The invention provides a
manganese-
cobalt-
nickel-based MEMS temperature sensor
chip and a preparation and packaging method thereof, and the preparation method of the temperature sensor
chip comprises the steps: providing a preposed
powder material which at least comprises
cobalt sesquioxide,
manganese dioxide and
nickel sesquioxide; mixing the front
powder material with an
organic solvent to obtain printing
slurry of the sensor; a substrate is provided, a pattern is formed through photoetching, an
electrode layer is formed on the surface of the substrate, and then the
electrode layer is patterned into an interdigital
electrode; patterning the printing
slurry on an electrically polarized substrate through a patterning process;
sintering the substrate with the printing
slurry to obtain a sensitive film with an electrode layer; and forming a protective layer above the sensitive film to obtain the
manganese-
cobalt-
nickel-based MEMS temperature sensor
chip. According to the invention, the MEMS technology is introduced into the
processing process of the
negative temperature coefficient temperature sensor chip, the size of the sensor chip can be reduced to a micron level, the
miniaturization of the manganese-cobalt-nickel-based temperature sensor can be realized, and the
measurement precision of the manganese-cobalt-nickel-based temperature sensor can be improved.