A center beam which is formed out of a thin film constituted to be combined with a
light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate
electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate
electrode opposed to the center beam modulating the incident light on the
light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving
voltage to the substrate
electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided. As a result, the structure of modulating light by changing the reflection direction of the incident light is simple, response is fast, the
wavelength of the incident light to be used is not limited, operation is stable, reliability is high, the number of manufacturing steps is small and cost reduction can be achieved.