Quartz crucible with long service life and low deformation rate and preparation method thereof

A quartz crucible, low deformation technology, applied in glass manufacturing equipment, chemical instruments and methods, manufacturing tools, etc., can solve the problems of coating defects, quartz crucible surface defects, granular silicon oxide entry, etc., to improve the anti-oxidation performance , The effect of avoiding personal injury and prolonging the service life

Active Publication Date: 2020-12-29
无锡市尚领石英科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the crystal pulling operation, the bubbles will react with the molten silicon, causing part of the granular silicon oxide to enter the molten silicon, making the growing crystal structure mutate and unable to grow normally.
[0005] In addition, since the quartz crucible inevitably contains a very small amount of metal atoms, if the metal atoms dissociate to the surface of the quartz crucible, it will not only easily cause surface defects of the quartz crucible, but also easily react with single crystal silicon, thus affecting the finished product of single crystal silicon Rate
[0006] In order not to dissociate a very small amount of metal atoms in the quartz crucible, prolong the service life of the quartz crucible, and reduce the deformation rate of the quartz crucible during use, the existing technology is to coat the inner wall of the quartz crucible, such as the most common barium coating process : The barium hydroxide solution is sprayed on the inner wall of the quartz crucible, but due to the limitation of the spraying process itself, it is easy to cause the formation of coating defects, which cannot meet the special purpose of the quartz crucible

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] A quartz crucible with high life and low deformation rate, comprising a quartz crucible body and a ceramic coating; the ceramic coating includes a silicon oxide coating, a zirconium boride coating and a silicon nitride coating, and along the inner wall of the quartz crucible body Coating in sequence to the outside.

[0034] A quartz crucible with high service life and low deformation rate and a preparation method thereof, the method comprising the following steps:

[0035] 1) The silica ore is obtained through gravity shaker, mechanical crushing, and microwave to obtain quartz sand; wherein, the enrichment ratio of the shaker is set to 4.8; the discharge diameter of the jaw crusher is adjusted to 0.177; the frequency of the microwave device is set to 1.35GHz, and the power The range is 200W, and the microwave processing time is set to 5min;

[0036] 2) Add quartz sand to the graphite mold and import it into the melting furnace;

[0037] 3) Vacuum the melting furnace f...

Embodiment 2

[0043] A quartz crucible with high life and low deformation rate, comprising a quartz crucible body and a ceramic coating; the ceramic coating includes a silicon oxide coating, a zirconium boride coating and a silicon nitride coating, and along the inner wall of the quartz crucible body Coating in sequence to the outside.

[0044] A quartz crucible with high service life and low deformation rate and a preparation method thereof, the method comprising the following steps:

[0045] 1) The silica ore is obtained through gravity shaker, mechanical crushing, and microwave to obtain quartz sand; wherein, the enrichment ratio of the shaker is set to 15.6; the discharge diameter of the jaw crusher is adjusted to 0.23; the frequency of the microwave device is set to 1.35GHz, and the power The range is 500W, and the microwave processing time is set to 6min;

[0046] 2) Add quartz sand to the graphite mold and import it into the melting furnace;

[0047] 3) Vacuum the melting furnace f...

Embodiment 3

[0053] A quartz crucible with high life and low deformation rate, comprising a quartz crucible body and a ceramic coating; the ceramic coating includes a silicon oxide coating, a zirconium boride coating and a silicon nitride coating, and along the inner wall of the quartz crucible body Coating in sequence to the outside.

[0054] A quartz crucible with high service life and low deformation rate and its preparation method and its preparation method, said method comprising the following steps:

[0055] 1) The silica ore is obtained through gravity shaker, mechanical crushing, and microwave to obtain quartz sand; wherein, the enrichment ratio of the shaker is set to 20.5; the discharge diameter of the jaw crusher is adjusted to 0.3; the frequency of the microwave device is set to 1.35GHz, and the power The range is 800W, and the microwave processing time is set to 8min;

[0056] 2) Add quartz sand to the graphite mold and import it into the melting furnace;

[0057] 3) Vacuum ...

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Abstract

The invention discloses a quartz crucible with a long service life and low deformation rate and a preparation method thereof. The quartz crucible comprises a quartz crucible body and a ceramic coating, the ceramic coating comprises a silicon oxide coating, a zirconium boride coating and a silicon nitride coating which are sequentially coated along the direction of the inner wall of the quartz crucible body; the silicon oxide coating is a nano silicon oxide liquid; wherein the zirconium boride coating comprises zirconium boride and nano silicon oxide liquid; and the silicon nitride coating comprises nano silicon carbide and nano silicon nitride. According to the quartz crucible with a long service life and low deformation rate and the preparation method thereof, the quartz crucible body iscoated with a coating, so that the situations of crystallization, cracking and deformation of the quartz crucible during crystal pulling high-temperature operation are avoided, and the quartz cruciblehas a long service life.

Description

technical field [0001] The invention relates to the technical field of crucible preparation, in particular to a quartz crucible with high service life and low deformation rate and a preparation method thereof. Background technique [0002] Fused silica crucible has extremely small thermal expansion coefficient, high high temperature viscosity and hardness, excellent dielectric properties, thermal shock resistance and chemical corrosion resistance, etc. It is used as a container for polysilicon materials in the process of polysilicon ingot casting . However, fused silica is prone to crystallization at high temperatures, which leads to deformation of fused silica ceramics during sintering and high-temperature use, which seriously affects the performance and reliability of the product, and also reduces the service life of the crucible. [0003] The raw material of quartz crucible is quartz sand, which is a solid particle obtained by crushing and purifying silica ore, especiall...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B28/06C30B29/06C03B5/02C03B19/09C03B20/00C03C17/34
CPCC30B28/06C30B29/06C03B20/00C03B5/025C03C17/3488C03B19/09
Inventor 张国忠高文送汪涵朱海江李国洪朱燕亚
Owner 无锡市尚领石英科技有限公司
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