Preparation method of dlc protective film on aluminum alloy surface
A technology of aluminum alloy surface and protective film, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of surface roughness of film size accuracy, brittle phase and cracks formed by laser cladding method, Rare earth salt treatment takes a long time to achieve low friction coefficient, increase deposition rate and ionization rate, and high hardness
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Embodiment 1
[0046] The detailed steps of preparing DLC protective film on 7075 aluminum alloy are as follows:
[0047] Step 1: Preliminary and treatment of 7075 aluminum alloy. The aluminum alloy substrate adopts a square of 20mm×20mm×10mm. Use 60#, 200#, 600#, 1000#, 1200#, 2000# sandpaper in turn to polish, and further use 0.5μm Al 2 o 3 Polishing with polishing paste, and further polishing with water. Further ultrasonically clean with acetone and alcohol for 15 minutes respectively, and dry it for later use.
[0048] Step 2: Put the processed aluminum alloy substrate in step 1 into the vacuum chamber with a special clamp, close the furnace door and start vacuuming, turn on the heating switch, and adjust the rotating speed of the turret to 1 rad / min. Use resistance wire to preheat the substrate to 50-150°C, and vacuum until 5.0×10 -3 Pa.
[0049] Step 3: Ar, H 2 cleaning. Turn on the argon gas switch to feed argon gas, the flow rate of argon gas is 100 sccm, and the argon gas ...
Embodiment 2
[0056] The parameters of step 5 in embodiment 1 can also adopt the following scheme: acetylene flow is 100sccm, preheating temperature 100 ℃, hollow cathode electron gun current 80A, bias pulse power supply-150V, duty cycle 80% / 50%, frequency 25Hz , The partial pressure of the vacuum chamber is 0.6-0.7Pa. Deposition time 40min.
Embodiment 3
[0058] The detailed steps of preparing DLC protective film on 7075 aluminum alloy are as follows:
[0059] Step 1: Preliminary and treatment of 7075 aluminum alloy. The aluminum alloy substrate adopts a square of 20mm×20mm×10mm. Use 60#, 200#, 600#, 1000#, 1200#, 2000# sandpaper in turn to polish, and further use 0.5μm Al 2 o 3 Polishing with polishing paste, and further polishing with water. Further ultrasonically clean with acetone and alcohol for 15 minutes respectively, and dry it for later use.
[0060] Step 2: Put the processed aluminum alloy substrate in step 1 into the vacuum chamber with a special clamp, close the furnace door and start vacuuming, turn on the heating switch, and adjust the rotating speed of the turret to 1 rad / min. Use resistance wire to preheat the substrate to 50-150°C, and vacuum until 5.0×10 -3 Pa.
[0061] Step 3: Ar, H 2 cleaning. Turn on the argon gas switch to feed argon gas, the flow rate of argon gas is 100 sccm, and the argon gas ...
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