63results about "Inlet pressure control" patented technology

An outlet assembly for hybrid pressure and flow regulation includes a first orifice of a first size, a second orifice of a second size that is larger than the first size, and a mechanism that automatically moves the first orifice between a first position, a second position, and a third position. When the first orifice is in the first position, the flow of gas passes through the first orifice, which regulates a flow rate of the flow of gas through the second orifice. When the first orifice is in the second position, the flow of gas primarily bypasses the first orifice and flows through the second orifice with a first specific flow rate. When the first orifice is in the third position, the flow of gas primarily bypasses the first orifice and flows through the second orifice with a second specific flow rate.

There are provided a pressure control method and apparatus and a semiconductor process device. The method includes: acquiring an actual pressure value in a process chamber in real time (S1); calculating a pressure variation of the actual pressure value (S2); and comparing the pressure variation with a preset value set in advance, controlling, in a case where the pressure variation is less than or equal to the preset value, an actuator of a pressure regulating valve to maintain a current frequency, controlling, in a case where the pressure variation is greater than the preset value, a frequency of the actuator to decrease according to a preset functional relationship until the actual pressure value reaches a target pressure value (S3), and controlling an opening change of the pressure regulating valve based on the frequency. The method solves a problem of pressure overshoot in a rapid control process of a chamber pressure, and reduces an influence of a pressure fluctuation on the process.

A gas supply line control system and method for preventing flow reversal due to an upstream pressure drop in a natural gas supply line, the system and method include setting a threshold low pressure for the upstream gas flow, continually sensing the upstream pressure, activating a trigger valve when the upstream pressure falls below the threshold low pressure, and closing a control valve in response to the trigger valve to prevent reversal of flow in the gas supply line.

Method for providing controlling parameters for controlling a vacuum valve (10) to control the pressure in a process chamber (1) by means of the vacuum valve (10), wherein the method comprises performing a valve calibration step by providing a calibration chamber having an upstream gas inlet and the vacuum valve to control a downstream gas outlet flow, providing defined gas flow into the calibration chamber, running a valve calibrating cycle with defined variation of a valve position of a valve closure of the vacuum valve, measuring a chamber pressure in the calibration chamber, modelling a controlling behavior for the vacuum valve based on the measured chamber pressure and the related variation of the valve position and deriving respective calibration controlling parameters for the vacuum valve based on the controlling behavior. The method comprises performing a process calibration step by providing a process chamber comprising at least an upstream gas inlet and the vacuum valve to control a downstream gas outlet flow, measuring an actual pressure in the process chamber, performing a pre-process step with the process chamber (1) with given process target pressure and given process timing, controlling the actual pressure in the process chamber by means of the vacuum valve to provide the process target pressure with the process timing and deriving process controlling parameters based on the controlling. Further, the process controlling parameters and / or the calibration controlling parameters are provided to control a process cycle.

A system for regulating an axial biasing force applied to a stacked set of packing elements mounted within stationary equipment, comprising a packing loading assembly for sealing a process fluid within the stationary equipment and for applying the axial biasing force to the packing elements via a pressurized fluid from a pressure regulator. The packing loading assembly includes a gland element for mounting to the stationary equipment by a plurality of gland bolts, and an external actuation subsystem for coupling to at least one of the plurality of gland bolts for applying an axial actuation force directly to the gland element in response to the pressurized fluid. The gland element in response to the axial actuation force applies the axial biasing force to the packing elements.

A system for regulating an axial biasing force applied to a stacked set of packing elements mounted within stationary equipment, comprising a packing loading assembly for sealing a process fluid within the stationary equipment and for applying the axial biasing force to the packing elements via a pressurized fluid from a pressure regulator. The packing loading assembly includes a gland element for mounting to the stationary equipment by a plurality of gland bolts, and an external actuation subsystem for coupling to at least one of the plurality of gland bolts for applying an axial actuation force directly to the gland element in response to the pressurized fluid. The gland element in response to the axial actuation force applies the axial biasing force to the packing elements.

A disclosed example flow ratio controller includes an inlet configured to receive an input process gas stream; an inlet pressure sensor configured to measure an inlet pressure; a first outlet and a second outlet configured to output a first portion and a second portion of an input process gas stream; a first flow valve and a second flow valve configured to control a flow of input process gas to the first outlet and the second outlet; a first position sensor and a second position sensor configured to measure valve positions of the first flow valve and the second flow valve; a first outlet pressure sensor and a second outlet pressure sensor configured to measure outlet pressures of the first outlet and the second outlet; and control circuitry configured to control the first flow valve and the second flow valve using a valve flow model and based on a predetermined flow ratio of the first outlet and the second outlet, the inlet pressure, the first valve position and the second valve position, and the first outlet pressure and the second outlet pressure.

The present invention relates to a vacuum pressure control system. In a vacuum pressure control system capable of easily calculating the optimal valve opening of a vacuum control valve required to make the pressure value of a vacuum chamber a target value, a control device (70) includes a mapping program (702a). Before performing pressure value control, the mapping program (702a) approximates the relationship between the pressure value in the vacuum chamber (11) and the flow rate of a process gas to a linear function (LF11) to (LF20), and stores the linear function (LF11) to (LF20) in the control device (70). The control device (70) includes a valve opening calculation program. The valve opening calculation program (702b) calculates the optimal valve opening (VO) of the vacuum control valve (30) required to make the pressure value in the vacuum chamber (11) the target value (Pt) when supplying the process gas at a prescribed flow rate based on the linear functions (LF11) to (LF20) before performing pressure value control. The control device (70) adjusts the valve opening of the vacuum control valve (30) based on the optimal valve opening (VO), thereby enabling control to be performed so that the pressure value in the vacuum chamber (11) is the target value (Pt).

Embodiments generally relate to a system for cooling computing devices using liquid immersion. An exemplary system includes a plurality of open cooling tanks, each cooling tank defining an interior volume for receiving a computing device and for receiving a non-conductive liquid coolant, a coolant supply line including a supply header line and a plurality of supply branch lines, each supply branch line fluidly connecting the supply header line to a respective cooling tank, the supply header line having a diameter greater than the diameter of the supply branch line, and a coolant return line including the return header line and the plurality of return branch lines. a refrigerant return line, each return branch line fluidly connecting the return header line to a respective cooling tank, the return header line having a diameter greater than the diameter of the return branch line; at least one heat exchanger; and a pump system fluidly connected to the at least one heat exchanger, the supply header line, and the return header line, for causing liquid refrigerant to flow in a closed circuit via the supply and return branch lines, through the at least one heat exchanger, and through each tank simultaneously.

A pressure regulating valve includes a body having a pressure regulating chamber into which a working liquid flows and an attachment hole fluidly coupling with the pressure regulating chamber, a valve seat assembly fitted in the attachment hole, wherein the valve seat assembly includes a surplus liquid discharge path fluidly coupled with the pressure regulating chamber, a piston configured to open and close an opening of the surplus liquid discharge path in the pressure regulating chamber, a valve seat seal forming a seal between the valve seat assembly and the body in the attachment hole in a liquid-tight manner and a return flow path fluidly coupling an inside of the attachment hole to the surplus liquid discharge path. Wherein the valve seat seal is located between the return flow path and the pressure regulating chamber.

A pressure stabilising valve (100) is described, comprising: an inlet chamber (120), an outlet chamber (125), a cylindrical hole (130) adapted to make the inlet chamber (120) communicate with the outlet chamber (125), a shutter element (135) provided with a stem (140) coaxially fitted into the cylindrical hole (130), a spring (210) adapted to push the shutter element (135) towards a first end-of-stroke position, wherein the stem (140) defines with the cylindrical hole (130) a passage port which leaves open the communication between the inlet chamber (120) and the outlet chamber (125), and a pushing surface (185) radially protruding with respect to the stem (140) and adapted to at least partially delimit the inlet chamber (120), which is adapted to transform the pressure prevailing in the inlet chamber (120) into a force that pushes the shutter element (135) in contrast with the action of the spring (210) towards a second end-of-stroke position, progressively increasing the passage port between the stem (140) and the cylindrical hole (130).

A cooling tank for cooling a computing device using liquid immersion is disclosed, the cooling tank comprising: a container configured to receive a coolant in a cavity of the container; a separation panel dividing the container cavity into a cooling space and a return space; a perforated panel connected to the container and the separation panel to divide an inlet space from the cooling space; a racking system configured to support a computing device within the cooling space; a coolant inlet conduit configured to discharge the coolant into the inlet space; and a coolant outlet conduit disposed within the return space, wherein perforations defined in the perforated panel allow passage of the coolant from the inlet space to the cooling space for cooling the computing device within the cooling space, and wherein a top portion of the separation panel is disposed farther from the bottom panel than an inlet of the coolant outlet conduit.

The cooling system (100) includes a plurality of cooling tanks (101), each of the cooling tanks (101) configured to contain a liquid coolant; a set of connecting pipes (106) configured to fluidly connect the plurality of cooling tanks (101); a set of inlet pipes (102) fluidly connected to the plurality of cooling tanks (101) to supply liquid coolant into the plurality of cooling tanks (101); a set of outlet pipes (103) fluidly connected to the plurality of cooling tanks (101) to discharge liquid coolant carrying heat absorbed from the computing device (520) out of the plurality of cooling tanks (101); a heat exchanger (104) fluidly connected to each of the set of inlet pipes (102) and each of the set of outlet pipes (103); and a coolant pump (105) fluidly connected to each of the set of outlet pipes (103).

The invention relates to a gas inlet system (10) for controlled inlet of a fluid into a vacuum process chamber (3), wherein the gas inlet system (10) comprises a gas inlet valve (20) with a gas passage unit having an inner volume, wherein the gas passage unit comprises a sealing surface in the inner volume. The gas inlet valve (20) further comprises an adjustment element projecting into the inner volume and having a valve disk which is arranged inside the inner volume, a drive unit which is coupled to the adjustment element outside the gas passage unit and provides an adjustment of the adjustment element along an adjustment axis and a flexible sealing membrane which is attached to the gas passage unit and to the adjustment element and atmospherically separates the drive unit from the inner volume. The drive unit comprises a pneumatic drive cylinder, and the gas inlet valve (20) comprises a restoring element configured and arranged to apply a restoring force on the adjustment element. The gas inlet system (10) comprises a pressurization unit (40) connected to the drive cylinder for defined pressurization of the drive cylinder, wherein the pressurization unit (40) is configured to provide variable pressure and to vary and set an inside pressure of the drive cylinder, and a controlling unit (50) configured to receive a controlling parameter providing a target state for the gas inlet system (10), and to control the pressurization unit (40) based on the controlling parameter so that the inside pressure of the drive cylinder is varied so that an actual state of the gas inlet system is approached to the target state or corresponds with the target state.

An inner component assembly for a regulator can include a cage and a plug assembly. The cage can include a peripheral wall defining an opening and a plurality of cage holes formed in the peripheral wall. The plug assembly can include a plug and a sealing element and can be configured to be movably received within the opening such that the sealing element selectively contacts an inner surface of the cage to vary a flow area through the plurality of cage holes depending on a position of the plug.

A cooling tank for cooling computing devices using liquid immersion is disclosed. The cooling tank comprises: a container configured to receive coolant in a cavity of the container; a separation panel dividing the container cavity into a cooling space and a return space; a perforated panel connected to the container and the separation panel to partition an inlet space from the cooling space; a racking system configured to support the computing devices within the cooling space; a coolant inlet conduit configured to release the coolant into the inlet space; a coolant outlet conduit disposed within the return space; wherein perforations defined in the perforated panel allow passage of the coolant from the inlet space into the cooling space to cool the computing devices therein; and wherein a top portion of the separation panel is disposed further from the bottom panel compared to an inlet of the coolant outlet conduit.

Disclosed is a signaling beacon that includes an infrared or thermal energy emission system using fluid such as water for use in infrared signaling without the need for more complicated electronic systems. The beacon includes a pump coupled to a porous media emission structure that selectively allows fluid in and out of the. The apparatus features a porous structure that generate one or more fluid structures such as droplets or other fluid shapes that effectively increase or decrease fluid surface area on the fluid emission structure and thereby increase or decrease energy emissions in relation to the fluid emission structure. The control system can selectively modulate pressure / fluid transfer via the fluid pump to alter energy emission according to a modulation pattern that can be detected at a distance and recognized as a known signal.

Method for providing controlling parameters for controlling a vacuum valve (10) to control the pressure in a process chamber (1) by means of the vacuum valve (10), wherein the method comprises performing a valve calibration step by providing a calibration chamber having an upstream gas inlet and the vacuum valve to control a downstream gas outlet flow, providing defined gas flow into the calibration chamber, running a valve calibrating cycle with defined variation of a valve position of a valve closure of the vacuum valve, measuring a chamber pressure in the calibration chamber, modelling a controlling behavior for the vacuum valve based on the measured chamber pressure and the related variation of the valve position and deriving respective calibration controlling parameters for the vacuum valve based on the controlling behavior. The method comprises performing a process calibration step by providing a process chamber comprising at least an upstream gas inlet and the vacuum valve to control a downstream gas outlet flow, measuring an actual pressure in the process chamber, performing a pre-process step with the process chamber (1) with given process target pressure and given process timing, controlling the actual pressure in the process chamber by means of the vacuum valve to provide the process target pressure with the process timing and deriving process controlling parameters based on the controlling. Further, the process controlling parameters and / or the calibration controlling parameters are provided to control a process cycle.

A fluid handling protection system configured to prevent cavitation in a first pump can include a first pump, a first pump fluid inlet line, a first pump fluid outlet line, a first pump drive unit, wherein the first pump drive unit is operatively coupled to the first pump, a first pressure sensor, and a control unit, wherein the control unit is operatively coupled to the first sensor and the first pump drive unit.

A cooling system for cooling computing devices includes multiple cooling tanks, a set of inlet pipes, a set of outlet pipes, a heat exchanger fluidly connected to each of the set of inlet pipes to supply the liquid coolant, and a pump configured to facilitate circulation of the liquid coolant through the multiple cooling tanks, the set of inlet pipes, the set of outlet pipes, and the heat exchanger. Each cooling tank comprises a separation panel to separate the tank into a cooling space fluidly coupled to the inlet pipe and a return space fluidly coupled to the outlet pipe. Each cooling tank further comprises a coolant distribution panel including multiple spaced groups of holes, the coolant distribution panel extending in the cooling space to cover the coolant inlet so as to regulate pressure of the liquid coolant entering the cooling space.

A pressure regulating valve includes a body forming a pressure regulating chamber for regulating a pressure of a working liquid, an attachment hole provided in the body and fluidly coupled with the pressure regulating chamber, a valve seat assembly fitted in the attachment hole and forming a surplus liquid discharge path for discharging the working liquid in the pressure regulating chamber, a piston partially positioned inside the pressure regulating chamber, and a valve seat seal located in the attachment hole and positioned between the body and the valve seat assembly. The valve seat assembly includes a return flow path opening provided in an outer peripheral surface of the valve seat assembly at a position facing an inner peripheral surface of the attachment hole, and a return flow path fluidly coupling the return flow path opening and the surplus liquid discharge path.

A coolant system is arranged to be driven by a prime mover of an aircraft. The coolant system comprises a fluid circuit with a fluid therein, the fluid for cooling an electricity generator located in the fluid circuit. The fluid circuit comprises: a cooling path passing via at least one cooled component of the generator; a first fluid flow source configured to deliver a first fluid flow to the cooling path; a second fluid flow source configured to generate a second fluid flow; and a valve arrangement configured to selectively direct at least a proportion of the second fluid flow away from the cooling path in dependence on a measured operational parameter of the generator. An aircraft propulsion system and an aircraft can also include the coolant system.

To provide flow ratio controllers and precision gas distribution systems.SOLUTION: A flow ratio controller includes: an inlet that receives an inflow process gas flow; an inlet pressure sensor that measures an inlet pressure; a first outlet and a second outlet that output a first portion and a second portion of the inflow process gas flow; a first flow valve and a second flow valve that control the inflow process gas flow to the first outlet and the second outlet; a first position sensor and a second position sensor that measure valve positions of the first flow valve and the second flow valve; a first outlet pressure sensor and a second outlet pressure sensor that measure outlet pressures of the first outlet and the second outlet; and control circuitry configured to control the first flow valve and the second flow valve using a valve flow model and based on a predetermined flow ratio for the first outlet and the second outlet, the inlet pressure, the first and second valve positions, and the first and second outlet pressures.SELECTED DRAWING: Figure 1

A back pressure regulator includes: a body including: a process surface including at least one inlet orifice and a plurality of outlet orifices; an inlet port communicating with an exterior of the body and with the at least one inlet orifice; an outlet port communicating with the exterior of the body and with the outlet orifices; a reference housing defining a reference cavity; a diaphragm secured between the body and the reference housing such that the diaphragm contacts the process surface, the diaphragm movable between a closed position and an open position; a transfer assembly disposed in the reference cavity, positioned against the reference side of the diaphragm; and an actuator configured to apply a force against the transfer assembly, in response to an electrical input.

This gas supply control assembly is of the type comprising at least one inlet (3) suitable for being made in fluid communication with at least one gas cylinder, and an outlet (7) suitable for being made in fluid communication with a gas-consuming appliance, and means (15) for detecting the gas pressure in a chamber communicating with said outlet (7).

The present invention relates to a pressure control valve (51) for controlling a fluid pressure, in particular for ventilating the crankcase of an internal combustion engine of a motor vehicle, the pressure control valve comprising: a valve housing (53) having a fluid inlet (55), a fluid outlet (59) and a valve seat (63); a valve member (65) having an in particular conically tapered closing element (67), the valve member (65) being movable between a closed position, in which the closing element (67) is in sealing contact with the valve seat (63) in order to close the fluid outlet (59), and an open position, in which the closing element releases the valve seat (63) and opens the fluid outlet (59); a diaphragm (69), in particular a convoluted diaphragm, for actuating the valve member; and a shielding device (71), such as a shielding plate, for shielding the diaphragm (69) from the fluid; the valve member (65) extending through the shielding device (71) without contact and guidance.

A pressure regulating system (10) for use with a stationary equipment for applying a substantially uniform force or load to a stacked set of packing elements (110). The force applied to the packing elements (110) can be regulated or controlled in real time and in a remote manner. The seal includes an axially movable follower element (70) that can be energized by pressurized fluid to move between a pre-loaded position where the follower element (70) does not apply an axial load to the packing elements (110) to a loaded position where the follower element (70) applies the axial load to the packing elements (110).

A device that includes an electrochemical cell that includes a rigid housing, electrodes that comprises an anode, a cathode, and an adjustable pressure element configured to assert a controlled pressure on at least one of the electrodes. The controlled pressure is set to a first value during a first point in time and is set to a second value during a second point in time. The electrodes and the adjustable pressure element are located within the rigid housing.

A time-variant gas-flow parameter ({P}|13) is applied to a pressure-control device (163) in a gas-collecting main (183) of an offtake piping system (143, 143', 183) of at least one stamp-charging coke-oven (103) that is adapted to process a coal-cake (113). The parameter ({P}| 3) is a parameter value sequence (503) that is provided by a computer (203) with a pre-trained neural network (253). The computer (203) receives a set (303) of input parameters ({X}|3), with a modality parameter set ({X0}) that represents a charging modality by that the coal-cake (113) is to be inserted into the stamp-charging coke-oven (103), and a coal-cake property parameter set ({X1}) that represents a property of the coal-cake (113) before insertion. The neural network (253) has been trained with historical data-sets of input parameters from reference operations and with historical sequences of time-variant gas-flow parameters as the ground-truth.