1 results about "Metal sound" patented technology

The application belongs to the technical field of piezoelectric thin film hetero-integration, and particularly relates to a PMN-PT piezoelectric single crystal thin film heterostructure with a metal acoustic wave reflection layer, a preparation method and application thereof. The PMN-PT piezoelectric single crystal thin film heterostructure comprises a silicon substrate, a silicon dioxide insulating layer, a high acoustic impedance metal intermediate layer and a lead magnesium niobate piezoelectric single crystal thin film layer. The lead magnesium niobate piezoelectric single crystal thin film layer is a lead in niobate-lead magnesium niobate-lead titanate single crystal thin film or a lead magnesium niobate-lead titanate single crystal thin film. Compared with the prior art, the PMN-PT piezoelectric single crystal thin film heterostructure can highly localize acoustic wave energy in the piezoelectric single crystal thin film, significantly suppress acoustic wave energy leakage to the substrate, and solve the acoustic leakage, vertical electric field loss and thermal stress mismatch bottleneck of the conventional piezoelectric hetero-integration technology.