Silicon substrate top emission organic light emitting microdisplay and method for producing same

Abstract

The invention relates to a silicon substrate top emission organic light emitting microdisplay and method for producing the same. An organic light emitting device is arranged on the surface of a silicon-based chip, and a driving circuit and a controlling circuit of the organic light emitting device are integrated in the silicon-based chip. The structure (from bottom to top) of the microdisplay is a monocrystalline silicon substrate, the driving circuit, a top through-hole layer and a top through-hole, a pixel anode and a common-cathode, an organic layer, a transparent cathode layer, a multi-layer film packaging layer, a color filtering layer and a glass sealing cap, wherein the pixel anode adopts a vertical five-layer structure and the five layers are titanium, titanium nitride, aluminum, titanium and titanium nitride; the organic layer comprises at least a hole transporting layer, a multi-layer organic light emitting layer and an electron transporting layer. The organic light emitting pixel unit area of the microdisplay is less than 100 square microns and the pixel resolution is more than 640*480. Besides, a processing procedure of chip cutting is performed before production of the organic light emitting layer and the film packaging layer, and various masks are used for producing organic displaying devices, so that laser etchers with high cost cannot be introduced.

Description

technical field [0001] The invention relates to a silicon-based top-emission organic light-emitting microdisplay and a preparation method thereof, and is characterized in that the silicon chip structure and the anode structure of the silicon-based organic light-emitting display. Background technique [0002] Among many OLED display products, microdisplays have begun to develop in recent years, and can be applied to head-mounted video players, head-mounted home theaters, head-mounted virtual reality simulators, head-mounted game consoles, pilot helmet systems, individual soldiers, etc. Combat systems, infrared night vision devices, head-mounted medical diagnostic systems, etc. The performance of OLED microdisplays is better than that of the current common liquid crystal on silicon (LCoS) microdisplays. Its main advantages are: extremely fast response speed (<1us), excellent low temperature characteristics (operating temperature range -40℃~+85℃), power consumption Low, goo...

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Problems solved by technology

[0004] Chinese patent 101447509 and Chinese patent 101459226 disclose a production method of a top-emitting organic display and its anode structure, but this method requires secondary processing of the organic light-emitting anode material after taking out the wafer from the CMOS foundry. Switching between different processes is easy to introduce pollution. On the other hand, it is necessary to build a new dedicated production line with an investment of over 100 million

Chinese patent 101393891A discloses a method for preparing a silver electrode on the surface of a silicon-based organic light-emitting display, and Chinese patent 101697369 and Chinese patent 100496175C respectively disclose two methods for preparing spacers for silicon-based organic light-emitting micro-display devices, but these methods also exist Due to the pollution problem caused by secondary processing, mass production is difficult and the investment cost is high, and these patents only involve the pixel anode surface processing technology, and do not point out the structure and production process of the entire silicon-based microdisplay

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