and the relative production cost could not be greatly reduced.

In addition, some people use roll-to-roll vapor deposition on PI to make CIGS batteries, which can meet the needs of lightweight, but because the process temperature cannot be raised (<300°C), it cannot form an effective and uniform CIGS phase, so The battery efficiency has been stuck at 5-10%, and it is still unable to break through

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