The present invention provides a monolithic integrated lattice mismatched
crystal template and a preparation method thereof by using low-
viscosity material, the preparation method for the
crystal template includes: providing a first
crystal layer with a first
lattice constant; growing a buffer layer on the first crystal layer; below the
melting point of the buffer layer, growing a second crystal layer and a template layer by sequentially performing the growth process of a second crystal layer and the growth process of a first template layer on the buffer layer, or growing a template layer by directly performing a first template layer growth process on the buffer layer; melting and converting the buffer layer to an amorphous state, performing a second template layer growth process on the template layer grown by the first template layer growth process at the growth temperature above the
glass transition temperature of the buffer layer, sequentially growing a template layer until the lattice of the template layer is fully relaxed. Compared to the prior art, the invention has advantages of simple preparation, achieving in various
lattice constant material combinations on one substrate and low
dislocation density, high crystal quality.