A method for forming film includes the following steps: controlling a temperature of a workpiece in a chamber, so that a gaseous state sacrificial material desublimates into
solid state on a surface of the workpiece to form a
solid state sacrificial material layer; controlling a pressure in the chamber and the temperature of the workpiece, so that the
solid state sacrificial material layer starts gradually sublimating into gaseous state; providing
reactive polymer monomers into the chamber, so that the
reactive polymer monomers start being deposited on the
solid state sacrificial material layer through an adsorption process, and a
polymerization reaction of the
reactive polymer monomers is initiated, at the same time, the
solid state sacrificial material layer continues gradually sublimating into gaseous state until completely sublimating into gaseous state, and the reactive
polymer monomers form a
polymer layer deposited on the surface of the workpiece.