1results about How to "Complete security measures" patented technology

The utility model provides a kind of mobile power supply system for electron beam scanning electron microscope ion pump.The mobile power supply system includes box, the power supply core being set in the box, charging interface and at least one discharge interface.Charging interface is used to connect external power supply and power supply system, to charge power supply system;Each discharge interface is used to connect power supply core and an ion pump, to discharge ion pump.The mobile power supply system of the utility model integrates multiple functions, is easy to operate, and has complete safety measures, which can ensure that the internal vacuum degree of the electron gun deteriorates during transportation, and maintain the high vacuum state of the electron gun by supplying power to the ion pump to vacuumize the electron gun.The mobile power supply system is installed in the electron gun transport cabinet in the form of a module, which is small in size and easy to install.When the entire module fails, efficient maintenance can be achieved by replacing the module, reducing maintenance time and cost.