The invention, which relates to the technical field of the
semiconductor manufacturing equipment, provides a stepping motion apparatus for inhibiting the counter-acting force of an
external interface, comprising a load, a Y-direction execution mechanism, an X-direction execution mechanism, a Y-direction counter-acting
force balance mechanism, an X-direction counter-acting
force balance mechanism, a support frame and a marble platform. The load is arranged on the Y-direction executing mechanism, the Y-direction executing mechanism is arranged on the X-direction executing mechanism, the X-direction executing mechanism is arranged on the supporting frame, the supporting frame is arranged on the marble platform, and the Y-direction counter-acting force balancing mechanism and the X-direction counter-acting force balancing mechanism are both arranged on the supporting frame. Compared with the prior art, the stepping type motion device for restraining the counter-acting force of the
external interface can restrain the counter-acting force generated by the stepping type motion device on the mechanical installation interface of the foundation frame in the working process, and the motion and
measurement precision of the stepping type motion device is guaranteed.