The invention discloses a supervision and control-based punctual scheduling method and
system for
wafer combination equipment, and mainly solves the problems of
high probability of blockage, path conflict and low scheduling efficiency during multi-resource parallel operation of the existing
wafer combination equipment. According to the implementation scheme, the method comprises the following steps: respectively constructing corresponding
automaton models for process units in equipment, and carrying out synchronous splicing according to a real process flow to form an overall model capable of reflecting dynamic behaviors of a
system; a corresponding constraint model is established by combining factors such as process sequence constraint, equipment capacity limitation, carrying time constraint and
residence time limitation; and the supervision controller continuously judges whether the event to be executed can
cause blockage or not, gradually eliminates the blockage by disabling the controllable event, triggers the optimal event according to the priority of the event, and guides the scheduling path to propel and output the
optimal scheduling scheme along the optimal direction. According to the method, the overall model capable of being dynamically adjusted is constructed, the event priority and multi-class constraint collaborative optimization scheduling is utilized, the
wafer residence time can be remarkably shortened, the overall scheduling efficiency is improved, and the method can be used for operation inspection, evaluation and optimization of an equipment
system.