A method for preparing porous silicon carbide by recycling waste silicon slurry from silicon wafer cutting
A technology for cutting porous silicon carbide and silicon wafers, applied in the direction of silicon carbide, carbide, etc., can solve the problems of complex process, long production cycle, and large amount of alkali reagent
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Embodiment 1
[0023] Weigh 50 kg of waste silicon slurry (containing 21 kg of silicon carbide, 4 kg of silicon, and 15 kg of polyethylene glycol) to obtain 27 kg of solid phase by pressure filtration at 0.5Mpa; mix 27 kg of solid phase with 14 kg of pH Mix 0.1 sulfuric acid aqueous solution, treat at 60°C for 8 hours, control the speed at 150r / min, and centrifuge for 50 minutes to obtain 26.7 kg of solid; put 26.7 kg of solid into the reaction tube, and feed nitrogen with a concentration of 2.5% tetrachloromethane mass percent , the nitrogen flow rate is 1 L / h per gram of solid, and react at 800°C for 8 hours to obtain 20.85 kg of porous silicon carbide.
[0024] The BET specific surface area of porous silicon carbide measured by nitrogen physical adsorption method is 38m 2 / g, the pore volume is 0.09m by X-ray fluorescence spectrometry analysis 2 / g.
Embodiment 2
[0026] Weigh 50 kilograms of waste silicon slurry (containing 21 kilograms of silicon carbide, 4 kilograms of silicon, and 15 kilograms of polyethylene glycol), control the speed at 500 r / min, and centrifuge for 20 minutes to obtain 27 kilograms of solid phase; mix 27 kilograms of solid phase with 30 Mix a kilogram of sulfuric acid aqueous solution with a pH of 0.3, treat it at 80°C for 2 hours, and separate it by pressure filtration under a pressure of 0.8Mpa to obtain 26.3 kilograms of solid; put 26.3 kilograms of solid into a reaction tube, and feed chloroform with a concentration of 2% by mass Nitrogen gas, the flow rate of nitrogen gas per gram of solid is 2 L / h, react at 1400°C for 5 hours, and obtain 20.94 kg of porous silicon carbide.
[0027] The BET surface area of porous silicon carbide measured by nitrogen physical adsorption method is 40m 2 / g, the pore volume analyzed by X-ray fluorescence spectrum is 0.11m 2 / g.
Embodiment 3
[0029] Weigh 50 kg of waste silicon slurry (containing 21 kg of silicon carbide, 4 kg of silicon, and 15 kg of polyethylene glycol) and filter under a pressure of 0.6Mpa to obtain 27 kg of solid phase; mix 27 kg of solid with 40 kg of pH 2 Nitric acid aqueous solution was mixed, treated at 70°C for 8 hours, and 26.5 kilograms of solids were separated by pressure filtration at a pressure of 1.5 MPa; 26.5 kilograms of solids were put into a reaction tube, and helium gas with a mass percentage concentration of 2.5% of dichloromethane was introduced, The helium flow rate was 3 L / h per gram of solid, and the reaction was carried out at 900°C for 8 hours to obtain 20.85 kg of porous silicon carbide.
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