50results about "Single pulse train generator" patented technology

The invention provides semiconductor processing equipment and a direct-current voltage signal control system thereof. According to the system, a first signal generation module and a second signal generation module are controlled to work independently, the starting states are mutually exclusive, direct-current electric energy is obtained to generate a first direct-current voltage signal and a second direct-current voltage signal which are not overlapped in a time domain, and the first direct-current voltage signal and the second direct-current voltage signal are provided for semiconductor processing equipment to form bias voltage; and the acceleration process of charged particles in the plasma is controlled. According to the invention, the system structure can be simplified, quick-response switch control can be realized, short circuit of a circuit can be prevented, the safety and stability of system operation can be improved, the flexibility of signal regulation and control can be enhanced, the pulse waveform can be optimized in a targeted manner, and the processing performance of semiconductor processing can be improved.

Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.

Thermionic generators are described herein that include a variety of features that allow the devices to efficiently and effectively convert large amounts of thermal energy directly to electrical energy, such as in the form of currents and / or voltages. For example, the thermionic generators can be used to generate an electron beam from a thermionic emission device, and focus or shape the electron beam in such a way that allows the energy of electrons in the electron beam to be captured and converted to electrical energy.

A system, method, and apparatus for adjusting ion energy in a plasma chamber to avoid excessive and damaging charge buildup on a substrate surface and in capacitive structures constructed on the surface includes placing a substrate in the plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating the periodic voltage function over multiple cycles of the periodic voltage function in response to a defined distribution of ion energy at the surface of the substrate to, on a time-averaged basis, produce the defined distribution of ion energies and maintain surface charge buildup below a threshold.

A high-speed four-phase 25% duty cycle clock generator is provided. The four-phase clock generator includes a four-stage ring structure including four transistors of a first conductivity type, each transistor configured as a common-source structure and interconnected in a ring topology to sequentially and cyclically reset phases of an output clock; a first alternating phase cross-coupled pair including two transistors of the first conductivity type to cross-couple a first and third phase of the output clock; a second alternating phase cross-coupled pair including two transistors of the first conductivity type to cross-couple a second and fourth phase of the output clock; and a set network including four transistors of a second conductivity type to sequentially and cyclically set the phases of the output clock in response to four gated clock signals generated by alternately gating phases of an input clock and the phases of the output clock.

The present invention provides semiconductor processing equipment and a DC voltage signal control system therefor. In this system, a first signal generation module and a second signal generation module are controlled to operate independently and in mutually exclusive states, obtaining DC power to generate a first DC voltage signal and a second DC voltage signal that do not overlap in the time domain. These signals are then provided to the semiconductor processing equipment to form a bias voltage to control the acceleration of charged particles in the plasma. This invention can simplify the system structure, achieve fast-response switch control, prevent circuit short circuits, improve the safety and stability of system operation, enhance the flexibility of signal control, perform targeted optimization of pulse waveforms, and improve the process performance of semiconductor processing.

A system includes a base PSU having a voltage output, an extender PSU having a voltage output coupled in series with the voltage output of the base PSU, and a pulse switch circuit. The pulse switch circuit includes a voltage input coupled with the voltage output of the base PSU and with the voltage output of the extender PSU, a voltage output, a base switch assembly coupled in series between the voltage output of the base PSU and the voltage output of the pulse switch circuit, an extender switch assembly coupled in series between the voltage output of the extender PSU and the voltage output of the pulse switch circuit, and a clamp circuit. A controller is configured to control the base switch assembly, the extender switch assembly, and the clamp circuit based on an input received from a load sensor coupled to a load.

A system configured to provide a non-thermal plasma from a variety of feed gases is described. The system includes a plasma applicator; a feed gas source providing a gas flow to the plasma applicator; a power supply configured to deliver electrical power via a transmission line to an electrode of the plasma applicator; a signal generator configured to provide a drive signal to the power supply; and a controller. The controller is configured to receive at least one input status parameter associated with a quality of plasma delivered by the plasma applicator; and provide at least one parameter value for at least one parameter defining an output signal waveform of the power supply. The at least one parameter value is taken from the group consisting of: duty factor, pulse rate, pulse width, pulse delay, pulse modulation and pulse shape.

The present application relates to a kind of multi-mode noise interference signal generation method, belong to signal interference technical field, solve the problem that existing cannot dynamically flexibly generate the interference signal of multiple modulation modes and the high development complexity.For method includes: according to noise kind and interference mode, obtain first noise sequence, second noise sequence, third noise sequence, noise interference bandwidth and center frequency;Carrier signal is generated based on center frequency;First noise sequence and noise interference bandwidth are passed into first multiplier, then the output result and carrier signal are passed into adder, and first complex signal is output by direct digital synthesizer;First complex signal and second noise sequence are passed into complex multiplier, and second complex signal is output;Second complex signal and third noise sequence are passed into second multiplier, and noise interference signal is output.The generation of multi-mode noise interference signal dynamically flexibly is realized.

The utility model discloses a signal generator supporting multi-waveform output. The signal generator comprises a hysteresis comparator circuit, an anti-phase integrator circuit and a sine wave generator circuit. Wherein the output end of the hysteresis comparator circuit is connected to the input end of the anti-phase integrator circuit, and the output end of the anti-phase integrator circuit is connected to the input end of the sine wave generator circuit; wherein a square wave output end XS1 is led out from the output end of the hysteresis comparator circuit; a triangular wave output end XS2 is led out from the output end of the anti-phase integrator circuit; and a sine wave output end XS3 is led out from the output end of the sine wave generator circuit. The utility model has the advantages that the multi-waveform signal output is supported, the cost is low, the structure is simple, and the realization is convenient.

Embodiments herein relate to quadrature signal generation and to broadband differential quadrature signal generation at millimeter wave frequencies using over-coupled directional couplers. In an example, a quadrature signal generating sub-circuit (125) includes two conductive strips arranged parallel to each other on different layers of metal interconnects of a substrate (i.e., during a CMOS manufacturing process), the two conductive strips forming a directional coupler. Each conductive strip has a length and a width configured such that an input end of a first conductive strip and a coupling end of a second conductive strip generate an overcoupling factor, the input end being electromagnetically coupled together with the coupling end. The input may be configured to be coupled to a local oscillator (120), and the coupling may be configured to be coupled to a mixer (e.g., a mixer (115), a mixer (116)). The directional coupler may provide an output of a desired bandwidth to the one or more mixers based on the overcoupling factor.

Embodiments include methods performed by an apparatus configured to generate output signals for transmission. Such methods include detecting a triggering condition related to a change in operational status of the apparatus and selecting one of a plurality of pre-shaping vectors based on the triggering condition and past operating conditions of the apparatus during a plurality of most recent time intervals. Each pre-shaping vector includes a plurality of values that compensate for effects of voltage variation of a power supply for the apparatus. Such methods include, during a plurality of time intervals after the triggering condition, applying the values of the selected pre-shaping vector to respective information-carrying signals, thereby generating pre-shaped information-carrying signals. Such methods include generating output signals for transmission during the plurality of subsequent time intervals, using the pre-shaped information-carrying signals. The output signals are generated by an active circuit powered by the power supply.

An apparatus (20) and method for synchronizing a triggered system (System B) to a triggering system (System A) by tracking the timing of rising and falling edges of a clock signal (CLK_IN) at the triggered system and using the tracked timing values (within logger 27 from counter 22) for phase shift adjustment (25: SET) of a time base (CLK_IN at 28 out) at the triggered systems.

To provide surface charge and power feedback as well as control using a switch mode bias system.SOLUTION: There are provided systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in the plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.SELECTED DRAWING: Figure 52

A device includes a transmission clock circuit that includes a phase interpolator circuit and a transmission differential to quadrature phase generator. The phase interpolator circuit interpolates phases and provides phase interpolated first clock signals and phase interpolated second clock signals. The transmission differential to quadrature phase generator, duty cycle corrects each of the phase interpolated first clock signals and the phase interpolated second clock signals, quadrature error corrects each of the duty cycle corrected phase interpolated first clock signals and the duty cycle corrected phase interpolated second clock signals, outputs transmission clock signals based on the quadrature error corrected duty cycle corrected phase interpolated first clock signals, and outputs multiple clock phases and a track signal based on the quadrature error corrected duty cycle corrected phase interpolated second clock signals.

The invention relates to a pulse output circuit and method of an encoder, a driver and a storage medium. The circuit comprises a timing module which is used for obtaining a time difference of position updating of a target encoder; the calculation module is used for being connected with a target encoder and the timer respectively, and when the target encoder outputs the position, the reference speed of the target encoder is determined according to the current position of the target encoder, the current count value of the counter and the time difference; the current count value begins to be updated after the reference speed is obtained; the counter is connected with the calculation module and is used for updating a current count value at the reference speed; and the output module is connected with the counter and is used for outputting a target A-phase signal and a target B-phase signal according to the edge value represented by the current count value. By adopting the circuit, encoder output signals in different communication modes can be converted into output signals of a pulse type encoder so as to carry out data transmission.

The invention discloses a signal generation circuit and a signal generation device, and relates to the field of circuits, the signal generation circuit comprises a plurality of signal generation units, for any signal generation unit, the duty ratio of an input signal can be adjusted according to a reference signal accessed by the signal generation unit, and then the signal with the adjusted duty ratio is output as an output signal; meanwhile, the output end of the previous signal generation unit is connected with the input end of the next signal generation unit, and an output signal output by the previous signal generation unit is used as an input signal of the next signal generation unit, so that the signal generation unit can generate a signal on the basis of the output signal of the previous signal generation unit; and further adjusting the duty ratio of the initial input signal and then outputting the initial input signal. Therefore, the output signals with different duty ratios are generated by the plurality of signal generation units, and a plurality of output signals with adjustable duty ratios and different output widths can be realized by selecting and setting different output nodes.

A bipolar high voltage bipolar pulsing power supply is disclosed that can produce high voltage bipolar pulses with a positive high voltage pulse greater than about 2 kV followed by a negative high voltage pulse less than about -2 kV with a positive to negative dwell period between the positive high voltage pulse and the negative high voltage pulse. A high voltage bipolar pulsing power supply, for example, can reproduce high voltage pulses with a pulse repetition rate greater than about 10 kHz.

The invention discloses a frequency signal simulation device which comprises an interface module, a frequency signal generation module and an output module. The interface module is used for receiving frequency parameters, the frequency parameters comprise frequency types and frequency values, and the frequency types comprise square wave signals and NPN / PNP type proximity switch signals. And the frequency signal generation module is connected with the interface module and is used for generating a square wave signal corresponding to the frequency value and converting the square wave signal into an NPN / PNP type proximity switch signal according to the frequency type. And the output module is connected with the frequency signal generation module and is used for outputting the square wave signal and the NPN / PNP type proximity switch signal to corresponding external equipment. The device can solve the problems that in the prior art, a frequency signal is single in function, and the requirements for multifunctional signal simulation and simulation accuracy in a complex test environment cannot be met.

An apparatus (20) and method for synchronizing a triggered system (system B) to a triggering system (system A) by tracking the timing of rising and falling edges of a clock signal (CLK_IN) at the triggered system and using the tracked timing values ​​(from within a recorder 27 of a counter 22) to perform a phase shift adjustment (25: setting) on ​​a time base (CLK_IN at the output of 28) at the triggered system.

An apparatus includes a transmit clock circuit including a phase interpolation circuit and a transmit differential to quadrature phase generator. The phase interpolation circuit interpolates a phase and provides a phase interpolated first clock signal and a phase interpolated second clock signal. The transmission differential to quadrature phase generator performs duty cycle correction on each phase interpolated first clock signal and each phase interpolated second clock signal, performs quadrature error correction on each duty cycle corrected phase interpolated first clock signal and each duty cycle corrected phase interpolated second clock signal, and performs quadrature error correction on each duty cycle corrected phase interpolated first clock signal and each duty cycle corrected phase interpolated second clock signal. A transmission clock signal is output based on a quadrature error corrected duty cycle corrected phase interpolated first clock signal, and a plurality of clock phases and a tracking signal are output based on a quadrature error corrected duty cycle corrected phase interpolated second clock signal.

The utility model relates to an edge-triggered monopulse circuit, system and device. The circuit comprises a first resistor, a second resistor, a third resistor, a capacitor, a diode, a first MOS tube and a second MOS tube. One end of the first resistor is connected to a control signal input end, the other end of the first resistor is connected with a grid electrode of the first MOS tube, a drain electrode of the first MOS tube is connected with one end of the second resistor and one end of the third resistor, and the other end of the second resistor is connected to a first continuous power supply end; the other end of the third resistor is connected with one end of a capacitor, the other end of the capacitor is connected with the positive electrode of a diode, the negative electrode of the diode is connected with the grid electrode of a second MOS tube, and the drain electrode of the second MOS tube is connected to the low-pulse output end; source electrodes of the first MOS tube and the second MOS tube are grounded; the circuit is simple in design, low in development and manufacturing cost, capable of achieving effective signal control while meeting the function of generating low pulses, and beneficial to application and popularization.

A system includes a first PSU, a second PSU coupled in series with the first PSU, and a pulse switch circuit The pulse switch circuit includes a voltage input coupled with the first PSU and with the second PSU, a voltage output, a first switch assembly coupled in series between the first PSU and the voltage output, a second switch assembly coupled in series between the 5 second PSU and the voltage output, and a clamp circuit coupled to the voltage output. A controller controls the first switch assembly, the second switch assembly, and the clamp circuit based on an input received from a load sensor coupled to a load.

A plasma driver for efficiently delivering energy to a plasma when driving arcs or arc-like plasmas through a spark gap is disclosed. A plasma driver may include an energy storage capacitor, a nanosecond pulser stage electrically coupled with the energy storage capacitor, an IPM stage electrically coupled with the nanosecond pulser stage and the energy storage capacitor, a transformer electrically having a primary side and a secondary side, the primary side electrically coupled with the nanosecond pulser stage and the IPM stage, and a device may include an output cable electrically coupled with a secondary side of the transformer.

The utility model relates to the technical field of molecular pumps, and discloses a molecular pump identification circuit and a molecular pump, the molecular pump identification circuit is connected with a control module, the molecular pump identification circuit comprises a pulse output device and an energy storage device, the pulse output device is respectively connected with a preset reference voltage, the control module and the energy storage device; the pulse output device is used for sending the electric energy of the preset reference voltage to the energy storage device for storage and discharging the electric energy of the energy storage device; the energy storage device is used for charging and discharging and sending an energy storage voltage signal to the pulse output device; and the pulse output device is further used for receiving the energy storage voltage signal, comparing the energy storage voltage signal with a preset voltage signal, and outputting pulse signals with different frequencies according to a comparison result, so that the control module identifies the model of the molecular pump according to the frequencies. The problem that limited recognition types exist when a divider resistor is used for recognizing the magnetic suspension molecular pump is solved.

The invention discloses an electric pulse massage device, and relates to the technical field of massage equipment. The device comprises a massage controller and at least one massage electrode circuit, and an electric pulse output patch is arranged on the massage electrode circuit; the massage controller is used for acquiring health state information of the target object and sound waveform information of the target object, and inputting the health state information and the sound waveform information into a pre-trained deep learning model to obtain massage mode information output by the deep learning model, the massage mode information comprises an electric pulse waveform signal and electric pulse output time corresponding to each massage electrode circuit; the massage controller is further used for determining an electric pulse waveform signal and electric pulse output time corresponding to the massage electrode circuit based on the massage mode information and controlling the massage electrode circuit to output the electric pulse waveform signal through the electric pulse output patch within the electric pulse output time. According to the electric pulse massage device, the intelligent level of massage equipment can be remarkably improved.

A bipolar high voltage bipolar pulsing power supply is disclosed that can produce high voltage bipolar pulses with a positive high voltage pulse greater than about 2 kV followed by a negative high voltage pulse less than about −2 kV with a positive to negative dwell period between the positive high voltage pulse and the negative high voltage pulse. A high voltage bipolar pulsing power supply, for example, can reproduce high voltage pulses with a pulse repetition rate greater than about 10 kHz.