Spherical cerium oxide porous abrasive and its use in ultra-precision polishing

A cerium oxide, ultra-precise technology, applied to polishing compositions containing abrasives, inorganic chemistry, grinding devices, etc., can solve the complex synthesis process of porous abrasives, difficult to control the morphology and structure of the final product of porous abrasive particles, etc., Achieve the effect of regular shape, low cost and good dispersion

Active Publication Date: 2014-05-28
沧州恒兴铸业有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, for ultra-smooth surface processing, monodisperse spherical abrasives are the most ideal polishing media materials; in addition, the synthesis process of porous abrasives in the

Method used

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  • Spherical cerium oxide porous abrasive and its use in ultra-precision polishing
  • Spherical cerium oxide porous abrasive and its use in ultra-precision polishing
  • Spherical cerium oxide porous abrasive and its use in ultra-precision polishing

Examples

Experimental program
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Example Embodiment

[0028] Example 1:

[0029] First, place the micrococcus in the culture medium (the formula is 200 mL of distilled water, 1 g of glucose, 0.5 g of sodium chloride, 1 g of fish meal peptone, 4 g of agar, and 0.5 g of yeast extract), and then place the petri dish at a constant temperature. In a humid chamber, the cocci were cultured at a temperature of 24°C and a relative humidity of 40%. Coccus templates with a size of 100 nm to 200 nm can be obtained after 4 days of culture.

[0030]Weigh 1 g of the coccus template obtained by the above conditional culture into a beaker, add 95 mL of distilled water and 5 mL of absolute ethanol in sequence, and then add hydrochloric acid dropwise to adjust the pH of the system to 3, and stir evenly with a magnetic stirrer. Subsequently, 2.52 g of cerium nitrate was added, the concentration of cerium ions was adjusted to 0.02 mol / L, fully stirred under magnetic stirring conditions, and then immersed for 66 h; Slowly dry in a blast drying ove...

Example Embodiment

[0034] Example 2:

[0035] This example is basically the same as the above-mentioned Example 1, except that: the concentration of cerium ions in the solution system is 0.01 mol / L, and the immersion time is 70h; the fully immersed coccus template is centrifuged and placed at 20 °C for blasting. Dry slowly in a drying oven, and then calcined the coccus template after impregnation and drying at 400 °C for 1 h under nitrogen protection conditions; then put the pre-calcined product in a muffle furnace, Secondary calcination was carried out at 300 °C for 1 h.

[0036] Scanning electron microscope photo and transmission electron microscope photo of the porous cerium oxide abrasive sample prepared in Example 2, the nitrogen adsorption and desorption curve is similar to that in Example 1, and its specific surface area is about 48.6 m 2 / g, the pore volume is about 0.31 cm 3 / g, significantly higher than the traditional cerium oxide solid particles (16.3 m 2 / g, 0.08 cm 3 / g)....

Example Embodiment

[0039] Example 3:

[0040] This example is basically the same as the above-mentioned Example 1, except that the concentration of cerium ions in the solution is 0.5 mol / L, immersion for 48 hours, centrifugation of the fully immersed coccus template, and placing in a blast drying oven at 50 °C Slow drying, and then the coccus template after impregnation and drying was first calcined at 600 ℃ under nitrogen protection for 3 h; then the pre-calcined product was placed in a muffle furnace at 600 ℃ The second calcination was carried out, and the temperature was kept for 3 h.

[0041] Scanning electron microscope photo and transmission electron microscope photo of the porous cerium oxide abrasive sample prepared in Example 3, the nitrogen adsorption and desorption curve is similar to that in Example 1, and its specific surface area is about 51.2 m 2 / g, the pore volume is about 0.34 cm 3 / g, significantly higher than the traditional cerium oxide solid particles (16.3 m 2 / g, ...

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Abstract

The invention relates to an inorganic abrasive with a porous structure, and particularly relates to a spherical cerium oxide porous abrasive and its use in ultra-precision polishing. The spherical cerium oxide porous abrasive is prepared as follows: first, using a LB (Luria-Bertani) culture medium to cultivate micrococcus, using ethanol and dilute hydrochloric acid for pretreatment of a micrococcus template; then using cerium nitrate, cerium sulfate or cerium chloride as a cerium source for preparation of a target product precursor solution, dipping the pretreated micrococcus template in the precursor solution, after ultrasound and / or mechanical stirring dispersion, standing; using a centrifugation method for separation of the dipping-treated micrococcus template, putting in an air dry oven for drying slowly, and then calcining to obtain the spherical cerium oxide porous abrasive. By control of the nutrient source, culture temperature, oxygen requirement amount, metabolic characteristics and other factors, the structure and size of the micrococcus template can be regulated to finally obtain spherical cerium oxide porous abrasives with different sizes and different inside pore structures.

Description

technical field [0001] The invention relates to an inorganic abrasive material with a porous structure, in particular to a spherical cerium oxide porous abrasive material and its application in ultra-precision polishing. Background technique [0002] Chemical Mechanical Planarization (CMP), as an ultra-precision processing technology combining chemical and mechanical effects, is widely used in the processing and manufacturing of computer hard disks, precision optical systems, sapphire substrates and VLSI; The polishing slurry is mainly composed of ultrafine abrasive grains and various chemical additives, among which the type and structure of the abrasive have an important impact on the quality of the processed surface. [0003] In recent years, new abrasives with special structures have attracted widespread attention, and inorganic abrasives with porous structures are one of the research hotspots; for example, Liang Yan et al. Ammonium bromide was used as a surfactant to pr...

Claims

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Application Information

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IPC IPC(8): C01F17/00C09K3/14C09G1/02B24B37/04
Inventor 陈扬陈爱莲钱均超
Owner 沧州恒兴铸业有限公司
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