Microbolometer and preparation method thereof
A technology of microbolometer and microbridge, which is applied in the field of microbolometer and its preparation, can solve the problems of complex composition, poor stability of film chemical structure, and low sensitivity of pyroelectric detectors
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0061] Below in conjunction with accompanying drawing and embodiment the present invention will be further described:
[0062] I. Preparation method of one-dimensional carbon nanotube and two-dimensional amorphous silicon film composite material
[0063] The guiding ideology of the present invention is in the carbon nanotube-amorphous silicon composite film structure, utilizes carbon nanotube and amorphous silicon respectively excellent electrical and optical property, prepares the composite thin film (as shown in Fig. figure 1 shown), used as infrared light absorption and thermistor materials for microbolometers (such as Figure 5 and 6 shown) to improve device performance. Preparation of carbon nanotube-amorphous silicon composite film embodiment of the present invention is as follows: 1. select silicon wafer as the substrate 1 of thin film growth, first use Piranha solution treatment and deionized water cleaning, then use dilute hydrofluoric acid solution After soaking a...
PUM
Property | Measurement | Unit |
---|---|---|
diameter | aaaaa | aaaaa |
length | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com