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155 results about "Impact zone" patented technology

Modulated metal removal using localized wet etching

An apparatus for wet etching metal from a semiconductor wafer comprises a wafer holder for rotating a wafer and a plurality of nozzles for applying separate flow patterns of etching liquid to the surface of the wafer. The flow patterns impact the wafer in distinct band-like impact zones. The flow pattern of etching liquid from at least one nozzle is modulated during a total etching time control the cumulative etching rate in one local etch region relative to the cumulative etching rate in one or more other local etch regions. Some embodiments include a lower etch chamber and an upper rinse chamber separated by a horizontal splash shield. Some embodiments include a retractable vertical splash shield used to prevent splashing of etching liquid onto the inside walls of a treatment container. An etch-liquid delivery system includes a plurality of nozzle flow paths having corresponding nozzle flow resistances, and a plurality of drain flow paths having corresponding drain flow resistances. Nozzle flow resistances and drain flow resistances are matched so that switching the flow from a nozzle to a corresponding drain flow path does not change the flow rate of etching liquid through other nozzles. A non-wafer-contacting measuring device measures a metal thickness on a rotating semiconductor wafer during metal wet etching by immersing a plurality of electrodes in etching liquid in close proximity to the wafer surface of the rotating wafer and determining electrical resistance between a plurality of electrodes.
Owner:NOVELLUS SYSTEMS

Reworked material working lining of continuous casting tundish and preparation method for reworked material working lining

ActiveCN105436492ASolve the problem of bulging cracks and even material collapseEasy to useMelt-holding vesselsBrickRefractory
The invention relates to a reworked material working lining of a continuous casting tundish and a preparation method for the reworked material working lining. The reworked material working lining is divided into an impact zone working lining and a non-impact zone working lining, which are internally attached to a permanent lining; the non-impact zone working lining sequentially comprises a ladle edge working lining, a ladle wall working lining and a ladle bottom working lining from top to bottom; the impact zone working lining is built by adopting waste magnesia-carbon bricks and regenerated coating material mud through a wet process; the ladle wall working lining and the ladle bottom working lining are built by adopting a regenerated dry material; an overflow port working lining and the lade edge working lining are built by adopting the regenerated coating material; a space between the two sides of a turbulent flow controller and the ladle wall permanent lining is filled by waste; and a regenerated coating material layer coats the outer surfaces of the waste magnesia-carbon bricks, the outer surface of the waste and the upper surface of the turbulent flow controller. By applying the reworked material working lining, the service life of a shaped blank continuous casting tundish reaches 33-38 hours, and refractory material cost of the regenerated material working lining is reduced by more than 60% year on year.
Owner:SHANDONG IRON & STEEL CO LTD
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