A chemical polishing method for germanium flat mirrors using electric field effect to enhance the pH of the processing area

A processing area and chemical polishing technology, applied in metal processing equipment, grinding/polishing equipment, manufacturing tools, etc., can solve problems such as difficult to achieve non-destructive surface processing, achieve enhanced acidity value, enhanced corrosion, and improved polishing efficiency Effect

Active Publication Date: 2020-05-29
嘉兴知酷客信息科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above methods all belong to free abrasive processing. After applying an electric field to the polishing area, the movement direction of the abrasive grains is controlled, so that the charged particles gather on the surface of the workpiece. The material removal is mainly achieved by particle collision and cutting. Continuous collision and micro-cutting Micro-fatigue spalling and fine plowing occur locally on the ceramic surface, making it difficult to meet the requirements of non-destructive surface processing

Method used

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  • A chemical polishing method for germanium flat mirrors using electric field effect to enhance the pH of the processing area
  • A chemical polishing method for germanium flat mirrors using electric field effect to enhance the pH of the processing area
  • A chemical polishing method for germanium flat mirrors using electric field effect to enhance the pH of the processing area

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Step 1, Preparation of Dielectric Ceramic Polishing Disc

[0036] Step 1.1: Dissolve 200g of aluminum isopropoxide as a precursor in 1.8kg of distilled water, heat the solution to 85°C for 1 hour under high-speed stirring, and then add 0.5g of nitric acid as a peptizer to prepare an aluminum sol; After the obtained aluminum sol is heated and aged, BaO-Ln with a particle size of 100nm is added 2 o 3 -TiO 2 Dielectric ceramic powder 2kg, mixed evenly to obtain a composite gel, dried the composite gel, and calcined at 1000°C to prepare alumina-dielectric ceramic composite powder;

[0037] Step 1.2: Add 180g of 5% PVA solution to the alumina-dielectric ceramic composite powder, use a ball mill to mix evenly, pass through a 200-mesh sieve, dry at room temperature for 12 hours, put it into a mold, and carry out when the molding pressure is 4Mpa Dry-press the polishing plate green body, use the laser beam to process the micro-texture of circular pits with a diameter of 0.1m...

Embodiment 2

[0048] The operation is basically the same as in Example 1, the difference is:

[0049] (1) The preparation method of chemical polishing liquid is changed to:

[0050] Add 1wt% alkylphenol polyoxyethylene ether surfactant, 1.5wt% triethanolamine corrosion inhibitor, 1wt% water-soluble alkylphenol polyoxyethylene ether zinc thiophosphate antiwear agent, add 3wt% polyethylene glycol 400 viscosity As a regulator, potassium hydroxide aqueous solution is added to prepare an alkaline chemical polishing solution with a pH value of 9, and 1 wt% hydrogen peroxide oxidant is added, wherein hydrogen peroxide is added dropwise to the polishing solution during the polishing process.

[0051] (2) The polishing method is changed to:

[0052] The soft and brittle material germanium sheet is vacuum adsorbed on the porous dielectric ceramic vacuum adsorption substrate, and placed in the fixture, and then the porous dielectric ceramic vacuum adsorption substrate that vacuum absorbs the workpiece ...

Embodiment 3

[0054] Polishing comparison test: use IC1000 polyurethane polishing pad and silicon dioxide polishing liquid to polish the germanium flat mirror. There are many corrosion pits on the surface of the germanium flat mirror polished with polyurethane polishing pad and silicon dioxide polishing liquid, especially the polishing liquid on the grain boundary. The corrosion pits at the place are obvious, and the surface roughness and flatness comparison diagrams of the germanium wafers obtained by polishing in Examples 1, 2, and 3 are as follows Figure 4 It can be seen from the figure that the polishing method using the electric field effect to enhance the pH of the processing area has lower roughness and better surface quality than the traditional polyurethane polishing pad polishing method. At the same time, the polishing process can be understood as the copy of the workpiece to the surface of the polishing disc. , Since the hardness of the ceramic-based polishing disc is greater tha...

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Abstract

The invention discloses a germanium plane mirror chemical polishing method by using an electric field effect to improve acidity and basicity of a processing area. The germanium plane mirror chemical polishing method comprises the following steps of manufacturing a high dielectric constant vacuum sucker and a high dielectric constant polishing disc; coating high-temperature silver pastes on the nonworking end surfaces of the polishing disc and a base disc, connecting electrodes, and carrying out insulating treatment; and vacuumizing a germanium plane mirror on the porous ceramic base disc, andpolishing with a chemical polishing solution. The polishing principle of the method is that the high dielectric constant ceramic polishing disc is used, after the polishing disc and the vacuum adsorption ceramic base disc are connected with electrodes, a strong electric field is generated in a polishing area, and hydrogen ions or hydrogen oxygen ions move to the workpiece surface, so that the surface acidity and alkalinity of a workpiece are improved, the corrosiveness of the polishing solution to the workpiece surface is improved, and under the shear action of hydraulic pressure fluid, the surface of the workpiece is subjected to chemical non-contact polishing. According to the germanium plane mirror chemical polishing method by using the electric field effect to improve acidity and basicity of the processing area, the pH value of the workpiece surface can be controlled by the electric field, and through chemical non-contact polishing, the quality of the workpiece surface is improved, and the surface wear is avoided.

Description

technical field [0001] The invention belongs to the field of precision machining, grinding and polishing, and relates to a chemical polishing method for a germanium plane mirror that utilizes an electric field effect to enhance the pH of a processing area. Background technique [0002] Germanium single crystal is currently the most widely used and widely used infrared optical material in the world. Its finished products mainly include infrared germanium lenses and germanium windows, which are used as windows, lenses, prisms and filters in infrared detection systems such as infrared thermal imaging cameras. For optical sheets, germanium has the highest refractive index and is easy to process into lenses. The surface quality becomes an extremely important factor affecting the performance of its devices. Defects such as surface microcracks, dislocations generated by processing, particle embedding, amorphous conversion, and residual stress will Greatly reduce the performance of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/10B24B37/04B24B57/02C09G1/04
CPCB24B37/044B24B37/10B24B57/02C09G1/04
Inventor 冯凯萍欧进乾周兆忠赵天晨许庆华
Owner 嘉兴知酷客信息科技有限公司
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