The present invention provides a probe manufacturing method in which, after a
metal material for a probe is deposited on a base table, the probe can be detached from the base table relatively easily without giving damage on the probe. A recess corresponding to a flat
surface shape of a probe is formed by a
resist mask on a sacrificial layer on a base table. By depositing a probe material in the recess, a probe made of the probe material is formed over the base table via the sacrificial layer. Thereafter, the
resist mask is removed, and further the sacrificial layer is removed by an
etching process with a part of the sacrificial layer remaining. For the purpose of forming an opening for control of the remaining part of the sacrificial layer in the
etching process in the probe so as to let the opening pass through the probe in its plate thickness direction, a hole-forming portion for the opening is formed in the
resist mask.
Etching of the sacrificial layer in the
etching process is promoted from an edge of the opening formed in the probe by this hole-forming portion.