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A long-term stable and durable hydrophobic coating and its preparation method and application

A hydrophobic coating and durable technology, applied in the field of hydrophobic coating and its preparation, can solve the problems of poor film-base bonding force and mechanical properties, insufficient stability, easy wear, etc., and achieve good adhesion and good film-base bonding. The effect of fast force and deposition rate

Active Publication Date: 2020-12-25
HANGZHOU DIANZI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the problems of poor binding force and mechanical properties of the existing hydrophobic coating film base, insufficient stability and easy wear, the present invention provides a long-term coating with strong film base binding force, high hardness, good thermal stability and wear resistance. Robust and durable hydrophobic coating

Method used

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  • A long-term stable and durable hydrophobic coating and its preparation method and application
  • A long-term stable and durable hydrophobic coating and its preparation method and application
  • A long-term stable and durable hydrophobic coating and its preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Embodiment 1 Utilizes the magnetron sputtering device system to deposit a cerium oxide hydrophobic coating on a 316 stainless steel substrate:

[0040] (1) Before being placed in the plasma deposition chamber, the 316 stainless steel substrate was ultrasonically cleaned with acetone, ethanol, and deionized water in order to remove pollutants on the substrate. Place the stainless steel substrate in the chamber of the plasma device and evacuate to 5.0×10 -4 Pa, turn on the DC power supply, set the bias voltage to –450V, and use argon plasma to activate and clean the substrate surface for 20 minutes;

[0041] (2) Carry out the deposition of metal cerium transition layer to strengthen the binding force between cerium oxide and 316 stainless steel substrate: feed the argon gas that mass flow percentage is 100%, under plasma atmosphere, argon ion bombards metal cerium target, The cerium atoms sputtered from the metal cerium target are deposited on the substrate to form a met...

Embodiment 2

[0044] Embodiment 2 Utilizes the magnetron sputtering device system to deposit a cerium oxide hydrophobic coating on a single crystal (100) silicon wafer substrate:

[0045] (1) Before putting into the plasma deposition chamber, the single crystal (100) silicon wafer substrate is ultrasonically cleaned with acetone, ethanol, and deionized water in order to remove pollutants on the single crystal (100) silicon wafer substrate . Place the single crystal (100) silicon wafer substrate in the chamber of the plasma device, and evacuate to 4.0×10 -4 Pa, turn on the DC power supply, set the bias voltage to –450V, and use argon plasma to activate and clean the substrate surface for 20 minutes;

[0046] (2) Deposition of cerium oxide coating: the mass flow percentage of 3% oxygen and the mass flow percentage of argon gas of 97% are introduced respectively. Under the plasma atmosphere, the argon ions bombard the metal cerium target, from the metal cerium target Cerium atoms sputtered o...

Embodiment 3

[0047] Embodiment 3 utilizes magnetron sputtering system to deposit cerium oxide hydrophobic coating on glass substrate:

[0048] (1) Before being put into the plasma deposition chamber, the glass substrate was ultrasonically cleaned with acetone, ethanol, and deionized water in order to remove pollutants on the glass silicon wafer substrate. Place the glass substrate in the chamber of the plasma device and evacuate to 6.0×10 -4 Pa, turn on the DC power supply, set the bias voltage to –450V, and use argon plasma to activate and clean the substrate surface for 20 minutes;

[0049] (2) Carry out the deposition of metal cerium transition layer: pass through the mass flow percentage and be 100% argon gas, under plasma atmosphere, argon ion bombards metal cerium target, the cerium atom sputtered out from metal cerium target deposits on A metal cerium transition layer is formed on the substrate; the deposition bias is set to –60V, the pressure during the deposition process is 0.21P...

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Abstract

The invention relates to the technical field of hydrophobic coatings, in particular to a long-term stable and durable hydrophobic coating and its preparation method and application. The long-term stable and durable hydrophobic coating includes a rare earth transition layer and a rare earth oxide coating, the rare earth transition layer is deposited between the substrate and the rare earth oxide coating, and the rare earth transition layer is made of rare earth metal The oxide coating corresponds to a rare earth metal, and the substrate is a metal substrate or a non-metal substrate. The hydrophobic coating of the present invention has good mechanical properties, thermodynamic properties and corrosion resistance, has long-term stability and durability, can be especially applied in harsh environments, and greatly promotes the application of hydrophobic rare earth oxide coatings in different fields.

Description

technical field [0001] The invention relates to the technical field of hydrophobic coatings, in particular to a long-term stable and durable hydrophobic coating and its preparation method and application. Background technique [0002] Due to the characteristics of self-cleaning, anti-icing, and corrosion resistance, hydrophobic surfaces have great application potential and can be widely used in production and life, which has aroused great interest. Traditional hydrophobic materials such as high molecular polymers and fluorides have poor strength, and their hydrophobicity is easily lost under harsh conditions, which greatly limits their application on hydrophobic surfaces. In 2013, K.K.Varanasi of the Massachusetts Institute of Technology reported the intrinsic hydrophobicity of rare earth oxide ceramics (Nature Materials12:315-320, 2013), which is due to the 4f sublayer of rare earth atoms being surrounded by the outer 5s 2 p 6 The electron shell is shielded, and the unfil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/14C23C14/02
CPCC23C14/0036C23C14/025C23C14/08C23C14/14C23C14/35C23C28/30
Inventor 石振张雪峰
Owner HANGZHOU DIANZI UNIV
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