Magnetic L-shaped micro-nano robot and preparation method and application thereof

Abstract

The invention relates to a magnetic L-shaped micro-nano robot and a preparation method and application thereof. The line width of the magnetic L-shaped micro-nano robot is 0.3-1 mu m; the size of themagnetic L-shaped micro-nano robot is micro-nano scale, the magnetic L-shaped micro-nano robot can be driven by a magnetic field to carry out targeted drug delivery, and the highest moving speed of the magnetic L-shaped micro-nano robot in water can reach 3-10 mu m / s; the preparation method of the magnetic L-shaped micro-nano robot adopts an electron beam exposure technology, preparation precisionof the magnetic L-shaped micro-nano robot can reach 20 nm or below, the preparation method is simple, mass production can be achieved, and the requirement for targeted drug delivery is met.

Description

technical field [0001] The invention belongs to the field of micro-robots, and relates to a magnetic L-shaped micro-nano robot, a preparation method and application thereof. Background technique [0002] Cancer is the second largest disease in terms of morbidity and mortality after cardiovascular disease, and is a major public health problem facing the world. With the improvement of my country's cancer registration and statistical system, my country's cancer epidemiology research has made great progress in recent years, and my country's relevant policies are also emphasizing the development or improvement of cancer treatment methods (see literature: Zhou Yanrong, from Data quality depends on information value: read "China Cancer Incidence and Mortality, 2012" [J]. Chinese Medical Frontiers, 2016, 8(7): 10-12.). Among the many improved and newly developed treatment methods, targeted therapy methods that can destroy tumor cells without affecting normal cell tissue have receive...

AI Technical Summary

Problems solved by technology

[0005] At present, a preparation method of a nanoscale helical robot disclosed in the prior art comprises the following steps: (1) covering a layer of silicon dioxide beads with a diameter of 200 to 300 nm on a silicon wafer with a diameter of 2 inches; pressure 10 -5 to 10 -6 Under the vacuum of torr, the spiral shape is grown on the silicon wafer by vapor deposition in the electron beam evaporator; (3) the incident temperature of the silicon dioxide vapor flux is 80°C to 90°C, and the spiral shape controlled by the computer The coating platform rotates the surface of the silicon wafer at a normal speed; (4) Put the sample into the ultrasonic machine, remove it ultrasonically and collect the nanorobot; (5) Evaporate metal cobalt with a thickness of about 30nm on the surface of the nanorobot by electron beam evaporation (6) Place the substrate with the cobalt-coated nanorobot between the pole pieces of the electromagnet, and magnetize the helical robot to obtain a magnetic micro-nanorobot (see literature: Ghosh A, FischerP.Controlled propulsion of artificial magnetic nanostructured propellers[J].Nano letters,2009,9(6):2243-2245.); the micro-nano robot obtained by the above scheme is uncontrollable, and the shape consistency is poor, and there are many other impurities after synthesis

[0006] Chemical synthesis, ultraviolet lithography technology and laser direct writing technology are currently commonly used methods for preparing micro-robots (see literature Luo M, Feng Y, Wang T, et al. Micro- / Nanorobots at Work in Active Drug Delivery[J].Advanced Functional Materials,2018,28(25):1706100.), wherein the size of the micro-nano robot prepared by chemical synthesis method can reach tens of nanometers, but in terms of preparation accuracy, the micro-nano robot obtained by chemical synthesis method is not possible. control, and the shape consistency is poor, and there are many other impurities after synthesis; while the preparation of micro-nano robots by ultraviolet lithography technology is limited in preparation accuracy, due to the diffraction factor of light, the size of the robot prepared by ultraviolet lithography technology The error is large, and only micron-level robots can be prepared; laser direct writing technology has great advantages in the preparation of three-dimensional structures, but because it uses the principle of photon polymerization, the preparation accuracy is still affected by light diffraction, and the accuracy is poor. And because in terms of productivity, it is greatly affected by the working performance of machinery and equipment (see literature: Peyer K E, Zhang L, Nelson B J. Bio-inspired magnetic swimming microrobots for biomedical applications [J]. Nanoscale, 2013, 5.)

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