The invention provides a phosphonic acid ligand modified
cerium oxide polishing solution and a preparation method thereof. The
polishing solution is mainly prepared by mixing water and phosphonic acid ligand modified
cerium oxide according to a
mass ratio of (94: 5)-(92: 7). According to the
polishing solution, through modification of the
phosphoric acid ligand, the chemical and physical properties of the
cerium oxide abrasive are optimized, and the reactivity and the removal rate in the chemical mechanical polishing process can be improved, so that the polishing efficiency is effectively improved; a stable
surface modification layer is formed through interaction with the surfaces of
cerium oxide particles, so that the aggregation tendency among the particles is reduced, the
grinding material can be more uniformly dispersed in a solution, and the uniformity of suspension liquid is improved; hydrophilic groups are arranged on the surface, so that the
solubility of the particles in a solution is improved, and the
settling velocity of the particles is reduced, thereby prolonging the stabilization time of a suspension.