The application discloses an electronic-grade
trichlorosilane automatic filling
system and an automatic filling method thereof, wherein the
system comprises a high-purity
buffer tank, a filter, a
vacuum pump, an
argon purifier, a residual liquid
recovery tank, an
online analysis cabin, a filling pipeline, a
mass flowmeter, a ground scale, a PLC
control system, an HCl alarm, an emergency shut-off valve and a remote
signal transmission to a DCS
control system, and the method comprises the following steps: filling tank pretreatment: performing vacuumizing, 9N
argon pressure charging and pressure releasing on the filling tank, and detecting H2O and O2 at the end point, wherein the cycle number is n times, H2O is less than or equal to 10 ppm, and O2 is less than or equal to 10 ppm; two-stage filling: the PLC performs automatic filling according to the set weight and high /
low speed rate, the ground scale is real-time returned, the
mass flowmeter or the weight is mutually checked at the end point, and the filling valve is immediately closed when the target value is reached; and the application can realize automatic filling, online monitoring, one-key start and stop and remote monitoring, and the electronic-grade
trichlorosilane automatic filling
system and the automatic filling method thereof are batch traceable.