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Preparation process of CrB2-Cr coating with high Cr content

A preparation process and coating technology, which is applied in the field of preparation of CrB2-Cr coatings with high Cr content, can solve problems such as poor bonding force between coatings and substrates, limited ablation resistance, and decreased thermal shock performance, so as to improve the resistance Corrosion performance, crack tip energy consumption, and the effect of large elastic modulus

Active Publication Date: 2021-02-26
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But due to CrB 2 The coating is brittle, and as a tool coating, it is prone to cracking during cutting, which limits the CrB 2 The promotion and application of coatings on the surface of cutting tools urgently needs to further improve their toughness
Currently, CrB 2 The preparation methods of the coating mainly include CVD method, brushing method, plasma spraying method, etc. Among them, the CVD method has problems such as high deposition temperature and polluting the environment, and the problem of the plasma spraying method is that CrB 2 High melting point, not easy to form spreading, so it is necessary to add SiC auxiliary
The coating prepared by the brushing method has poor bonding force with the substrate, resulting in a decrease in thermal shock performance and high sintering temperature, so it is also necessary to introduce SiC as a sintering aid
Although the SiC-introduced coating can provide good anti-ablation protection for the base material in a certain temperature range, the anti-ablation performance of the coating at higher temperatures is limited.

Method used

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  • Preparation process of CrB2-Cr coating with high Cr content
  • Preparation process of CrB2-Cr coating with high Cr content
  • Preparation process of CrB2-Cr coating with high Cr content

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] This embodiment is to deposit CrB on a mirror-polished single crystal Si sheet ((100) orientation) 2 -Cr coating. A total of three targets, CrB 2 One target and two Cr targets (Cr target I and Cr target II). First fix the Si sheet on the rotating frame in the vacuum chamber, connect the Cr target Ⅰ to the high-power pulse magnetron sputtering power supply, connect the Cr target Ⅱ to the pulsed DC power supply, and connect the CrB target to the pulsed DC power supply. 2 The target is connected to a high-power pulsed magnetron sputtering power supply.

[0035] Before putting the substrate into the vacuum chamber, it was ultrasonically cleaned in acetone and alcohol solutions for 20 minutes respectively, then dried with high-purity nitrogen, and then fixed on the rotating rack in the vacuum chamber facing the target. The coating process is carried out on a V-TECH AS610 high-power pulse and pulse DC composite magnetron sputtering coating machine, and the cathode target i...

Embodiment 2

[0042] This embodiment is to deposit CrB on the mirror polished AISI 304 stainless steel substrate (Cr-18.5, Ni-9.4, Mn-0.8, Si-0.4, P-0.1, Fe remainder, all are weight percentages) 2 -Cr coating. The substrate was first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone and alcohol respectively, dried and fixed on the sample holder in the vacuum chamber facing the target. The coating deposition process and deposition parameters are the same as in Example 1.

[0043] Measurement of CrB deposited on stainless steel substrates by the continuum stiffness method using a nanoindenter 2 -Nanohardness of Cr coating, test results see Figure 5 , the coating hardness range is 15.9-19.9GPa, and the average value measured at 18 points is 17.6GPa, and the coating hardness is relatively high. The bonding strength between the coating and the substrate is tested by the scratch method. The tip radius of the diamond scratch head is 200μm, the normal lo...

Embodiment 3

[0045] The difference from Example 1 is that the sputtering power of the Cr target II is adjusted to 0kW, 0.05kW, 0.1kW, 0.15kW, and 0.2kW, and the other processes are the same as in Example 1.

[0046] The XRD diffraction pattern of prepared each coating is as follows Figure 7 Shown, Cr content is respectively 25.0at.%, 31.8at.%, 39.5at.%, 42.5at.% and 44.4at.% ( image 3 ). It can be seen that when the sputtering power of Cr target II > 0.05kW, that is, with the increase of Cr content in the coating, the CrB 2 Diffraction peaks gradually disappear, Cr 2 The B diffraction peak gradually strengthens, and the Cr in the coating 2 Phase B is dominant, accompanied by a small amount of amorphous phase.

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Abstract

The invention discloses a preparation process of a CrB2-Cr coating with high Cr content, and belongs to the technical field of coating preparation. The CrB2-Cr nano composite coating is prepared on ametal or hard alloy matrix by adopting a high-power pulse and pulse direct-current composite magnetron sputtering technology. In order to better control the content of Cr in the coating, a CrB2 targetand two metal Cr targets are selected and used as target materials at the same time, a metal Cr transition layer is deposited after glow discharge cleaning and ion bombardment cleaning are conductedon the surface of a base material, finally, the Cr targets and the CrB2 target are started at the same time, the CrB2-Cr coating is deposited, and the coating process is conducted in the argon atmosphere all the time. The process is simple and good in repeatability; and the Cr element content in the prepared CrB2-Cr coating is remarkably increased, the coating has high hardness, a high melting point and excellent high-temperature thermal stability and corrosion resistance, the toughness of the coating is also improved to a certain extent, and the coating is compact in structure and high in binding force with the matrix.

Description

technical field [0001] The invention relates to the technical field of coating preparation, in particular to a high-Cr content CrB 2 -Cr coating preparation process. Background technique [0002] With the rapid development of aerospace, national defense and military industries, the demand for difficult-to-cut materials / pieces is gradually increasing, such as titanium alloys, high-temperature alloys, and composite materials. When processing them efficiently, traditional tool coatings due to heat resistance The shortcomings such as poor hardness and low hardness have been difficult to meet the requirements of harsh working conditions. Chromium diboride (CrB 2 ) coating has high melting point, high hardness, high wear resistance and corrosion resistance, and good chemical inertness, which is expected to meet the special processing requirements of the above materials. But due to CrB 2 The coating is brittle, and as a tool coating, it is prone to cracking during cutting, whic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/02
CPCC23C14/0641C23C14/352C23C14/0036C23C14/024
Inventor 王铁钢张雅倩刘艳梅阎兵曹凤婷
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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