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Apparatus and methods for searching through and analyzing defect images and wafer maps

Disclosed are methods and apparatus for automatically organizing and/or analyzing a plurality of defect images without first providing a predefined set of classified images (herein referred to as a training set). In other words, sorting is not based on a training set or predefined classification codes for such defect images. In one embodiment, the defect images each include associated identifying data, such as a fabrication identifier, lot number, wafer number, and layer identifier. Initially, the defect images are sorted according to at least a portion of the associated identifying data into a plurality of “identifying data groups” or image families. The defect data in each identifying data group is then automatically sorted according to defect appearance. That is, similar defect images are associated with a single bin and similar bins are associated with other similar bins. For example, similar bins are arranged next to each other within a graphical user interface (GUI). A representative feature vector (herein referred to as a “centroid”) is then associated with each bin. The centroid generally represents the images within the particular bin. A search for images that “look like” a specified target image may then be efficiently performed on a particular identifying data group using the centroids of each bin. The target image's feature vector is compared with the centroid of each bin that is within the same identifying data group or image family as the target image. The techniques of the present invention may also be applied to wafer maps, as well as defect images.
Owner:KLA TENCOR CORP

Driving type patient platform, control device for driving type patient platform, control program for driving type patient platform, and particle beam therapy system utilizing these items

The objective is to obtain a driving type patient platform that can efficiently perform positioning work for making the position and the posture of a diseased site coincide with those established when a treatment plan is generated. There are provided translation units that translate a top board in the X direction, the Y direction, and the Z direction, respectively, in a fixed coordinate system; rotation units that rotate the top board in the θ direction around the X axis, the φ direction around the Y axis, and the ξ direction around the Z axis, respectively; and a control device that controls the translation units and the rotation units, based on an inputted desired rotation center point and an inputted desired rotation angle. The control device is provided with a rotation drive signal generation unit that generates a rotation drive signal for moving the top board in a rotating manner from the reference state “a” of the translation units and the rotation units to a desired rotation angle; and a translation drive signal generation unit that generates a translation drive signal for translating the translation units in such a way that the amount of translation movement, of the desired rotation center point, that is caused by the rotation movement becomes the same as or smaller than a predetermined value.
Owner:MITSUBISHI ELECTRIC CORP
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