Manufacturing process of high-performance nano-material ceramic thin-film device

A technology of nano-materials and ceramic films, applied in the field of nano-ceramic materials, can solve the problems of easy brittle cracking, poor film toughness, etc.

Active Publication Date: 2022-04-26
湖南湘瓷科艺有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For traditional metal and cermet films, their wear resistance is very good, but they have the following disadvantages: poor film toughness, brittle cracking, etc.

Method used

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  • Manufacturing process of high-performance nano-material ceramic thin-film device
  • Manufacturing process of high-performance nano-material ceramic thin-film device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Preparation of hydrogen-containing POSS:

[0036] A1. Mix 100mL isopropanol, 0.12mol phenyltrimethoxysilane, 2mg deionized water and 0.1mol flake sodium hydroxide, stir well, heat the reaction system to 73°C with an oil bath, and reflux under nitrogen atmosphere After reacting for 5 hours, then stirring and reacting at room temperature for 48 hours, the obtained mixed solution was subjected to rotary evaporation to remove isopropanol, and vacuum dried at 60°C for 18 hours to obtain octaphenyl polysilsesquioxane sodium salt;

[0037]A2. Add 0.1mol octaphenyl polysilsesquioxane sodium salt into a three-necked flask, under nitrogen protection, add 150mL anhydrous tetrahydrofuran, stir well, add 0.21mol triethylamine, react in ice bath at 0°C for 1h, use Slowly add 70 mL of tetrahydrofuran solution containing 0.25 mol of methyldichlorosilane into the constant pressure funnel dropwise at a rate of 2 drops / second, react for 6 hours, then raise the temperature to room temperat...

Embodiment 2

[0039] Functional additives are made by:

[0040] S1. Add 1 mol of carborane and 100 mL of anhydrous tetrahydrofuran into the three-necked flask, blow in nitrogen to drive away the air in the three-necked flask, and add 2.1 mol of n-butyllithium dropwise with a constant pressure dropping funnel at 0°C in a nitrogen atmosphere. Hexane solution, ensure that the temperature of the reaction system remains at 0±1°C during the dropping process, and the dropping rate is 1 drop / second. After the dropping is complete, slowly warm up to room temperature, continue to stir for 2 hours, and then add 80mL of 2.1mol benzyl Trimethylammonium hydroxide methanol solution, stirred at -0.07MPa, 40°C for 30min to remove residual water and methanol in the system, and then dropwise added 2.1mol 1,3-bis(3-amino Anhydrous tetrahydrofuran solution of propyl)-1,1,3,3-tetramethyldisiloxane, the dropping rate is 1 drop / second, after the drop is complete, slowly raise the temperature and reflux for 12 hour...

Embodiment 3

[0044] Functional additives are made by:

[0045] S1. Add 1 mol of carborane and 100 mL of anhydrous tetrahydrofuran into the three-necked flask, blow in nitrogen to drive away the air in the three-necked flask, and add 2.3 mol of n-butyllithium dropwise with a constant pressure dropping funnel at 0°C in a nitrogen atmosphere. Hexane solution, ensure that the temperature of the reaction system remains at 0±1°C during the dropping process, and the dropping rate is 1 drop / second. After the dropping is complete, slowly warm up to room temperature, continue to stir for 2 hours, and then add 2.3mol benzyl Trimethylammonium hydroxide methanol solution, stirred at -0.07MPa, 40°C for 30min, remove residual water and methanol in the system, then add 90mL solution containing 2.3mol 1,3-bis(3- Aminopropyl)-1,1,3,3-tetramethyldisiloxane in anhydrous tetrahydrofuran solution, the dropping rate is 2 drops / second, after the drop is complete, slowly heat up and reflux for 12 hours, after the ...

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Abstract

The invention relates to a manufacturing process of a high-performance nano-material ceramic thin film device, and belongs to the technical field of nano-ceramic materials. The manufacturing process comprises the following steps: step 1, treating an aluminum alloy base material; and 2, the surface of the treated aluminum alloy base material is coated with a ceramic coating, drying and curing are carried out, then sintering is carried out, and the high-performance nano-material ceramic thin film device is obtained. The ceramic coating is prepared by mixing 23-45 parts by weight of a silica sol emulsion and 85-100 parts by weight of a solution B; the solution B is prepared from the following raw materials: water, a binding agent, phenyltrimethoxysiloxane and a functional auxiliary agent; the silica sol emulsion comprises the following raw materials: water, an emulsifier, silica sol and an auxiliary material. The bonding strength of the ceramic coating and the base material is improved by introducing the binder and the auxiliary material, the brittle fracture of the ceramic coating during sintering is avoided by introducing the functional additive, and the oxidation resistance, high temperature resistance and wear resistance of the ceramic film obtained by sintering are enhanced.

Description

technical field [0001] The invention belongs to the technical field of nano-ceramic materials, and in particular relates to a manufacturing process of high-performance nano-material ceramic thin film devices. Background technique [0002] Ceramic film refers to a type of ceramic material that uses special technology to make ceramic materials with a thickness of less than a few microns and still maintain the superior performance of ceramics. Among them, ceramic films are often used in the surface treatment of various parts to prolong the service life of parts, such as fasteners in the mechanical field, aluminum parts in semiconductor equipment, etc. [0003] Ceramic film preparation methods mainly include chemical vapor deposition technology and physical vapor deposition technology. Chemical deposition technology is to fill the high vacuum chamber with reaction gas, and the gas absorbs and reacts on the surface of the substrate, and then forms a thin film material. The princ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/14C04B35/81C04B35/622C04B35/634C08G77/398
CPCC04B35/14C04B35/80C04B35/62222C04B35/63448C08G77/398C08G77/045C04B2235/3217C04B2235/349C04B2235/5276C04B2235/425C04B2235/3262C04B2235/3239
Inventor 肖亮陈金华
Owner 湖南湘瓷科艺有限公司
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