41results about How to "Elimination of Large Particle Defects" patented technology

The invention discloses a multi-stage magnetic field arc ion plating method for a lining positive bias straight pipe, and belongs to the technical field of material surface treatment. The problems that in a multi-stage magnetic field filtering device, pollution to the inner wall of a pipeline due to macroparticles needs to be removed, and losses are caused in the plasma transmitting process need to be solved. The method comprises the steps that firstly, a workpiece to be coated is arranged on a sample table in a vacuum chamber, and a related power source is powered on; and secondly, film deposition is conducted, when the vacuum degree in the vacuum chamber is smaller than 10-4Pa, work gas is guided in, the air pressure is adjusted, a coating power source is started, meanwhile, energy of plasmas is adjusted through a grid bias power supply, the macroparticle defect is further eliminated through a lining positive bias straight pipe device, the transmission efficiency of the arc plasmas is guaranteed through the lining positive bias straight pipe device, needed technology parameters are set, and film deposition is conducted.

The invention relates to a multistage magnetic field electric arc iron plating method adopting lining positive bias tapered pipe and straight pipe compositing and belongs to the technical field of material surface treatment. The problem of losses in the process of pollution cleaning of macroparticles and deposited irons to the inner wall of a pipe and transmitting of electric arc plasma in a filtering device of a multistage magnetic field is solved. The method comprises the following steps that firstly, a workpiece to be subjected to film plating is placed on a sample table in a vacuum chamber, relative power supplies are powered on, and an external water-cooling system is started; secondly, a thin film is deposited, specifically, when the vacuum degree in the vacuum chamber is smaller than 10<-4> Pa, working air is pumped in, air pressure is adjusted, and a film plating power supply is started; meanwhile, a bias power supply is utilized to attract electric arc plasma in an outlet, and energy is adjusted; by means of the self obstructing shield of a lining positive bias tapered pipe and straight pipe compositing device, the inhibiting effect of a positive bias electric field and the filtering effect of the multistage magnetic field, the macroparticile defect is effectively eliminated, and the transmitting efficiency of the electric arc plasma is guaranteed; and the needed process parameters are set to prepare the thin film.

The invention discloses a lining step tube and porous baffle composite type multi-level magnetic field arc ion plating method and belongs to the technical field of material surface treatment. The method aims at solving the problems that the inner wall of a tube is contaminated by macroparticles and deposited ions in a multi-level magnetic field filter device, and losses are caused in the arc plasma transmission process. The method comprises the steps of putting a workpiece to be subjected to film coating onto a sample table in a vacuum chamber, switching on a relevant power source, and starting an external water cooling system; and 2, conducting thin film deposition, wherein after the vacuum degree inside the vacuum chamber is lower than 10<-4> Pa, working gas is introduced, the air pressure is adjusted, a film coating power source is switched on, meanwhile, arc plasma at an outlet is sucked through a grid bias power source, energy adjustment is conducted, defects of the macroparticles are effectively eliminated and arc plasma transmission efficiency is guarantee through the blocking and shielding effect of the shape and structure combination of a lining positive bias step tube and porous baffle composite type device, the inhibition effect of a positive bias electric field and the filtration effect of multiple levels of magnetic fields, process parameters are set, and a thin film is prepared.

The invention discloses a multistage magnetic field ion plating and twin-target high-power pulse magnetron sputtering composite method and belongs to the technical field of material surface treatment. The problems that low-melting-point pure metal (such as aluminum) or multi-component alloy materials (such as aluminum and silicon) and non-metallic materials (such as graphite and semiconducting material silicon) have the micro-particle defect in a traditional arc ion plating method, a common magnetron sputtering technology is low in ionization rate and thin film deposition efficiency, the melting point is high, a target material difficult to ionize has using limitations, and high-power pulse magnetron sputtering discharge is unstable in ignition are solved. The multistage magnetic field ion plating and twin-target high-power pulse magnetron sputtering composite method comprises the steps that 1, a workpiece is placed on a sample stage inside a vacuum chamber and connected with related equipment; and 2, thin film deposition is conducted, specifically, vacuumizing is conducted till the pressure reaches 10-4 Pa, then, working gas is injected, a film plating power source is turned on, the energy of composite plasma is adjusted through a bias power source, the micro-particle defect is eliminated through a multistage magnetic field filtering device, the transmission efficiency of the arc plasma is ensured, and the arc plasma and twin targets are combined to produce high-ionization-rate multi-component plasma, and a thin film is prepared.

The invention discloses a composite filtered arc ion plating of a combination magnetic field, a lined tapered tube and a porous baffle, and belongs to the technical field of material surface treatment. The problems of contamination of thin films by large particles in a multistage magnetic field filter device, and the loss of arc plasma in the transmission process are solved. A device comprises a bias voltage power supply, an arc ion plating target source and power supply, a multistage magnetic field device and power supply, a lined bias voltage tapered tube and porous baffle combination deviceand bias voltage power supply, a movable coil device and power supply, a high power pulse magnetron sputtering target source and relevant power supply, a bias voltage power supply waveform oscilloscope, a vacuum chamber, and the like; and thin film deposition is conducted, specifically, the device is connected, a system is started, working gas is injected when the vacuum degree in a vacuum chamber is less than 10<-4>Pa, a plating power supply is turned on, the bias voltage power supply regulates energy of the arc plasma, the lined bias voltage taper tube and porous baffle combination device and the multistage magnetic field device eliminate large particle defects in the arc plasma and improve the transmission efficiency of the arc plasma in the filter device, the loss in the vacuum chamber is reduced, and technological parameters are set to prepare the thin films.

The invention discloses a combined magnetic field and lining bias voltage conical pipe composite vacuum deposition method, belongs to the technical field of material surface treatment, and aims at solving the problems about film pollution through large particles, the target material usage limit, magnetic filter arc plasma losses, unstable high-power pulse magnetron sputtering discharge and the like in arc ion plating. The device comprises a bias voltage power source, an arc ion plating target source and power source, a multi-level magnetic field device and power source, a lining bias voltage conical pipe device and bias voltage power source, a movable coil device and power source, a waveform matching device, a high-power pulse magnetron sputtering target source and power source and other devices. Film deposition is conducted, device connection is conducted, the system is started, and when the vacuum degree in a vacuum chamber is smaller than 10<-4>Pa, inflation of work gas is conducted, a coating power source is started, and the bias voltage power source adjusts plasma energy; and the multi-level magnetic field device and the movable coil device eliminate large particle defects andguiding composite plasma transmission, losses in the vacuum chamber are reduced, and preparing technology parameters are set.

The invention relates to a combined magnetic field, combined tube and perforated baffle composite vacuum film coating method, and belongs to the technical field of material surface treatment. The problems ofcontamination of thin films by large particles and using limiting of target materials in arc ion plating, loss of magnetically filtered arc plasmaand unstable high power pulsed magnetron sputtering discharging. A device of the method comprises an arc ion plating target source, a multistage magnetic field, a lining bias voltage tapered tube, straight tube and perforated baffle combination device, a twin target high power pulse magnetron sputtering target source, a movable coil device and relative power supply, a grid bias power supply, a waveform matching device and the like; thin film deposition comprises the steps that devices are connected, the system is started, when the vacuum degree of the vacuum cavity is smaller than 10-4 Pa, a working gas is introduced, a film plating powersupply is opened, energy of an arc plasma is adjusted by using the grid bias power supply, through the multistage magnetic field device and the movable coil device, the large particle defect in the arc plasma is eliminated, and the transportation of the composite plasma is guided, loss in the vacuum cavity is reduced, andtechnology parameters are set.

The invention relates to compound filtering arc ion plating by combined magnetic fields and a lining bias porous baffle plate and belongs to the technical field of material surface treatment. The compound filtering arc ion plating by combined magnetic fields and the lining bias porous baffle plate solves the problems of pollution of macroparticles to a film in a multi-stage magnetic field device and loss in a plasma transmission process. A device comprises a bias power supply, an arc ion plating target source and a power supply, the multi-stage magnetic field device and a power supply, a lining bias porous baffle plate device and a bias power supply, a movable coil device and a power supply, a sample table, a bias power supply kymographion and a vacuum chamber. A film is prepared by the following step: depositing a film: connecting the device; starting a system; introducing working gas when the vacuum degree in a vacuum chamber is smaller than 10<-4> Pa; starting a coating power supply; adjusting the energy of arc plasma by using the bias power supply; eliminating macroparticle contamination in the arc plasma by means of the lining bias porous baffle plate device and the multi-stage magnetic field device and improving the transmission efficiency of the macroparticles in a filter device; reducing loss in the vacuum chamber; setting process parameters; and preparing the film.

The invention discloses a combined magnetic field and lining conical pipe and ladder pipe composite vacuum coating method, and belongs to the technical field of material surface treatment. The problems that during arc ion plating, due to macroparticles, a thin film is polluted, target use is limited, magnetically filtered arc plasmas are damaged, and high-power pulse magnetic control discharge isnot stable are solved. A device comprises an arc ion plating target source, a multi-stage magnetic field device, a movable coil device, a twin target high-power pulse magnetron sputtering target source, a lining bias conical pipe and ladder pipe combined device and related power source, a grid bias power supply, a waveform matching device and the like. The method comprises the steps of thin film deposition, device connecting and system starting. When the vacuum degree in a vacuum chamber is smaller than 10<-4> Pa, work gas is led in, a coating power source is started, energy of plasmas can beadjusted through the grid bias power supply, the multi-stage magnetic field device and the movable coil device remove macroparticle defects and guide transmission of composite plasmas, losses in the vacuum chamber are reduced, and process parameters are set.

The invention discloses a composite type filtered arc ion plating with a composite magnetic field and a lined bias voltage stepped tube, and belongs to the technical field of material surface treatment. The problems of contamination of thin films by large particles and loss in the process of plasma transmission in a multistage magnetic field filter device are solved. A device comprises bias voltage power supply, an arc ion plating target source and power supply, a multistage magnetic field device and power supply, a lined bias voltage stepped tube device and bias voltage power supply, a movable coil device and power supply, a sample table, a bias voltage power supply waveform oscilloscope, and a vacuum chamber; and thin film deposition is conducted, specifically, the device is connected, asystem is started, working gas is injected when the vacuum degree in a vacuum chamber is less than 10<-4> Pa, a plating power supply is turned on, energy of arc plasma is regulated by using the biasvoltage power supply, large particle defects in the arc plasma are eliminated and the transmission efficiency in the filter device is improved through the lined bias voltage stepped tube device and the multistage magnetic field device, the loss in the vacuum chamber is reduced, technological parameters are set, and thin film preparation is conducted.

The invention provides a multi-grade magnetic field electric arc ion plating method of a lining positive-biased tapered pipe and belongs to the technical field of material surface treatment, aiming at solving the problems of cleaning of pollution on a pipe inner wall caused by large particles and deposited ions in a multi-grade magnetic field filtering device and loss in an electric arc plasma transmission process. The method provided by the invention comprises the following steps: 1, putting a workpiece to be subjected to film plating into a sample platform in a vacuum chamber, and switching on a related power supply; starting an external water cooling system; 2, depositing a thin film: when the vacuum degree in the vacuum chamber is less than 10<-4>Pa, introducing working gas and adjusting gas pressure; starting up a film plating power supply; meanwhile, attracting electric arc plasmas at an outlet by utilizing a biased power supply and carrying out energy adjustment; effectively eliminating large-particle defects and guaranteeing the transmission efficiency of the electric arc plasmas through self stopping and shielding, and positive-biased electric field effects of the lining positive-biased tapered pipe, and multi-grade magnetic field filtering effect; setting needed technological parameters and preparing the thin film.

The invention discloses a vacuum film plating method with a combined magnetic field, a lined straight pipe and a multihole baffle combined, and belongs to the technical field of material surface treatment. The vacuum film plating method with the combined magnetic field, the lined straight pipe and the multihole baffle combined aims to solve the problems such as the pollution of macroparticles to athin film, the use limitation of a target material, the loss of magnetically-filtered arc plasma and the instability of high-power pulsed magnetron sputtering discharge in arc ion plating. Devices relating to the vacuum film plating method comprise a bias voltage power source, an arc ion plating target source, a power source of the arc ion plating target source, a multistage magnetic field device, a power source of the multistage magnetic field device, a movable coil device, a power source of the movable coil device, a waveform matching device, a high-power pulsed magnetron sputtering targetsource, a power source of the high-power pulsed magnetron sputtering target source, a combined device of the lined bias voltage straight pipe and the multihole baffle, a power source of the combined device of the lined bias voltage straight pipe and the multihole baffle and the like. Thin film deposition comprises the steps that the devices are connected; a system is started; when the vacuum degree in a vacuum chamber is less than 10<-4> Pa, a working gas is introduced into the vacuum chamber, a film plating power source is started, the bias voltage power source adjusts the energy of the plasma, the multistage magnetic field device and the movable coil device eliminate defects of the macroparticles and guide the transmission of the composite plasma, the loss in the vacuum chamber is reduced, and technical parameters are set.

The invention discloses a vacuum coating method for compounding a combined magnetic field and a lining bias-voltage straight tube, belongs to the technical field of material surface treatment, and solves the problems of the pollution of the film, the target use restriction, the loss of the magnetic filtered arc plasma and the instability of high-power pulse magnetic-controlled sputtering discharging due to the macroparticles in the arc ion plating. The vacuum coating device comprises a bias-voltage power supply, an arc ion plating target source, an arc ion plating power supply, a multi-stage magnetic field device, a multi-stage magnetic field device power supply, a lining bias-voltage straight tube device, a lining bias-voltage power supply, an movable coil device, an movable coil device power supply, a waveform matching device, a twin-target high-power pulse magnetic-controlled sputtering target source, a twin-target high-power pulse magnetic-controlled sputtering power supply and thelike. The vacuum coating method comprises the steps that the film is deposited, the device is connected, the system is started, when the vacuum degree in the vacuum chamber is less than 10 <-4>Pa, the working gas is fed, the coating power supply is started, the bias-voltage power supply adjusts the energy of the plasma, the multi-stage magnetic field device and the movable coil device eliminate the macroparticles defects and guide the transmission of the compound plasma, the loss in the vacuum chamber is reduced, and the preparation process parameters are set.

The invention provides a multi-stage magnetic field electric-arc ion plating method for a lining positive-bias step-shaped pipe and belongs to the technical field of material surface treatment. According to the multi-stage magnetic field electric-arc ion plating method, cleaning of the inner wall, polluted by large particles and deposited ions in a multi-stage magnetic field filtering device, of the pipe is achieved, and the loss in the transferring process of electric-arc plasma is avoided. The multi-stage magnetic field electric-arc ion plating method comprises the following steps that (1) a to-be-film-plated workpiece is placed on a sample table in a vacuum room, a relevant power source is switched on, and an external water-cooling system is started; and (2) thin film deposition is conducted, specifically, when the vacuum degree in the vacuum room is smaller than 10 <-4> Pa, working gas is pumped in, the gas pressure is adjusted, a film plating power source is started; meanwhile, a bias power source is used for attracting the electric-arc plasma at an outlet and conducting energy adjustment; through stop shielding of the lining positive-bias step-shaped pipe, the inhibiting effect of a positive-bias electric field and the filtering effect of a multi-stage magnetic field, large particle defects are effectively eliminated, and transferring efficiency of the electric-arc plasma is guaranteed; and needed technological parameters are set for thin film preparation.

The invention relates to composite magnetic field and lining bias voltage tapered tube composite type filtered arc ion plating, and belongs to the technical field of material surface treatment. According to composite magnetic field and lining bias voltage tapered tube composite type filtered arc ion plating, the problems ofcontamination of thin films by large particles in a multistage magnetic field filtering device, and loss in the process of plasma transferring are solved. According to composite magnetic field and lining bias voltage tapered tube composite type filtered arc ion plating, a device comprises a grid bias power supply, an arc ion plating target source and power supply, a multistage magnetic field device and power supply, a lining bias voltage tapered tube device and grid biaspower supply, a movable coil device and power supply, a sample table, a grid bias power supply kymographion and a vacuum cavity; thin film deposition comprises the steps that devices are connected, the system is started, when the vacuum degree of the vacuum cavity is smaller than 10-4 Pa, a working gas is introduced, a film plating power supply is opened, energy of an arc plasma is adjusted by using the grid bias power supply, through the lining bias voltage tapered tube device and the multistage magnetic field device, the large particle defect in the arc plasma is eliminated, and the transportation efficiency of the filtering device is improved, loss in the vacuum cavity is reduced, technology parameters are set, and film preparation is conducted.

The invention provides arc ion plating for composite filtering of a combined magnetic field and a lined bias conical pipe and a stepped pipe, and belongs to the technical field of material surface treatment. The arc ion plating aims at solving the problems of contamination of large particles in a multi-stage magnetic field filtering device to thin films and losses generated in the plasma transmitting process. The arc ion plating involves a bias power supply, an arc ion plating target source, an arc ion plating target source power supply, a multi-stage magnetic field device, a multi-stage magnetic field device power supply, a lined bias conical pipe and stepped pipe combination device, a lined bias conical pipe and stepped pipe combination device power supply, a movable coil device, a movable coil device power supply, a bias power supply kymographion and the like. Thin film deposition is carried out, wherein the device is connected, a system is started, when the vacuum degree in a vacuum chamber is smaller than 10-4 Pa, working gas is introduced, a plating power supply is started, the energy of arc plasma is adjusted through the bias power supply, by means of the lined bias conicalpipe and stepped pipe combination device and the multi-stage magnetic field device, large particle defects in the arc plasma are eliminated, the transmission efficiency of the filtering device is improved, losses in the vacuum chamber are reduced, process parameters are set, and thin films are prepared.

The invention discloses a vacuum coating method for compounding a combined magnetic field and a lining bias-voltage tapered tube, belongs to the technical field of material surface treatment, and solves the problems of the pollution of the film, the target use restriction, the loss of the magnetic filtered arc plasma and the instability of high-power pulse magnetic-controlled sputtering discharging due to macroparticles in the arc ion plating. The vacuum coating device comprises a bias-voltage power supply, an arc ion plating target source, an arc ion plating power supply, a multi-stage magnetic field device, a multi-stage magnetic field device power supply, a lining bias-voltage tapered tube device, a lining bias-voltage power supply, an movable coil device, an movable coil device power supply, a waveform matching device, a twin-target high-power pulse magnetic-controlled sputtering target source, a twin-target high-power pulse magnetic-controlled sputtering power supply and the like.The vacuum coating method comprises the steps that the film is deposited, the device is connected, the system is started, when the vacuum degree in the vacuum chamber is less than 10 <-4>Pa, the working gas is fed, the coating power supply is started, the bias-voltage power supply adjusts the energy of the plasma, the multi-stage magnetic field device and the movable coil device eliminate the macroparticles defects and guide the transmission of the compound plasma, the loss in the vacuum chamber is reduced, and the preparation process parameters are set.

The invention discloses a lining positive bias porous baffle multi-level magnetic field arc ion plating method, belongs to the technical field of material surface treatment and aims at achieving the aim about removal of macroparticles and deposition ions polluting the pipe inner wall in a multi-level magnetic field filtering device and solving the problem about losses of arc plasmas in the transmitting process. The method comprises the steps that firstly, a workpiece to be coated is placed on a sample table in a vacuum chamber, a related power source is turned on, and an outer water cooling system is started; secondly, film deposition is conducted, when the vacuum degree in the vacuum chamber is smaller than 10<-4>Pa, inflation of working gas is conducted, the air pressure is adjusted, a coating power source is started, and meanwhile a bias power source is utilized for attracting arc plasmas at the position of an outlet and conducting energy adjustment; and through stopping and shielding of a lining positive bias porous baffle device, the inhibiting effect of a positive bias electric field and the filtering effect of a multi-level magnetic field, the macroparticle defect is effectively overcome, the transmission efficiency of the arc plasmas is guaranteed, needed technology parameters are set, and film preparing is conducted.

The invention provides a combined magnetic field and lining porous baffle combined vacuum deposition method and belongs to the technical field of material surface treatment. The combined magnetic field and lining porous baffle combined vacuum deposition method is provided for solving the problems of pollution of big particles to films, using restriction to target materials, losses of magnetic filtered electric arc plasmas, unstable discharge of high-power pulse magnetron sputtering and the like during arc ion plating. A device adopted in the method comprises a bias power supply, an arc ion plating target source, an arc ion plating power supply, a multi-stage magnetic field device, a multi-stage magnetic field device power supply, a lining bias voltage porous baffle device, a lining bias power supply, a movable coil device, a movable coil device power supply, a waveform matching device, a high-power pulse magnetron sputtering target source, a high-power pulse magnetron sputtering powersupply and the like. The method comprises the steps of depositing a film, connecting the device, starting the system, introducing working gas when the internal vacuum degree of a vacuum chamber is less than 10<-4> Pa, starting a film plating power supply, conducting adjustment on energy of plasmas through the bias power supply, eliminating big particle defects and guiding transmission of the plasmas through the multi-stage magnetic field device and the movable coil device, reducing loss in the vacuum chamber, and setting parameters of the preparation process.

The invention provides a combined magnetic field arc ion plating and twin-target high-power pulse magnetron sputtering method, and belongs to the technical field of material surface treatment. The method aims at solving the problems of contamination of large particles in arc ion plating to thin films, the use limitations of target materials, losses of magnetic filtering on arc plasma, the instability of high-power pulse magnetron sputtering and the like. A device comprises a bias power source, an arc ion plating target source, an arc ion plating target source power source, a multi-stage magnetic field device, a multi-stage magnetic field device power source, a movable coil device, a movable coil device power source, a waveform matching device, a twin-target high-power pulse magnetron sputtering target source, a twin-target high-power pulse magnetron sputtering target source power source, an oscilloscope and a vacuum chamber. The thin films are deposited, wherein the device is connected, a system is started, when the vacuum degree in the vacuum chamber is smaller than 10-4 Pa, working gas is introduced, a plating power source is switched on, the bias power source is used for adjusting energy of arc plasma, large particle defects are eliminated and transmitting of the composite plasma is guided through the multi-stage magnetic field device and the movable coil device, losses in the vacuum chamber are reduced, and preparation process parameters are set.

The invention discloses a combined magnetic field and lining bias voltage straight pipe composite vacuum deposition method, belongs to the technical field of material surface treatment, and aims at solving the problems about film pollution through large particles, the target material usage limit, magnetic filter arc plasma losses, unstable high-power pulse magnetron sputtering discharge and the like in arc ion plating. The device comprises a bias voltage power source, an arc ion plating target source and power source, a multi-level magnetic field device and power source, a lining bias voltagestraight pipe device and power source, a movable coil device and power source, a waveform matching device, a high-power pulse magnetron sputtering target source and power source and other devices. Film deposition is conducted, device connection is conducted, the system is started, and when the vacuum degree in a vacuum chamber is smaller than 10<-4>Pa, inflation of work gas is conducted, a coatingpower source is started, and the bias voltage power source adjusts plasma energy; and the multi-level magnetic field device and the movable coil device eliminate large particle defects and guiding composite plasma transmission, losses in the vacuum chamber are reduced, and preparing technology parameters are set.

The invention discloses multi-level magnetic field and lining bias voltage conical pipe and stepped pipe composite filtering arc ion plating, belongs to the technical field of material surface treatment, and aims at solving the problems about film pollution through large particles in a multi-level magnetic field filter device and losses in the plasma transmission process. The device comprises a bias voltage power source, an arc ion plating target source and power source, a multi-level magnetic field device and power source, a lining bias voltage conical pipe and stepped pipe combination device, bias voltage power source and power source, a bias voltage power source waveform oscilloscope and the like. Film deposition is conducted, device connection is conducted, the system is started, and when the vacuum degree in a vacuum chamber is smaller than 10<-4>Pa, inflation of work gas is conducted, a coating power source is started, and the bias voltage power source is utilized for adjusting arc plasma energy; and the lining bias voltage conical pipe and stepped pipe combination device and the multi-level magnetic field device are used for eliminating large particle defects in arc plasmasand improving the transmission efficiency of the filter device, losses in the vacuum chamber are reduced, and technology parameters are set for film preparing.

The invention discloses arc ion plating adopting composite filtering of a combined magnetic field, a lined straight pipe and a multihole baffle, and belongs to the technical field of material surfacetreatment. The problems of pollution of macroparticles to thin films and losses in the plasma transmission process in a multi-stage magnetic field filter device are solved. Devices relating to the arcion plating adopting the composite filtering of the combined magnetic field, the lined straight pipe and the multihole baffle comprise a bias voltage power source, an arc ion plating target source, apower source of the arc ion plating target source, a multi-stage magnetic field device, a power source of the multi-stage magnetic field device, a lined bias voltage straight pipe and multihole baffle combined device, a bias voltage power source of the lined bias voltage straight pipe and multihole baffle combined device, a movable coil device, a power source of the movable coil device, a bias voltage power source waveform oscilloscope and a vacuum chamber. The thin film deposition comprises the steps that the devices are connected, and a system is started; and when a vacuum degree in the vacuum chamber is less than 10<-4> Pa, a working gas is introduced, and a film plating power source is turned on. The bias voltage power source adjusts the energy of arc plasmas, the lined bias voltage straight pipe, the multihole baffle composite device and the multi-stage magnetic field device eliminate macroparticle defects in the arc plasmas, and the transmission efficiency in the filter device is improved; and the losses in the vacuum chamber are reduced, technological parameters are set, and the preparation of the thin films is carried out.

The invention discloses a vacuum film plating method with a combined magnetic field, a lined bias voltage cone-shaped tube and a straight tube combined, and belongs to the technical field of materialsurface treatment. The vacuum film plating method with the combined magnetic field, the lined bias voltage cone-shaped tube and the straight tube combined aims to solve the problems such as the pollution of macroparticles to a thin film, the use limitation of a target material, the loss of magnetically-filtered arc plasma and the instability of high-power pulsed magnetron sputtering discharge in arc ion plating. Devices relating to the vacuum film plating method comprise an arc ion plating target source, a multistage magnetic field device, a combined device of the lined bias voltage cone-shaped tube and the straight tube, a twin target high-power pulsed magnetron sputtering target source, a movable coil device, related power sources, a waveform matching device, a bias voltage power source,a sample table and a vacuum chamber. Thin film deposition comprises the steps that the devices are connected; a system is started; when the vacuum degree in the vacuum chamber is less than 10<-4> Pa,a working gas is introduced into the vacuum chamber, a film plating power source is started, the bias voltage power source adjusts the energy of the plasma, the multistage magnetic field device and the movable coil device eliminate defects of the macroparticles and guide the transmission of the composite plasma, the loss in the vacuum chamber is reduced, and technical parameters are set.