Unlock instant, AI-driven research and patent intelligence for your innovation.

Laser-assisted method for improving floating of ITO (indium tin oxide) surface of LED (light-emitting diode) chip

A LED chip, laser-assisted technology, applied in the direction of using liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve the problem that ITO film materials are not resistant to acid and alkali corrosion, cannot be cleaned with strong acids and strong alkalis, and have no Cleaning methods and other issues, to achieve the effect of improving surface quality, improving production yield, and simple formula

Active Publication Date: 2021-12-21
INSPUR SUZHOU INTELLIGENT TECH CO LTD
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Since the ITO film material is not resistant to acid and alkali corrosion, it cannot be cleaned with strong acid or strong alkali, while conventional organic and inorganic solution cleaning has no obvious improvement. Once surface contamination occurs, the chip can only be scrapped
Therefore, there is currently no effective cleaning method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Laser-assisted method for improving floating of ITO (indium tin oxide) surface of LED (light-emitting diode) chip
  • Laser-assisted method for improving floating of ITO (indium tin oxide) surface of LED (light-emitting diode) chip
  • Laser-assisted method for improving floating of ITO (indium tin oxide) surface of LED (light-emitting diode) chip

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] A method for laser-assisted improvement of ITO surface blooming of LED chips, specifically comprising the following steps:

[0056] S1: Configure the cleaning solution: in parts by mass, mix 1 part of corundum, 10 parts of sodium bicarbonate, 5 parts of sodium sulfide, 2 parts of sodium acetate, 12 parts of absolute ethanol, 2 parts of tetrachloroethylene, and 10 parts of dodecylsulfuric acid Sodium and 58 parts of pure water are configured as a mixed cleaning solution;

[0057] S2: Heat the prepared solution to 80°C, while ensuring that the solution is in a rotating state (a magnetic stirrer is used, and the stirring speed range is 500 rpm);

[0058] S3: put the red LED chip to be cleaned face up into the cleaning solution;

[0059] S4: The pulsed laser beam is perpendicular to the surface of the LED chip, adjust the laser focal length and spot size to completely cover the LED chip, and adjust the laser energy density to 0.3J / cm 2 ;

[0060] S5: Turn on the pulsed l...

Embodiment 2

[0063] A method for laser-assisted improvement of ITO surface blooming of LED chips, specifically comprising the following steps:

[0064] S1: Configure the cleaning solution, in parts by mass, mix 1 part of corundum, 5 parts of sodium bicarbonate, 3 parts of sodium sulfide, 1 part of sodium acetate, 15 parts of absolute ethanol, 5 parts of sodium lauryl sulfate and 70 parts of pure water Configured as a mixed solution;

[0065] S2: Heat the prepared solution to 65°C, while ensuring that the solution is in a rotating state (a magnetic stirrer is used, and the stirring speed range is 300 rpm);

[0066] S3: put the red LED chip to be cleaned face up into the cleaning solution;

[0067] S4: The pulsed laser beam is perpendicular to the surface of the LED chip, adjust the laser focal length and spot size to completely cover the LED chip, and adjust the laser energy density to 0.1J / cm 2 ;

[0068] S5: Turn on the pulsed laser to clean the surface of the LED chip for 12 minutes; ...

Embodiment 3

[0071] A method for laser-assisted improvement of ITO surface blooming of LED chips, specifically comprising the following steps:

[0072] S1: Configure a cleaning solution, in parts by mass, mix 2 parts of corundum, 10 parts of sodium bicarbonate, 5 parts of sodium sulfide, 3 parts of sodium acetate, 14 parts of absolute ethanol, 3 parts of tetrachloroethylene, and 9 parts of dodecylsulfuric acid Sodium and 54 parts of pure water are configured into a mixed solution;

[0073] S2: Heat the prepared solution to 70°C, while ensuring that the solution is in a rotating state (a magnetic stirrer is used, and the stirring speed range is 400 rpm);

[0074] S3: put the red LED chip to be cleaned face up into the cleaning solution;

[0075] S4: The pulsed laser beam is perpendicular to the surface of the LED chip, adjust the laser focal length and spot size to completely cover the LED chip, and adjust the laser energy density to 0.4J / cm 2 ;

[0076] S5: Turn on the pulsed laser to c...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle sizeaaaaaaaaaa
wavelengthaaaaaaaaaa
Login to View More

Abstract

The invention discloses a laser-assisted method for improving floating of an ITO (indium tin oxide) surface of an LED (light-emitting diode) chip. The method comprises the following steps: firstly, preparing a cleaning solution containing carborundum, sodium bicarbonate, sodium sulfide, sodium acetate and the like, heating the solution, then immersing the floating surface of the chip into the cleaning solution upwards, and meanwhile, ensuring that the solution is in a rotating state to make the pollutants on the surface of the chip quickly dissolved and removed; adjusting the focal length and energy of a pulse laser beam, vertically projecting the pulse laser beam to the surface of the chip, and rapidly softening and decomposing organic pollutants on the surface of the chip under the action of the laser beam, and dissolving the organic pollutants in a cleaning solution at the same time; and after the cleaning is finished, washing the LED chip to remove the residual cleaning solution on the surface, and then drying the chip to obtain the LED chip with the clean surface. According to the method, pollution and floating on the surface of the LED chip can be thoroughly removed, the method is suitable for batch production, the surface of the chip is not damaged, the production yield of the chip is improved, and the method is simple, easy to implement and low in cost investment.

Description

technical field [0001] The invention relates to a laser-assisted method for improving the blooming of the ITO surface of an LED chip, and belongs to the technical field of LED chip manufacturing. Background technique [0002] LED (Light Emitting Diode) chip is a solid-state semiconductor device. LED chip has many advantages such as low power consumption, pure chromaticity, long life, small size, fast response time, energy saving and environmental protection, etc. It is widely used in lighting, display screen, transportation Signal lights, car lights and special lighting. ITO (Indium Tin Oxide) conductive film has high transmittance and low surface resistivity, and is widely used in the LED field as a transparent conductive layer in the LED chip process for current expansion and improvement of electro-optic conversion efficiency. [0003] The production process of LED chips involves multi-step processes, such as epitaxial wafer production and processing, evaporation of ITO c...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L33/00H01L21/02B08B3/08B08B3/10B08B7/00C11D1/24C11D3/04C11D3/10C11D3/12C11D3/14C11D3/20C11D3/24C11D3/60
CPCH01L33/005H01L21/02057B08B3/08B08B3/10B08B7/0042C11D1/24C11D3/10C11D3/046C11D3/201C11D3/2079C11D3/24C11D3/14C11D3/124
Inventor 胡夕伦安妮
Owner INSPUR SUZHOU INTELLIGENT TECH CO LTD