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Carbazole multi beta oxime ester derivative compound and photopolymerization initiator and photoresist composition comprising same

A technology of compounds and derivatives, which is applied in the fields of carbazole poly-β-oxime ester derivative compounds and photopolymerization initiators and photoresist compositions containing the carbazole poly-β-oxime ester derivative compound, can solve the problem of low sensitivity, Outgassing pollution, by-products reduce yield, etc., to achieve good sensitivity, reduce pollution, and excellent properties

Pending Publication Date: 2021-08-06
SAMSANG CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, when a conventional photopolymerization initiator is used to form a pattern, it is necessary to increase the amount of the photopolymerization initiator or the exposure dose due to low sensitivity in the exposure process for pattern formation
The disadvantage is that the photomask is contaminated during the exposure process, and the by-products generated by the decomposition of the photopolymerization initiator during the crosslinking process at high temperature reduce the yield
Problems with reduced throughput due to increased exposure process time with exposure dose and contamination due to outgassing

Method used

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  • Carbazole multi beta oxime ester derivative compound and photopolymerization initiator and photoresist composition comprising same
  • Carbazole multi beta oxime ester derivative compound and photopolymerization initiator and photoresist composition comprising same
  • Carbazole multi beta oxime ester derivative compound and photopolymerization initiator and photoresist composition comprising same

Examples

Experimental program
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Effect test

example 1

[0147]

[0148] Step 1: Synthesis of 9-(4-methoxyphenyl)carbazole

[0149] Triglyme (40 mL) was placed in a reactor, and carbazole (30 g, 170.5 mmol), 4-iodoanisole (49.8 g, 204.3 mmol), powdered copper (11.34 g, 180mmol) and potassium carbonate (58.8g, 423.2mmol), then stirred at 200°C for 20 hours. After the reaction was completed, the mixture was cooled to room temperature, and stirred for 30 minutes with the addition of ethyl acetate (300 mL) for crystallization. The solid obtained by filtering the solution was stirred in acetone (300 mL) and dichloromethane (300 mL) respectively for 30 minutes, filtered and washed with water.

[0150] The obtained solid or impurities were removed to obtain a filtrate, and the organic solvent in the filtrate was distilled off under reduced pressure at 40°C. The resulting product was refrigerated for one day to precipitate the product. Subsequently, petroleum ether (about 200 mL) was added, filtration was performed, and the resulting ...

example 2

[0167]

[0168] Step 1: Synthesis of 9-(4-methylthiophenyl)carbazole

[0169] Triglyme (40ml) was placed under a nitrogen atmosphere, and carbazole (30g, 170.5mmol), 4-iodothioanisole (53.8g, 204.3mmol), powdered copper (11.34g, 180mmol ) and potassium carbonate (58.8g, 423.2mmol) were added to the reactor and refluxed at 90°C for 4 days. After the reaction was complete, the mixture was cooled to room temperature. Subsequently, the reaction solution was transferred to a beaker, and water (300 mL) and dichloromethane (300 mL) were placed in the beaker and stirred for 1 hour. The solution in the beaker was filtered through a 2 to 3 cm sized silica gel (40 to 400 mesh) filter to remove insoluble impurities. Subsequently, the filtrate was extracted 3 times with dichloromethane (300 mL), and the organic layer was dried with anhydrous magnesium sulfate, filtered, distilled under reduced pressure and recrystallized (dichloromethane:hexane=1:1) to obtain the target compound 9- (...

preparation example 1

[0194] Preparation Example 1: Preparation of Acrylic Polymer (a-1)

[0195] Put 200mL propylene glycol methyl ether acetate (propylene glycol methyl ether acetate, PGMEA) and 1.5g azobisisobutyronitrile (Azobisisobutyronitrile, AIBN) in a 500mL polymerization container, and methacrylate, glycidyl methacrylate Acrylic acid ester, methyl methacrylate and dicyclopentyl acrylate were added in a molar ratio of 20:20:40:20 at 40% solids by weight of acrylic acid monomer, and then polymerized while stirring at 70°C under a nitrogen atmosphere5 hours to prepare acrylic polymer (a-1). The prepared polymer (a-1) was found to have a weight average molecular weight of 25,000 and a degree of dispersion of 1.8.

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Abstract

The present invention relates to a carbazole multi beta oxime ester derivative compound represented by chemical formula 1 and a photopolymerization initiator and a photoresist composition, each comprising same. [Chemical formula 1] In chemical formula 1, A and R 1 to R 3 are each defined in the detailed description of the invention.

Description

technical field [0001] The present invention relates to a carbazole poly-β-oxime ester derivative compound and a photopolymerization initiator and a photoresist composition comprising the carbazole poly-β-oxime ester derivative compound, and more specifically, relates to an A heat-resistant, chemical-resistant and durable carbazole poly-β-oxime ester derivative compound, and a photopolymerization initiator and photoresist composition comprising the carbazole poly-β-oxime ester derivative compound. [0002] This application claims priority from Korean Patent Application No. 10-2018-0171703 filed in Korea on December 28, 2018, the disclosure of which is incorporated herein by reference. Background technique [0003] Many types are known as typical examples of photopolymerization initiators used in photoresist compositions, such as acetophenone derivatives, benzophenone derivatives, triazine derivatives, biimidazole derivatives, acyl Phosphine oxide derivatives and oxime ester...

Claims

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Application Information

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IPC IPC(8): C07D209/88G02B5/20G02F1/1335G03F7/028G03F7/105
CPCG02B5/20C07D209/88G03F7/028G03F7/105G02F1/1335
Inventor 李元重李得洛吴泉林辛承林全根安庆龙朴活基
Owner SAMSANG CORP