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54 results about "Laser beam guide" patented technology

Kaleidoscopic laser beam projection system

A kaleidoscopic laser beam projector (KLBP) system that employs a single moving structure to project patterns of sweeping laser beams with diverse sweep directions and emission apertures. The system comprises a collimated light source, a spinning mirror deflector (“spindle / flutter mirror”) at the center, and a stationary kaleidoscopic mirror containing multiple facet mirrors arranged in a concave fashion around the spindle mirror. As the spindle mirror rotates, it directs laser beams in a radially whirling movement toward the facet mirrors, which then subdivide these beams into multiple short strokes and redirect them outward in different directions. Various embodiments include configurations with diffractive optical elements (DOEs) for beam splitting, different kaleidoscopic mirror geometries (hexagonal, octagonal, etc.), and innovative flutter mirror mechanisms that create controlled angular variations during rotation. The system enables a “4×1” configuration that replaces traditional “4×4” systems requiring eight motors and multiple moving structures. The KLBP system offers significant advantages including mechanical simplicity, reduced size and weight, improved energy efficiency, enhanced reliability, cost-effectiveness, and modular configurability. The diverse beam incidence angles enable superior illumination of complex three-dimensional objects for applications in machine vision systems, precision metrology, gap and flushness inspection, and robot-assisted assembly of complex structures.
Owner:SUMMER ROBOTICS INC

Integrated circuit board manufacturing and packaging method and system based on laser measurement

The invention relates to the technical field of integrated circuit board manufacturing and packaging, and discloses an integrated circuit board manufacturing and packaging method and system based on laser measurement, and the method comprises the steps: sensing arrangement: employing a focusing lens to focus a laser beam to the surface of a substrate, arranging a reflector and a spectroscope to guide the laser beam to the surface of the substrate, meanwhile, a sensor is arranged in the packaging equipment for monitoring; signal conversion: receiving a reflected light signal by adopting a silicon photodiode, and converting the reflected light signal into an electric signal; data acquisition: acquiring electric signal data, environment data and substrate information data; data calculation: calculating a warping prediction index and an offset prediction index; data evaluation: evaluating the packaging effect index; and comprehensive judgment: according to the packaging result index, judging whether automatic adjustment and compensation need to be carried out, and under the condition that automatic adjustment and compensation need to be carried out, calculating a compensation coefficient to carry out automatic compensation, so that active suppression of the substrate warping offset defect and intelligent improvement of the process efficiency are realized.
Owner:JUYE WANXIN ELECTRONIC PROD CO LTD

Detecting problems with laser system scanners

In certain embodiments, an ophthalmic laser system includes a laser system, imaging system, and computer. The laser system accesses a planned test pattern of planned laser spots and directs a laser beam towards a test target located at a target plane according to the planned test pattern to yield an actual test pattern of actual laser spots on the test target. The actual laser spots correspond to the planned laser spots. The imaging system has a digital camera that generates a digital image of the actual test pattern. The computer analyzes the digital image to: compare the actual test pattern to the planned test pattern; detect a deviation of the actual from the planned test pattern; identify an issue indicated by the deviation; and provide output in response to the identified issue.
Owner:ALCON INC

Laser processing device for processing a workpiece, use of a laser processing device, method for laser processing a workpiece, and corresponding computer program product

A laser machining device (100) for machining a workpiece (12), in particular for laser cutting or laser welding, is disclosed. The device (100) has: an interface (14) for coupling to a laser beam source for machining a laser beam (15); an outlet opening (11) for processing the laser beam (15); and an optical system (20) located between the interface and the outlet opening (11). The optical system (20) has at least one laser beam guiding device (25) for guiding the machining laser beam (15) in the beam path to the outlet opening (11). The laser beam guiding device (25) comprises at least two high-frequency laser scanners (30) connected in series in the beam path in the propagation direction z of the processing laser beam (15). The high-frequency laser scanners (30) each provide a maximum setting angle for deflecting the machining laser beam in a first setting plane xz. The series connection of the high-frequency laser scanners (30) achieves a maximum total set angle on a first set plane xz.
Owner:BYSTRONIC LASER AG

Separating machine for printed circuit board panels

The invention relates to a separating machine (10) for separating individual printed circuit boards (12) from a printed circuit board panel (14), said separating machine (10) comprising: at least one first laser source (16) for generating a first laser beam and a first laser spot on the printed circuit board panel (14); at least one first laser beam guide (22) for directing the at least one first laser beam onto the printed circuit board panel (14), wherein the first laser beam guide (22) is designed in such a way that the at least one first laser spot can be moved over the printed circuit board panel (14); at least one first base plate (28) which can be moved on a machine frame (26) and on each of which at least one printed circuit board panel (14) can be arranged; at least one first linear direct drive (29) for moving the at least one base plate (28) parallel to a x-axis, wherein the at least one first linear direct drive (29) comprises a respective motor part and a magnetic rail which interacts with the motor part; a control unit (30) for controlling the at least one first laser beam guide (22) and the at least one first linear direct drive (29), wherein the control unit (30) is designed in such a way that the at least one first laser beam guide (22) and the at least one first linear direct drive (29) are moved simultaneously, such that the movement of the printed circuit board panel (14) and the movement of the first laser beam for moving the laser spot over the printed circuit board panel (14) are overlaid.
Owner:SCHUNK ELECTRONICS SOLUTIONS GMBH +1

Device and system for welding two workpieces using a laser beam

Laser processing head (1) for welding two workpieces (94, 95) using a laser beam, the laser processing head (1) comprising: an entry port (10) for coupling the laser beam into the laser processing head (1), a focusing optic (20) for directing the laser beam onto the workpieces (94, 95), a feed device (30) for the contactless feeding of a welding filler material, wherein the feed device (30) is arranged at a distance from a beam axis of the laser beam, a first observation device (40) which is arranged at a distance from the beam axis of the laser beam and is configured to detect a first observation signal from an area (91) in the processing direction in front of the laser beam, and a control device (60) which is configured to control and / or regulate the welding based on the first observation signal.
Owner:PRECITEC GMBH

Laser beam brilliance improvement, beam splitting for laser welding and laser brazing

A laser processing head (50) for directing laser light onto a workpiece (WP), wherein the laser processing head (50) comprises the following: - a collimator (64) arranged in an optical axis of the laser light and configured to convert the laser light into collimated light; - a beam splitter (70) arranged in the optical axis between the collimator and a main output at an angle to the collimated light and having at least two sections arranged on a surface of the beam splitter (70), wherein the at least two sections comprise a peripheral antireflective section (72) configured to allow peripheral light of the collimated light at least partially to pass to the main output (55a), and an inner highly reflective section (74), wherein the peripheral region surrounds the inner region, and wherein the inner highly reflective section (74) has an oval shape such that the angled oval inner highly reflective section (74) reflects a secondary laser beam (SB) having a cylindrical shape towards a focusing lens 76 for a secondary fiber (40); - the main output (55a) which is arranged in optical connection with the beam splitter (70), wherein the main output (55a) is configured to direct at least the first light into a main laser beam onto the workpiece (WP); and - a secondary output (55b) arranged in optical connection with the beam splitter (70), wherein the secondary output (55b) is configured to direct at least the second section into a secondary laser beam alongside the main laser beam and comprises the following: - at least one focusing lens (68) arranged in optical connection with the beam splitter (70) and configured to focus any collimated light transmitted from the beam splitter (70) and falling onto the focusing lens (68); and - at least the secondary fiber (40) which has an input arranged in optical connection with the focusing lens (76) and which has an output arranged in optical connection with the workpiece (WP).
Owner:II VI DELAWARE INC

FABRY-PEROT CAVITY DEMODULATOR

The invention relates to a Fabry-Pérot cavity demodulation device (40), comprising: - at least two laser sources (12, 14), one with a first wavelength (λ1), the other with a second wavelength (λ2), different from the first wavelength; - optical means (22, 24, 30, 32) for directing the laser beams from these at least two sources towards a Fabry-Pérot cavity (40) and for capturing the laser beams from these at least two sources that are reflected by this cavity; - at least one detector (52, 54) for receiving the intensities of the laser beams from these at least two sources that are reflected by this cavity; - computing means (70) for calculating the ratio of said intensities. Figure 2
Owner:SAFRAN SA

Semiconductor manufacturing apparatus for epitaxial process

A semiconductor manufacturing apparatus for an epitaxial process includes: a process chamber including an edge ring supporting an outer lower surface of a semiconductor substrate so that a lower surface of the semiconductor substrate is exposed, a substrate holder supporting the outer lower surface of the semiconductor substrate, and a laser beam transmitting plate supporting the outer lower surface of the semiconductor substrate; the substrate support supports the lower surface of the outer side of the edge ring, and the laser beam transmission plate is located on the lower portion of the semiconductor substrate. A substrate heating unit that irradiates a laser beam of a vertical cavity surface emitting laser (VCSEL) module to the lower surfaces of the semiconductor substrate and the edge ring through a laser beam transmission plate; and a laser beam guide portion that irradiates the lower surface of the edge ring with a laser beam of the vertical cavity surface emitting laser module, the substrate heating portion being divided into a heating substrate region where the vertical cavity surface emitting laser module is located, a heating edge region, and a heating support region. The laser beam guide portion guides and irradiates a laser beam irradiated from the vertical cavity surface emitting laser module located in the heating support region to the lower surface of the edge ring.
Owner:VIATRON TECH INC

Thin glass substrate with high bending strength and method for producing same

A method for producing a structured glass disk is provided that includes the steps of: providing a glass disk having a thickness of at most 400 μm; directing and focusing a laser beam onto the glass disk such that the laser beam produces an elongated focus within the glass disk with an intensity sufficient to produce damage within the glass disk along the elongated focus; moving the laser beam and the glass disk relative to one another to insert damage zones along a ring-shaped path so that a workpiece is defined in the glass disk with the ring-shaped path encompassing the workpiece and with the workpiece remaining connected to the glass disc; exposing the glass disk to an etchant so that the etchant intrudes into the damage zones; and chemically toughening the glass disk with the workpiece.
Owner:SCHOTT GLASS TECH (SUZHOU) CO LTD

Measuring assembly and laser machining device

The invention relates to a measuring assembly (46) comprising a deflection unit (16) for directing a machining laser beam (14) onto a surface to be machined, in particular a machining head (18) of a laser machining device (10), and a measuring optical unit (34), which is arranged upstream of the deflection unit (16) in a beam propagation direction (52), for coupling a measuring beam (36, 36a, 36b) into the deflection unit (16); wherein the measuring optical unit (34) has a measuring scanner (50) for deflecting the measuring beam (36, 36a, 36b) in a scanning plane (64, 66) in at least one scanning direction transversely to the beam propagation direction (52) of the measuring beam (36, 36a, 36b); wherein the measuring optical unit (34) has a lens group (86), which is arranged downstream of the measuring scanner (50) in the beam propagation direction (52), for determining an imaging position (70) of the scanning plane (64, 66) in the beam propagation direction (52) at or downstream of an input aperture (40) of the deflection unit (16), wherein the lens group (86) has an entry lens (88) or has an entry lens subgroup with positive refractive power for refracting the measuring beam (36) entering the lens group (86) and an exit lens (90) or an exit lens subgroup with positive refractive power for refracting the measuring beam (36, 36a, 36b) exiting the lens group. The invention further relates to a laser machining device (10).
Owner:TRUMPF LASER SE

Spectrometer, module and method for correcting misalignment of a laser beam with a lens' optical axis

A spectrometer including a laser for generating a laser beam, a lens for directing the laser beam to a location of a sample, and a component for directing the laser beam to the lens so as to be co-axial with the lens' optical axis, the spectrometer including a beam splitter for directing the part of the laser beam towards a sensor arranged such that part of the laser beam can be used for monitoring alignment of the laser beam with the lens' optical axis, and wherein the spectrometer comprises a laser beam path correction element. Optionally the spectrometer includes an element for directing the part of the laser beam towards a sensor.
Owner:RENISHAW PLC

Atomic layer etch and deposition processing systems including a lens circuit with a tele-centric lens, an optical beam folding assembly, or a polygon scanner

A substrate processing system includes a processing chamber, a substrate support, a laser, and a collimating assembly. The substrate support is disposed in the processing chamber and is configured to support a substrate. The laser is configured to generate a laser beam. The collimating assembly includes lenses or mirrors arranged to direct the laser beam at the substrate to heat an exposed material of the substrate. The lenses or mirrors are configured to direct the laser beam in a direction within a predetermined range of being perpendicular to a surface of the substrate.
Owner:PAENG DONG WOO +4

Detecting problems of a laser beam of a laser system

In certain embodiments, an ophthalmic laser system include a laser system, imaging system, and computer. The laser system accesses a planned test pattern of a planned laser spot having a planned beam feature and directs a laser beam towards a test target located at a target plane according to the planned test pattern to yield an actual test pattern of an actual laser spot having an actual beam feature. The imaging system includes one or more digital cameras that generate a digital image of the actual test pattern of the actual laser spot. The computer analyzes the digital image to compare the actual laser spot to the planned laser spot, to detect a deviation of the actual beam feature from the planned beam feature, to identify an issue indicated by the deviation, and to provide output in response to the issue.
Owner:ALCON INC

Scan field and work plane evaluation and orientation for high-speed laser motion systems

System and methods for evaluating build platform flatness and parallelism relative to a focal plane of a high-speed laser in high-speed laser motion systems, wherein the high-speed laser motion systems include the high-speed laser that generates a laser beam, and the build platform having a work plane, comprising positioning a plurality of pin-hole sensors within the focal plane of the high-speed laser, wherein each of the pin-hole sensors is positioned at a predetermined location; directing the laser beam to the predetermined locations of each pin-hole sensor; measuring a spot size of the laser beam at each pin-hole sensor, wherein the spot size at each pin-hole defining structure has a measureable diameter; comparing the measurable diameters obtained at each pin-hole sensor; and adjusting the work plane of the build platform to a position where the measurable diameters of the spot sizes are equal at each pin-hole sensor.
Owner:EDISON WELDING INSTITUTE INC

Gantry for the delivery arm of a laser head

In one or more embodiments, an ophthalmic system includes a chassis, a delivery arm, a gantry, and a computer. The chassis is coupled to a laser source that can generate a laser beam. The delivery arm is coupled to a laser head that can direct the laser beam towards a target. The gantry includes a positioning system and an adjustment system. The positioning system facilitates motion of the delivery arm and includes an angular system that can facilitate angular motion of the delivery arm. The adjustment system includes linear subsystems that can facilitate motion of the delivery arm. The computer system detects a request for movement of the delivery arm and determines an angle of angular movement of the delivery arm relative to the chassis. The computer system generates an instruction for the requested movement according to the request and the angle and sends the instruction to the adjustment system.
Owner:ALCON INC

High silicon electrical steel alloys using directed energy deposition

Additive manufacturing enables near-net-shape fabrication of high silicon electrical steel alloys. The wide array of process conditions provides additive manufacturing with increased flexibility, enabling control over the microstructure and mechanical properties, compared to conventional rolling and sheet fabrication. As an example of the invention, microstructures and magnetic properties of ring-shaped Fe—Si alloys produced using concentric and cross-hatch tool paths on a laser beam-directed energy deposition additive manufacturing system were evaluated. Build strategies and thermal treatments can be selected to enable the use additively manufactured Fe—Si alloys in electrical power conversion applications.
Owner:NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC

Laser apparatus

A laser apparatus includes an output optical fiber including a first optical waveguide and a second optical waveguide, a first laser light source that generates a laser beam, a first input optical fiber through which the laser beam generated by the first laser light source propagates, a second laser light source that generates a laser beam, a second input optical fiber through which the laser beam generated by the second laser light source propagates, and an optical combiner that is configured such that the first input optical fiber is optically connected to the first optical waveguide and the second input optical fiber is optically connected to the second optical waveguide, and directs the laser beam from the first laser light source to the first optical waveguide and the laser beam from the second laser light source to the second optical waveguide.
Owner:FUJIKURA LTD

Laser oscillator and laser processing apparatus including the same

To provide a laser oscillator capable of suppressing output deterioration and beam quality deterioration of a high-output laser beam guided by an optical fiber.SOLUTION: The laser oscillator 90 includes a laser module 10 having a laser light source that emits a first laser beam LB1, optical fibers 80, and a condensing optical unit 40. The condensing optical unit 40 includes a condenser lens 42 and a birefringent device 43 disposed between the condenser lens 42 and the incident ends 80A of the optical fibers 80. The first laser beam LB1 transmitted through the birefringent device 43 is separated into a first sub-beam LB11 and a second sub-beam LB12, and each of the first sub-beam LB11 and the second sub-beam LB12 is incident on the core 81 of the optical fibre 80 as a laser beam LB.SELECTED DRAWING: Figure 2
Owner:PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD

Laser system and method for generating secondary radiation by interaction of primary laser beam with target material

The invention relates to a laser system for generating secondary radiation (108) by interaction of a focused primary laser beam (104) with a target material (106), the laser system comprising: a laser beam source (102) for providing a raw laser beam (110) having ultra-short laser pulses; a target region (114) for arranging a target material (106); a beam guiding device (112) for forming a focused primary laser beam (104) from the raw laser beam (110), the focused primary laser beam (104) being guided to a target region (114) for interacting with a target material (106) arranged in the target region (114), the beam guiding device (112) having a beam focusing device (126) for focusing the focused primary laser beam (104) with the target material (106) arranged in the target region (114), a beam focusing device (126) arranged to form a primary laser beam (104) by focusing a laser beam (129) entering the beam focusing device (126), the laser beam (129) entering the beam focusing device (126) being based on or corresponding to the original laser beam (110), and wherein the beam focusing device (126) has at least two spherical mirror elements (154, 156; 176, 180) is provided. According to the invention, when the primary laser beam (104) propagates in a medium having a refractive index of less than 1.01, the numerical aperture of the beam focusing device is between 0.001 and 0.01.
Owner:TRUMPF LASER GMBH CO KG

Unified photodetector and electrode array

A photodetector is made sufficiently large to receive an entire designed field of view (e.g., for a LiDAR system). At least one lens is mounted to direct reflected laser beams to the photodetector. A plurality of electrodes (e.g., 16, 32 or 64) are coupled to the photodetector, each electrode corresponding to a different pixel position. A processor is coupled to the plurality of electrodes and the processor is configured to detect a pixel position of a reflected laser beam by detecting which electrode produces the largest digital signal.
Owner:BEIJING VOYAGER TECH CO LTD

Light-emitting module and method for manufacturing the same

This invention provides a light-emitting module that allows adjustment of the direction of the laser beam emitted from a laser light source. [Solution] The light-emitting module comprises a support base having a first mounting surface and a plurality of second mounting surfaces, the plurality of second mounting surfaces being aligned in a first direction and positioned in a second direction with respect to the first mounting surface when viewed from above, with the height of the plurality of second mounting surfaces decreasing along the first direction; a plurality of laser light sources, each positioned on the first mounting surface and emitting a laser beam in a second direction when viewed from above; a plurality of mirror members, each positioned on the corresponding second mounting surface and reflecting the laser beam emitted from the corresponding laser light source in a first direction; a plurality of light deflection members, each positioned on the first mounting surface and directing the laser beam emitted from the corresponding laser light source towards the corresponding mirror member; and a focusing lens, each combining the plurality of laser beams reflected in the first direction.
Owner:NICHIA CORP

Device for machining the surface of a workpiece

The invention relates to a laser device (2) comprising at least one laser processing head (7) configured to direct a plurality of laser beams (4) towards the support surface (6) and / or comprising a plurality of laser processing heads (7a, 7b), each configured to direct at least one laser beam (4a, 4b) towards the support surface (6), wherein a first movement device (8) for moving the at least one laser processing head (7) and / or the plurality of laser processing heads (7a, 7b) along a first axis of movement (X), a second movement device (9) for moving the at least one laser processing head (7) and / or the plurality of laser processing heads (7a, 7b) along a second axis of movement (Y), and a third movement device (10) for moving the at least one laser processing head (7) and / or the plurality of laser processing heads (7a, 7b) along a second axis of movement (Y).7b) are provided along a third axis of motion (Z) and that the laser device (2) comprises a control unit (11) configured to control the first motion device (8), the second motion device (9) and the third motion device (10) and to control the at least one laser processing head (7) and / or the plurality of laser processing heads (7a, 7b) such that at least one process parameter of the at least two laser beams (4, 4a, 4b) can be individually changed and / or the at least two laser beams (4, 4a, 4b) can be individually switched on and off.
Owner:HUECK RHEINISCHE GMBH +1

Omnibearing light wave detection system for steel rail

The utility model discloses a steel rail omni-directional light wave detection system which comprises a laser beam guiding mechanism sliding on the top of a damaged steel rail and a laser simulator arranged in the laser beam guiding mechanism, and laser of the laser simulator is emitted to the damaged position of the damaged steel rail through the laser beam guiding mechanism. The device has the characteristics of simple structure, high practicability, accurate detection and high detection efficiency, and is suitable for large-scale popularization and application in a track flaw detection system.
Owner:XIAN METRO

Laser softening device and steel belt machining system and method

The invention provides a laser softening device and a steel strip machining system and method, and relates to the technical field of metal material machining, the device comprises a laser emitting assembly, a composite laser vibration lens and a focusing lens, and the composite laser vibration lens comprises a steering lens and a light beam deflection lens; a laser head of the laser emitting assembly is used for swinging according to a position signal of a to-be-processed steel belt; the turning mirror and the light beam deflecting mirror are used for rotating according to the position signal and the swing angle of the laser head so as to guide a laser beam emitted by the laser emitting assembly to the focusing lens; the focusing lens is used for conducting laser flying welding on the punching edge position and the cutting-off position of the steel belt, so that the punching edge position and the cutting-off position are heated and softened. According to the invention, the abrasion of the die and the overall processing cost during steel strip punching can be reduced.
Owner:NINGBO XINTAI MACHINERY +1

Reflection part unit of light source device

This reflection part unit of a light source device is provided with: a reflection part (30a) that reflects a laser beam bundle (B) toward a condensing optical system (50), the condensing optical system (50) being for directing the reflected laser beam bundle (B) toward a phosphor part (40); and a support member (60) that supports the reflection part (30a) such that the reflection part (30a) is positioned with respect to the phosphor part (40). The support member (60) positions the reflection part (30a) with respect to the condensing optical system (50) such that the laser beam bundle (B) passes through the condensing optical system (50) in a first direction and fluorescence radially emitted from the phosphor part (40) passes through the condensing optical system (50) in a second direction opposite to the first direction. The support member (60) supports the reflection part (30a) such that a range of the reflection part (30a) is 1 / 3 or less of an area of a lens surface of the condensing optical system (50) through which the fluorescence finally passes in the second direction.
Owner:AITEC SYST

Detecting problems with laser systems

In certain embodiments, an ophthalmic laser system includes a laser system, imaging system, and computer. The laser system accesses a planned test pattern of planned laser spots and directs a laser beam towards a test target located at a target plane according to the planned test pattern to yield an actual test pattern of actual laser spots on the test target. The actual laser spots correspond to the planned laser spots. The imaging system has a digital camera that generates a digital image of the actual test pattern. The computer analyzes the digital image to: compare the actual test pattern to the planned test pattern; detect a deviation of the actual from the planned test pattern; identify an issue indicated by the deviation; and provide output in response to the identified issue.
Owner:ALCON INC

Mobile removal device

To excellently control an irradiation position of a laser beam.SOLUTION: A mobile removal device configured to irradiate an inhibitor that may inhibit the growth of a plant with a laser beam includes a camera, a control unit, and a laser beam guide unit. The guide unit has a reflection part of the laser beam. The control unit displaces at least one of the camera and the reflection unit to make a transition between an interference state in which the reflection unit is located in an imaging range of the camera and a non-interference state in which the reflection unit does not prevent detection of the inhibitor based on an image captured by the camera. The control unit irradiates the inhibitor with the laser beam in the interference state, and detects the inhibitor based on the captured image in the non-interference state.SELECTED DRAWING: Figure 1
Owner:FUTABA IND CO LTD

Substrate heating method, substrate heater, and thermal laser deposition system

The present invention relates to a method for heating a substrate 20, particularly a method for heating a substrate 20 in a thermal laser deposition (TLE) system 10. The present invention also relates to a substrate heater 30 for heating a substrate 20, particularly a substrate heater 30 for heating a substrate 20 in a TLE system 10. The substrate heater 30 includes a laser source 32 for providing a laser beam 34 and means for directing the laser beam 34 to the substrate 20. The present invention also relates to a TLE system 10 including a reaction chamber 12 that can be filled with a reaction atmosphere 14, a substrate 20 disposed within the reaction chamber 12, one or more sources 16 disposed within the reaction chamber 12, and a substrate heater 30 for providing a laser beam 34 that is irradiated onto the substrate 20, thereby heating the substrate 20.
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

XY deflection unit for laser light with two operating modes and their use

An XY deflection unit for laser light comprises: a tube, which includes: a first port for attaching a single-mode optical fiber with a core diameter in the range of 3 µm to 5 µm, a lens, and a focus adjustment gear for changing the distance between one end of the optical fiber and the lens; a housing, which includes: a first and a second deflection mirror, wherein the respective mirror surfaces of the deflection mirrors have a diameter of at least 10 mm, and a second port for attaching the XY deflection unit to a microscope; an adjustable connecting element, wherein the tube is connected to the housing by means of the adjustable connecting element, the connecting element being designed to adjust both a tilt and a transverse displacement of the tube relative to the housing;and a drive unit for rotating the deflecting mirrors about an axis each, in order to direct the laser light to a desired location in a sample on the microscope, wherein the lens is designed to direct laser light emerging from the end of the single-mode optical fiber onto the deflecting mirrors and the deflecting mirrors are designed to direct the laser light into the microscope, wherein in a first position of the focus adjustment gear the XY deflection unit is in a first operating mode in which the lens is designed to spread the laser light emerging from the end of the single-mode optical fiber into a parallel beam of at least 7 mm in diameter, and wherein in a second position of the focus adjustment gear the XY deflection unit is in a second operating mode in which the lens is designed to focus the laser light emerging from the end of the single-mode optical fiber into a focused beam.
Owner:ACAL BFI GERMANY GMBH