The invention provides a
radiation-sensitive composition and a pattern forming method, wherein the
radiation-sensitive composition can exert sensitivity or LWR performance, pattern rectangularity, CDU performance, pattern circularity, MEEF and
exposure latitude at a sufficient level when a pattern is formed. A
radiation-sensitive composition includes a first
onium salt compound represented by formula (1), a second
onium salt compound represented by formula (2), a
polymer containing a
structural unit having an acid-dissociable group, and a
solvent. (In formula (1), A represents a (1 + n)-valent
organic group having 1-40 carbon atoms; rf1 and Rf2 are each independently a
hydrogen atom, a monovalent
organic group having 1-20 carbon atoms, a
fluorine atom, or a monovalent fluorinated
hydrocarbon group; when there are a plurality of Rf1 and Rf2, the plurality of Rf1 and Rf2 are the same or different from each other. Wherein at least one of Rf1 and Rf2 is a
fluorine atom or a monovalent fluorinated
hydrocarbon group; r1 and R2 are each independently a
hydrogen atom, a
fluorine atom, or a monovalent
organic group having 1-20 carbon atoms; when a plurality of R1 and R2 are present, the plurality of R1 and R2 are the same or different; m1 is an integer from 1 to 4; m2 is an integer of 0-4; n is an integer of 1-3; z1 + is a monovalent radiation-sensitive
onium cation; wherein the number of fluorine atoms in Z1 + is 8 or less) (In formula (2), R4 represents a monovalent organic group having 1-40 carbon atoms in which a fluorine atom or a fluorinated
hydrocarbon group is not bonded to an atom adjacent to a
sulfur atom in SO3-; and Z2 + represents a monovalent organic cation).