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Method for controlling the dishing problem associated with chemical-mechanical planarization (CMP) during manufacture of copper multilayer interconnection structures in ultra large-scale integrated circuits (ULSI)

Provided is a method of chemical-mechanical planarization of copper multilayer interconnection structures and of controlling the dishing problem associated therewith comprising: (a) preparing a slurry by (i) diluting SiO2 hydrosol with deionized water; (ii) admixing a chelating agent and adjusting the pH to between 9.5 to 11.5; and (iii) admixing nonionic surfactant(s) and oxidant(s); (b) applying said slurry to said copper multilayer interconnection structures; and (c) polishing said copper multilayer interconnection structures with polishing pad(s). The flow speed is 200-5000 ml/min, the temperature is 20-40° C., the rotation speed is 60-120 rpm, the pressure is 100-250 g/cm2, and the polishing speed can be 200-1100 nm/min. The process involves 1-5 min for polishing the copper and then 30-60 sec for polishing the copper, the barrier layer, and the dielectric layer. Consistent polishing speeds for the copper, the barrier layer, and the dielectric layer are achieved, which effectively reduces the dishing problem. At the same time, the method reduces the contamination of the surface with metal ions.
Owner:LIU YULING +5

Method for preparing nicotinamide-coated multivesicular liposomes

The invention relates to a method for preparing nicotinamide-coated multivesicular liposomes. The nicotinamide-coated multivesicular liposomes are prepared from phospholipid, neutral lipid, cholesterol, an organic solvent, a hydrophilic emulsifier, nicotinamide, amino acid, an osmotic pressure regulator and deionized water. The method comprises the steps: dissolving the phospholipid, the cholesterol and the neutral lipid in the organic solvent, so as to obtain an organic phase; uniformly mixing the nicotinamide, the amino acid, the osmotic pressure regulator and the deionized water, so as to obtain an internal water phase; homogenizing the organic phase component, and adding the internal water phase component into the organic phase component, so as to prepare a W/O primary emulsion; mixing the hydrophilic emulsifier, the amino acid, the osmotic pressure regulator and the deionized water, and carrying out dispersing, so as to obtain an external water phase; homogenizing the external water phase component, adding the W/O primary emulsion component into the external water phase component, carrying out homogenizing, then, carrying out ultrasonic treatment, and then, cooling the mixture to room temperature with stirring, so as to form a W/O/W multiple emulsion; dispersing the multiple emulsion into an amino acid solution, introducing nitrogen gas into the solution to remove the organic solvent, thereby obtaining a nicotinamide-coated multivesicular liposome suspension. According to the method, the stability of the nicotinamide is improved.
Owner:SHANGHAI INST OF TECH
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