The invention discloses a field emission
electron gun
driving circuit which comprises an FEG
data transmission module, an extraction
electrode voltage module, a
cathode heating current module, a suppression
electrode voltage module, an
ion pump power supply module and an analog quantity detection module. The FEG
data transmission module is used for converting a
digital control signal sent by the upper computer through the IC
bus into an
analog signal, transmitting the
analog signal to other modules in the
driving circuit, receiving an analog quantity detection
signal of the analog quantity detection module, converting the analog quantity detection
signal into a digital quantity, and transmitting the digital quantity back to the upper computer through the IC
bus; the
ion pump
power module is used for providing working power for the
ion pump; the
cathode heating current module is used for generating
constant current to heat a
cathode filament; the suppression
electrode voltage module is used for generating suppression electrode voltage; the leading-out electrode voltage module is used for generating leading-out electrode voltage; the analog quantity detection module is used for detecting analog quantity signals of all the modules and transmitting the analog quantity signals to the FEG
data transmission module. The method has the advantages of good stability, high reliability and the like.