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High hardness and high toughness zr-b-n nanocomposite coating and preparation method thereof

A nanocomposite coating, high toughness technology, applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problem of reducing the bonding force of amorphous/nanocrystalline layer, destroying the nanocomposite structure, reducing the High temperature performance and other issues, to achieve good impact load resistance, good repeatability, and improve the toughness of the coating

Active Publication Date: 2022-07-19
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] After research, it is found that the vacuum degree in the vacuum chamber is only 10 -8 Pa, the presence of oxygen impurities cannot be detected in the coating, and the residual oxygen impurities in the vacuum chamber are easy to react with B to form amorphous phase B 2 o 3 , resulting in the non-dense amorphous framework, reducing the bonding force of the amorphous / nanocrystalline layer, destroying the nanocomposite structure, and thus greatly reducing the coating performance
and the resulting B 2 o 3 It is very volatile in high temperature environment, which will seriously reduce the high temperature performance of the coating

Method used

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  • High hardness and high toughness zr-b-n nanocomposite coating and preparation method thereof
  • High hardness and high toughness zr-b-n nanocomposite coating and preparation method thereof
  • High hardness and high toughness zr-b-n nanocomposite coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0036]In this embodiment, a Zr-B-N coating is deposited on a mirror-polished single-crystal Si wafer ((100) crystal plane), and the size of the substrate is 50 mm×10 mm×0.7 mm. Before coating, the substrate was ultrasonically cleaned in alcohol solution for 20 minutes, then blown dry with high-purity nitrogen, and then placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on a V-TECH AS610 pulsed DC magnetron sputtering coating machine, which is also equipped with an arc ion plating cathode. The targets are metal Cr target and compound ZrB respectively. 2 Target (both purity 99.9wt.%), metal Cr target used for ion bombardment cleaning of substrate surface and deposition of CrN transition layer, compound ZrB 2 The target is used to deposit Zr-B-N coating; the working gas and reaction gas are high-purity Ar (purity 99.999%) and N respectively 2 +H 2 (Gas volume ratio N 2 :H 2 = 9:1).

[0037] First evacuate the background va...

Embodiment 2

[0040] In this example, a Zr-B-N coating is deposited on a mirror-polished YG8 cemented carbide substrate, and the size of the substrate is 30mm×30mm×3mm. The substrate is first ground and polished with metallographic sandpaper, then ultrasonically cleaned with acetone, degreaser, ultrapure water and alcohol solution in sequence, dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The deposition process and process parameters are the same as in Example 1.

[0041] Figure 4 The hardness test results of Zr-B-N coatings deposited on cemented carbide substrates. It can be seen that the test value of coating hardness fluctuates little, and varies in the range of 39-43GPa. The average value of 5 measurements is 41.9±1.2GPa, and the coating hardness is relatively high. The bonding strength of the coating and the substrate was tested by the scratch method. The radius of the diamond scratch tip was 200 μm, the normal load was gra...

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Abstract

The invention discloses a Zr-B-N nanocomposite coating with both high hardness and high toughness and a preparation method thereof, belonging to the technical field of nanocomposite coating preparation. The Zr‑B‑N nanocomposite coating includes amorphous BN phase and ZrB 2 crystal phase, where ZrB 2 The phase preferentially grows along the (001) crystal plane. Zr‑B‑N nanocomposite coatings were deposited on metal or alloy substrates using pulsed DC magnetron sputtering. In order to improve the bonding force between the coating and the substrate, Ar gas was introduced before the coating, and the surface of the substrate was cleaned by ion bombardment using an arc ion plating Cr target, and then N was introduced. 2 and H 2 mixed gas to deposit a CrN transition layer. Then turn off the power of the Cr target, put the ZrB 2 The target was connected to a pulsed DC magnetron sputtering cathode and was 2 and H 2 Zr‑B‑N coatings were deposited in a mixed atmosphere. The Zr-B-N nanocomposite coating of the invention has good preparation repeatability and is easy to industrialize production; the prepared Zr-B-N coating has high hardness and elastic modulus, good wear resistance, and The tissue structure is dense, and the bonding force between the coating and the substrate is strong.

Description

technical field [0001] The invention relates to the technical field of composite coatings and their preparation, in particular to a Zr-B-N nanocomposite coating with high hardness and high toughness and a preparation method thereof. Background technique [0002] With the rapid development of modern material manufacturing technology, various difficult-to-machine materials with high hardness and high toughness are increasing. Although the performance of engineering materials has been improved, it has also led to increased tool wear when machining materials. The development of tool coating technology has significantly improved the wear resistance and impact toughness of the tool, improved the cutting performance of the tool, and increased the processing efficiency and service life of the tool. ZrB 2 The coating is a close-packed hexagonal crystal structure with high thermal conductivity and good thermal shock resistance, while ZrB 2 The coating also has the advantages of high...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/32C23C14/02
CPCC23C14/3485C23C14/35C23C14/06C23C14/0057C23C14/0641C23C14/325C23C14/0021C23C14/022
Inventor 王铁钢许人仁张雅倩李壮刘艳梅曹凤婷
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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