Metal nanoparticle composite two-dimensional material heterostructure sensor and preparation method thereof
A technology of metal nanoparticles and metal nanostructures, applied in the field of biosensing, can solve problems such as undocumented two-dimensional material heterostructures, and achieve the effects of sensitive electrical signal detection capabilities, low cost, and simple methods
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Embodiment 1
[0038] (1) Put the copper foil into the acetone solution for ultrasonication, wash it three times with alcohol solution, and then thoroughly wash it three times with deionized water; put the clean copper foil in the middle of the quartz tube in the quartz tube furnace, close the vacuum tube furnace, and check Airtightness; use mechanical pump and molecular pump to evacuate to below 0.013 Pa; after the temperature rises to 100°C, flow hydrogen with a flow rate of 20 sccm; after the temperature rises to 1000°C, keep the temperature for 0.5h to anneal the copper foil; 0.5 After h, feed methane gas with a flow rate of 40 sccm, keep at this temperature and flow rate for 30 minutes, and then turn off the methane gas; turn off the heater, turn off the hydrogen gas when the temperature drops to 100°C, and wait for natural cooling to room temperature to take out the grown single crystal single-layer graphene, and store the material under vacuum conditions;
[0039](2) Place the above-m...
Embodiment 2
[0050] (1) Wash the copper foil three times with acetone and hydrochloric acid solution, and then thoroughly wash it three times with deionized water; put the clean copper foil in the middle of the quartz tube in the quartz tube furnace, close the vacuum tube furnace, and check the air tightness; Vacuum to 0.67 Pa; after the temperature rises to 200°C, flow in hydrogen with a flow rate of 40 sccm, and the air pressure becomes 5.3 Pa; after the temperature rises to 1000°C, keep the temperature for 1 hour to anneal the copper foil; Methane gas, the pressure becomes 7.9 Pa, keep at this temperature and flow rate for 25min, then turn off the methane gas; turn off the heater, turn off the hydrogen when the temperature drops to 100°C, let it cool naturally to room temperature, and take out the grown single crystal monolayer graphene, and store the material under vacuum;
[0051] (2) Place the copper foil with single-layer single-crystal graphene film on 280g / L FeCl 3 Etching in the...
Embodiment 3
[0059] (1) Put the copper foil into the acetone solution for ultrasonication, wash it three times with alcohol solution, and then thoroughly wash it three times with deionized water; put the clean copper foil in the middle of the quartz tube in the quartz tube furnace, close the vacuum tube furnace, and check Airtightness; use mechanical pump and molecular pump to evacuate to below 0.013 Pa; after the temperature rises to 200°C, flow in hydrogen gas with a flow rate of 20 sccm; after the temperature rises to 900°C, keep the temperature for 1.5h to anneal the copper foil; 1.5 After h, feed methane gas with a flow rate of 40 sccm, keep at this temperature and flow rate for 30 minutes, and then turn off the methane gas; turn off the heater, turn off the hydrogen gas when the temperature drops to 100°C, and wait for natural cooling to room temperature to take out the grown single crystal single-layer graphene, and store the material under vacuum conditions;
[0060] (2) above-ment...
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