Method for determining the layer thicknesses of a sample with a known plurality N of superimposed
layers S i , with i = 1, 2, 3, ..., N, with the steps: a) Generating pulses of electromagnetic high-frequency
radiation with a predetermined frequency bandwidth, b) Irradiating the sample with electromagnetic high-frequency
radiation and c) Time-resolved measurement of the
electric field E P (t) the electromagnetic
radiofrequency radiation reflected by or transmitted through the sample, d) Selecting a
layer thickness d i , an
absorption index k i and a
refractive index n i for each layer S i , with i = 1, 2, 3, ..., N, e) Calculating a time-dependent
electric field E M(t) for the electromagnetic high-frequency
radiation reflected by or transmitted through the sample using a model, wherein the model defines a time-dependent
electric field E according to the number N+1 interfaces between the measurement environment and the sample, as well as between the individual
layers. j (t), with j = 0, 1, 2, 3, ..., N, taken into account, where the electric fields E j (t) depending on the layer thicknesses d i , the absorption indices k, which are assumed to be constant over the frequency bandwidth of the electromagnetic high-frequency radiation used i and the refractive indices n, which are assumed to be constant over the frequency bandwidth of the electromagnetic high-frequency radiation used. i to the time-dependent electric field E M (t) are added, f) Comparing the calculated electric field E M (t) with the detected electric field E P(t) g) when there is a deviation Q between the calculated electric field E M (t) and the detected electric field E P (t) is greater than a predetermined tolerance T, the layer thicknesses d i , the refractive indices n i and the absorption indices k i as long as the deviation Q is varied and steps e) to g) are repeated until the deviation Q is smaller than the tolerance T, and h) Providing the layer thicknesses d i as a result of the
layer thickness determination, characterized in that initially for step d) and for a predetermined number of L repetitions of steps e) to g) the
absorption index k i is selected from a range of values that is small compared to the expected range of values that the
absorption index k represents. i for the respective shift S i a sample can assume and which is in relation to the maximum expected absorption index k ifor the respective layer includes small absorption indices.