Method for removing hydrogen halide in polysilicon production tail gas
A technology of polysilicon and hydrogen halide, applied in chemical instruments and methods, separation methods, silicon, etc., can solve the problems of unfavorable industrial scale-up production, short service life of catalysts, expensive catalysts, etc., and achieve a wide range of metal selection and treatment process Environmental protection, the effect of reducing equipment corrosion pollution
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Embodiment 1
[0038] Purchase polyacrylonitrile microspheres with a molecular weight of 250,000 from the market, mix 3wt% of copper powder with a particle size of 30nm, and then put them into a stainless steel tube of Φ25*1200mm. At a reaction temperature of 80°C and a pressure of 0.5MPa, The hydrogen gas flow is introduced, and then the reaction tail gas discharged from the chemical vapor deposition reactor, including trichlorosilane, dichlorodihydrosilane, monochlorotrihydrosilane, silicon tetrachloride and hydrogen chloride, is passed into the steel pipe to control The flow rate of the incoming airflow and the molar ratio of the two airflows into the reactor are 15:1 to ensure that the residence time in the catalyst bed is 3s. A product sampler is installed at the outlet of the steel pipe, and samples are taken and analyzed from the outlet. The hydrogen chloride content is 3ppm. Those skilled in the art know that sometimes these parameters must be fine-tuned appropriately according to th...
Embodiment 2
[0040] Purchase polyacrylonitrile powder with a molecular weight of 250,000 from the market, first mix 8% by weight of 100nm zinc powder with it, and then put it into a Φ25*1200mm stainless steel tube, at a reaction temperature of 70°C and 0.6MPa, The hydrogen gas flow is introduced, and then the reaction tail gas discharged from the chemical vapor deposition reactor, including trichlorosilane, dichlorodihydrosilane, monochlorotrihydrosilane, silicon tetrachloride and hydrogen chloride, is passed into the steel pipe to control The flow rate of the incoming gas flow and the molar ratio of the two gas flows into the reactor are 10:1, to ensure that the residence time in the catalyst bed is 6s, and the hydrogen chloride content is sampled and analyzed at the outlet, which is 0.8ppm.
Embodiment 3
[0042] Purchase polyamide 46 powder from the market, first load 0.5% by weight of tin on the resin, and then put it into a Φ25*1200mm stainless steel tube, and pass it into a hydrogen gas stream at a reaction temperature of 150°C and 0.8MPa, and then put The reaction tail gas discharged from the chemical vapor deposition reactor, including mixed gases such as trichlorosilane, dichlorodihydrosilane, monochlorotrihydrosilane, silicon tetrachloride and hydrogen chloride, is passed into the steel pipe, and the flow rate of the incoming gas flow and the two The molar ratio of the gas flow into the reactor is 20:1, to ensure that its residence time in the catalyst bed is 10s, and the hydrogen chloride content is sampled and analyzed at the outlet, which is 0.7ppm.
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