167results about "Caliper-like sensors" patented technology

The invention relates to a device for measuring thickness, in particular to a testing device for thickness of a slice medium. The testing device comprises a fixed mount, a reference shaft, a testing shaft, an elastic press sheet, a magnet, and a Hall sensor, wherein two ends of the reference shaft are installed on the fixed mount by bearings, the reference shaft is fixedly sleeved with a reference roller; two ends of the testing shaft are fixedly installed on the fixed mount; the testing shaft is provided with at least one testing roller base of which one end is rotated freely around the testing shaft; a free end of the testing roller base is provided with a testing roller which can rotate freely; the testing roller and the reference roller are formed in elastic contact; the elastic press sheet is arranged correspondingly to the testing roller base; one end of the elastic press sheet is fixed on the fixed mount and the other end of the elastic press sheet forms a free end and applies a pressing force to the testing roller base at the reference roller; the free end of the elastic press sheet is fixedly provided with the magnet on the opposite side to the testing roller; and the Hall sensor for testing the displacement of the magnet in a non-contact mode is fixed on the fixed mount opposed to the magnet.

A sensor is provided that measures web caliper using optical and magnetic measuring devices. The optical measuring devices may employ a confocal chromatic aberration method to accurately determine the distance to the moving web and the magnetic devices may be ferrite core coil and target. Means of stabilizing a moving web are included for improving dynamic measurement accuracy.

A device for measuring the thickness of a sheet or web product including at least one moveable measuring sensor which can be pressed against the product while forming an air pad between measuring sensor and product. At least one measuring sensor is respectively provided on both sides of the sheet or web product. The thickness of the respective air pad can be measured, the total gap thickness including the thickness of the two air pads and the product thickness can be measured. Elements are provided for calculating the product thickness by subtracting the thickness of the air pad on the two product sides from the measured total gap thickness.

An object is to reduce film thickness measurement error. Illumination light having different wavelengths is radiated onto a plurality of samples in which thin films having different film qualities and film thicknesses are provided on substrates, evaluation values related to the amounts of transmitted light when the illumination light of each wavelength is radiated are measured, film thickness characteristics, showing the relationship between the evaluation values and the film thicknesses for each film quality, are formed at each wavelength based on the measurement results, and among the film thickness characteristics, a wavelength at which a measurement difference between the evaluation values caused by the film qualities is in a predetermined range is selected.

Upper to lower assembly analog position sensors in a dual scanning system measure alignment offsets. A controller uses error signals from the position sensors to calculate actuator error profiles that are used in the next scan in the same direction, with different error profiles being used for forward and reverse scans. Since the alignment error profiles are repeatable for a given set of scanner conditions, the actuator controller anticipates what the error signal will be before each scanning assembly reaches a given position. An optimized error correction can be calculated based on the error profiles and actuator bandwidth without concerns regarding feedback loop speed, overshoot, and unstable control oscillations. An actuation system driven from error profiles can correct for alignment offsets by actively changing belt tensions at the offsetting drive pulleys and/or changing the position of sensor assemblies relative to the drive belt systems.

A sensor is provided that measures web caliper using optical and magnetic measuring devices. The optical measuring devices may employ a confocal chromatic aberration method to accurately determine the distance to the moving web and the magnetic devices may be ferrite core coil and target. Means of stabilizing a moving web are included for improving dynamic measurement accuracy.

The present invention provides a method and apparatus for use in measuring a thickness of a layer and/or variations in layer thickness for layers that are flat, curved or have curves. The apparatus comprises a light source to generate a light beam, a light beam detector to detect at least a portion of the light beam reflected, an eddy current field generator that induces an eddy current, an eddy current detector to detect the induced eddy current and a processor coupled with the light source, light detector, eddy current field generator and eddy current detector, wherein the processor controls the light detector, eddy current field generator and eddy current detector. A radial characteristic of a region of the surface can be determined, a scaling factor can be determined based on the radial characteristic and a measured distance can be scaled based on the scaling factor in determining a thickness.

An inspection method uses a charged particle microscope to observe a sample and view a defect site or a circuit pattern. A plurality of images is detected by a plurality of detectors and a mixed image is generated by automatically adjusting and mixing weighting factors required when the plurality of images are synthesized with each other. The sample is irradiated and scanned with a charged particle beam so that the plurality of detectors arranged at different positions from the sample detects a secondary electron or a reflected electron generated from the sample. The mixed image is generated by mixing the plurality of images of the sample with each other for each of the plurality of detectors, which are obtained by causing each of the plurality of detectors arranged at the different positions to detect the secondary electron or the reflected electron. The generated mixed image is displayed on a screen.

Disclosed herein is a method and apparatus for reducing measurement error resulting from temperature variations across a wafer, without measuring the wafer temperature, the temperature gradient in the surrounding air, or the distribution of the index of refraction of the air.

A method and apparatus for moving an article relative to and between a pair of distance sensing probes of a thickness measuring apparatus which are spaced apart a known distance D is described. In the method, the article is moved relative to and between the pair of probes in at least one direction in a plane normal to a common measurement axis Ac between the probes. A distance a along the common measurement axis Ac between the first probe and a point on the surface of the article nearest to the first probe of the pair that intersects the common measurement axis Ac is measured. A similar distance b between the second probe and the article is measured. From the measured distance a, the article is moved relative to the probes along the common measurement axis Ac so as to minimize any difference between the measured distance a and a desired distance ad along the common measurement axis Ac between the first probe and a point on the surface of the article nearest to the first probe that intersects the common measurement axis. The measured distances a and b and the position of the article relative to the probes in at least one direction are recorded at predetermined time intervals to develop a thickness map of the article. In a thickness computation, all of the measured distances a for each recorded position of the article are substantially the same.

An objective of the present invention is to allow removing the effect of measurement error caused when the distance between support points of a pair of laser rangefinders of a thickness measurement device fluctuates due to temperature changes, and to allow contiguous measurement without special measures being required for safety management. Thickness measurement devices (1, 2) are set with a predetermined gap (Ld), while the first thickness measurement device (1) executes a thickness correction process with a thickness reference plate (5c), and while the second measurement device (2) which is placed on the downstream side of a movement direction executes a measurement process, an operation mode setting unit (3) sets the first thickness measurement device (1) to "measurement", instructs the second thickness measurement device (2) to commence a "thickness correction" process, delays a first thickness measurement value (1) to a location corresponding to a gap in the movement direction, derives the difference between the first thickness measurement value (1) and a second thickness measurement value (2) thereof as a correction value, and executes a thickness correction without interrupting the measurement by the second thickness measurement device (2).

A method for detecting an internal crack in a wafer includes a first image recording step of applying near infrared light having a transmission wavelength to a reference wafer having the same configuration as a target wafer to be subjected to the detection of the internal crack, thereby obtaining a first image of the reference wafer having no internal crack and then recording the first image, a processing step of processing the target wafer, a second image recording step of applying the near infrared light to the target wafer, thereby obtaining a second image of the processed target wafer and then recording the second image, and an internal crack detecting step of removing the same image information between the first image and the second image from the second image to obtain a residual image, thereby detecting the residual image as the internal crack in the target wafer.

A method for measuring the thickness on measurement objects, whereby at least one sensor measures against the object from the top and at least one other sensor measures against the object from the bottom and, at a known distance of the sensors to one another, the thickness of the object is calculated according to the formula D=Gap−(S1+S2), whereby D=the thickness of the measurement object, Gap=the distance between the sensors, S1=the distance of the top sensor to the upper side of the measurement object, and S2=the distance of the bottom sensor to the underside of the measurement object, is characterized by the compensation of a measurement error caused by tilting of the measurement object and/or by displacement of the sensors and/or by tilting of the sensors, whereby the displacement and/or the tilting is determined by calibration and the calculated thickness or the calculated thickness profile is corrected accordingly. The invention further concerns a device for applying the method.

A noncontact object scanning system includes a horizontal table rotatable on a vertical axis, one or more scanners above the table and one or more scanners below the table. The table allows passage of radiant energy therethrough due to its transparency or construction as a nonreflective grid. A controller automatically steps the scanners through a scanning sequence, each scan associated with a segment of the object's exterior surface. Surface segments scanned from above the table and from below the table combine to provide a comprehensive scan of the entire exterior surface. Adjacent surface segments overlap one another to provide redundant data used to overcome shadowing effects from the grid and to accurately align and merge the segments into a three dimensional representation of the complete exterior shape of the object. The scanners can incorporate color responsive light detectors whereby the three dimensional representation portrays color and shape.

A method for determining the thickness of a film on a substrate is described. The substrate has a first major surface opposite a second major surface, and the film covers a portion of the first major surface. During a first measurement step, a first measuring beam is used to determine the distance from a first reference point to a portion of the first major surface of the substrate that is not covered with the film,and a second measuring beam is used to determine the distance from a second reference point to a portion of the second major surface of the substrate that is not covered with film. During a second measurement step the first measuring beam is used to determine the distance from the first reference point to the film, and the second measuring beam is used to determine the distance from the second reference point to a portion of the second major surface of the substrate that is not covered with film. The thickness of the film so determined may be used as a control parameter in a method of applying an ink to an automotive glazing pane.

An air stabilization system employing two parallel, opposite facing Coanda nozzles, that are positioned adjacent a flexible moving web, with each nozzle exhausting gas at opposite directions, subjects the moving web to opposing forces effective to stabilize the web. Each nozzle includes an elongated slot that is parallel to the path of the moving web. The two Coanda nozzles serve as separate points along the machine direction for controlling the height of the moving web. By modulating the flow, pressure and other parameters of gases exiting the Coanda nozzles, the shape of the moving web between the nozzles can be manipulated to present a planar contour for measurements. The air stabilization system can be incorporated into a scanner head to measure the caliper of paper, plastic, and other flexible web products.

An inspection device for contactless three-dimensional inspection of a circular, mechanical component with toothing having a main axis of rotation. The device is configured to scan the teeth by at least one first pair of laser measurement modules and rotationally drive the component about the main axis relative to the laser measurement modules. The device then rebuilds a virtual three-dimensional representation of the component using data coming from said scanning and performs a dimensional inspection using the three-dimensional representation. Each pair of modules includes a first module oriented towards a first face of a tooth and a second module oriented towards a second face of a tooth. The modules are oriented relative to the component so that during a rotation of the component, the laser measurement modules scan the first and second faces of each tooth throughout their thickness and depth.

A method for the contactless determination of the thickness of a web of material, for example a web of fibrous material using a sensor array including at least two optical measurement units between which the web can be guided. Each of the optical measurement units includes a measurement plate on the side facing the web. The optical measurement units, which are arranged on opposite sides of the web, are used to measure the distance of the measurement units from the web, and an evaluation unit is used to determine the thickness of the web from the determined distances between the optical measurement units and the web and the distance between the optical measurement units arranged on opposite sides of the web. Multiple optical sensors which are disposed at a distance from each other are associated with the optical measurement units arranged on opposite sides of the web and the evaluation unit is used to determine the angle of inclination of the measurement plates relative to the web and/or an offset between the optical measurement units arranged on opposite sides of the web or between the measurement plates of said units on the basis of the measured values obtained from the optical sensors.

Non-contacting caliper measurements of free-standing sheets detect mid-IR interferometric fringes created by the reflection of light from the top and bottom surfaces of the sheet. The technique includes directing a laser beam at a selected angle of incidence onto a single spot on the exposed outer surface and scanning the laser beam through a selected wavelength range as the laser beam is directed onto the exposed outer surface and measuring the intensity of an interference pattern that forms from the superposition of radiation that is reflected from the exposed outer surface and from the inner surface. Alternatively, the intensity of an interference pattern formed from the superposition of radiation that is directly transmitted through the web and radiation that is transmitted through the web after internal reflections from the internal surfaces of the web. Thickness can be extracted from the fringe separation in the interference pattern.

Systems and methods for non-invasively determining a water content, a solute content, and a thickness of plant tissue are disclosed. A system includes a sensing device having a first piece and a second piece, where the first piece and the second piece are coupled together to form a clip. The system further includes a capacitive tissue sensor including a capacitor. The capacitor includes a plurality of coplanar conductive plates. The first piece and the second piece are biased in a closed position to provide a gripping force around the plant tissue such that at least a portion of the plant tissue contacts the plurality of coplanar conductive plates.

The invention discloses an online thickness detecting platform. The platform includes a body frame provided with a first cross beam and a second cross beam; a C-shaped frame mounted on the body framein a sliding manner and provided with a first arm and a second arm; a first laser sensor and a second laser sensor mounted on a first arm and a second arm of the C-shaped frame; and a drive mechanismmounted on the body frame and suitable for driving the C-shaped frame to slide in a reciprocating manner. A to-be-detected product penetrates between the first arm and the second arm and moves along asecond horizontal direction perpendicular to a first horizontal direction. The first laser sensor and the second laser sensor are not in contact with the to-be-detected product. Therefore, the platform can monitor the thickness of a board in real time. Once the thickness of the produced board surpasses an allowed range, an alarm can be sent timely and production can be stopped timely. In this way, production of a large amount of unqualified boards which do not meet the thickness requirements can be avoided and waste is avoided.