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Spherical cerium oxide porous abrasive and its use in ultra-precision polishing

A cerium oxide, ultra-precise technology, applied to polishing compositions containing abrasives, inorganic chemistry, grinding devices, etc., can solve the complex synthesis process of porous abrasives, difficult to control the morphology and structure of the final product of porous abrasive particles, etc., Achieve the effect of regular shape, low cost and good dispersion

Active Publication Date: 2014-05-28
沧州恒兴铸业有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, for ultra-smooth surface processing, monodisperse spherical abrasives are the most ideal polishing media materials; in addition, the synthesis process of porous abrasives in the above literature is relatively complicated, especially for hydrothermal and sol-gel processes. Difficult to control the morphology and structure of the final product of porous abrasive particles

Method used

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  • Spherical cerium oxide porous abrasive and its use in ultra-precision polishing
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  • Spherical cerium oxide porous abrasive and its use in ultra-precision polishing

Examples

Experimental program
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Effect test

Embodiment 1

[0029] First place the micrococci in the culture medium (the formula is 200 mL of distilled water, 1 g of glucose, 0.5 g of sodium chloride, 1 g of fish meal peptone, 4 g of agar and 0.5 g of yeast extract), and then place the petri dish at a constant temperature. Bacteria were cultured in a humid chamber at a temperature of 24°C and a relative humidity of 40%. After 4 days of culture, coccus templates with a size of 100 nm to 200 nm can be obtained.

[0030]Weigh 1 g of the coccus template obtained by the above conditional culture and place it in a beaker, add 95 mL of distilled water and 5 mL of absolute ethanol in sequence, then add hydrochloric acid dropwise to adjust the pH value of the system to 3, and stir evenly with a magnetic stirrer. Then 2.52 g of cerium nitrate was added to adjust the concentration of cerium ions to 0.02 mol / L, fully stirred evenly under the condition of magnetic stirring, and then immersed for 66 h; Slowly dry in a blast drying oven at 40°C; fir...

Embodiment 2

[0035] The steps of this example are basically the same as those of Example 1 above, except that the concentration of cerium ions in the solution system is 0.01 mol / L, and the immersion time is 70 hours; after the full immersion, the coccus template is centrifuged and placed at 20 ° C under air blast Dry slowly in a drying oven, and then calcinate the impregnated and dried cocci template under nitrogen protection at 400 °C for 1 h; then place the pre-calcined product in a muffle furnace, Secondary calcination was carried out at 300 °C for 1 h.

[0036] Scanning electron micrographs and transmission electron micrographs of the porous cerium oxide abrasive sample prepared in Example 2, nitrogen adsorption and desorption curves are similar to those in Example 1, and its specific surface area is about 48.6 m 2 / g, the pore volume is about 0.31 cm 3 / g, which is significantly higher than that of traditional cerium oxide solid particles (16.3 m 2 / g, 0.08 cm 3 / g).

[0037] ...

Embodiment 3

[0040] The procedure of this example is basically the same as that of Example 1 above, except that the concentration of cerium ions in the solution is 0.5 mol / L, soaked for 48 hours, centrifuged to separate the coccus template after fully soaked, and placed in a blast drying oven at 50 °C Dry slowly, and then calcinate the impregnated and dried cocci template at 600 °C under nitrogen protection, and keep it warm for 3 h; then place the pre-calcined product in a muffle furnace, Carry out secondary calcination and keep warm for 3 h.

[0041] Scanning electron micrographs and transmission electron micrographs of the porous cerium oxide abrasive sample prepared in Example 3, nitrogen adsorption and desorption curves are similar to those in Example 1, and the specific surface area is about 51.2 m 2 / g, the pore volume is about 0.34 cm 3 / g, which is significantly higher than that of traditional cerium oxide solid particles (16.3 m 2 / g, 0.08 cm 3 / g).

[0042] The porous ce...

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Abstract

The invention relates to an inorganic abrasive with a porous structure, and particularly relates to a spherical cerium oxide porous abrasive and its use in ultra-precision polishing. The spherical cerium oxide porous abrasive is prepared as follows: first, using a LB (Luria-Bertani) culture medium to cultivate micrococcus, using ethanol and dilute hydrochloric acid for pretreatment of a micrococcus template; then using cerium nitrate, cerium sulfate or cerium chloride as a cerium source for preparation of a target product precursor solution, dipping the pretreated micrococcus template in the precursor solution, after ultrasound and / or mechanical stirring dispersion, standing; using a centrifugation method for separation of the dipping-treated micrococcus template, putting in an air dry oven for drying slowly, and then calcining to obtain the spherical cerium oxide porous abrasive. By control of the nutrient source, culture temperature, oxygen requirement amount, metabolic characteristics and other factors, the structure and size of the micrococcus template can be regulated to finally obtain spherical cerium oxide porous abrasives with different sizes and different inside pore structures.

Description

technical field [0001] The invention relates to an inorganic abrasive material with a porous structure, in particular to a spherical cerium oxide porous abrasive material and its application in ultra-precision polishing. Background technique [0002] Chemical Mechanical Planarization (CMP), as an ultra-precision processing technology combining chemical and mechanical effects, is widely used in the processing and manufacturing of computer hard disks, precision optical systems, sapphire substrates and VLSI; The polishing slurry is mainly composed of ultrafine abrasive grains and various chemical additives, among which the type and structure of the abrasive have an important impact on the quality of the processed surface. [0003] In recent years, new abrasives with special structures have attracted widespread attention, and inorganic abrasives with porous structures are one of the research hotspots; for example, Liang Yan et al. Ammonium bromide was used as a surfactant to pr...

Claims

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Application Information

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IPC IPC(8): C01F17/00C09K3/14C09G1/02B24B37/04
Inventor 陈扬陈爱莲钱均超
Owner 沧州恒兴铸业有限公司
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