The present invention provides a
radiation-sensitive resin composition, a pattern forming method, and a
radiation-sensitive acid generator, which can form a
resist film that can exhibit sensitivity or LWR performance, DOF performance, pattern rectangularity, CDU performance, and pattern roundness at a sufficient level even when forming a
resist pattern having a high
aspect ratio. A
radiation-sensitive resin composition includes: an
onium salt compound represented by formula (1); a resin including a
structural unit having an acid-dissociable group; and a
solvent. (In formula (1), R1, R2, and R3 are each independently a monovalent chain
organic group having 1-10 carbon atoms. R4, R5, and R6 are each independently a
hydrogen atom, a
fluorine atom, a monovalent
hydrocarbon group, or a monovalent fluorinated
hydrocarbon group. When there are a plurality of R4, R5, and R6, the plurality of R4, R5, and R6 may be the same or different from each other. Rf1 is a
fluorine atom or a monovalent fluorinated
hydrocarbon group. When a plurality of Rf1 are present, the plurality of Rf1 are the same or different from each other. And m1 represents an integer of 0-8. And m2 represents an integer of 1-4. And Z + represents a monovalent radiation-sensitive
onium cation. > # imgabs0 #