The application discloses a large-view-field telecentric
optical imaging system for a
chip overlay system and relates to the technical field of
optical imaging systems; the
system comprises a diaphragm, a
first light-splitting
prism, a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a second light-splitting
prism and an
image plane, and the diaphragm, the
first light-splitting
prism, the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the second light-splitting prism and the
image plane are sequentially arranged along an
optical axis from an object side to an image side. The large-view-field telecentric
optical imaging system for the
chip overlay system has the advantages of a
large field of view, a long
object distance, high telecentricity on the object side and
low distortion; the incident surface and the emergent surface are loaded with light-splitting prisms matched with multiple functional interfaces, and can simultaneously satisfy functions such as
light source illumination, self-focusing and high-resolution imaging.