The invention relates to the technical field of control systems, in particular to a particle integrated FFU (Fan Filter Unit)
control system, which comprises a particle sensing module used for monitoring the concentration of particulate matters in a plurality of particle size channels with the particle size larger than or equal to 1nm, 5nm, 10nm, 100nm, 0.1 mu m, 0.3 mu m, 0.5 mu m, 1.0 mu m, 5 mu m and 10 mu m in real time. According to the method, the rotating speed of the FFU is automatically increased in advance in combination with the
work schedule, unattended preventive cleanliness management and control are achieved, meanwhile, input of multiple paths of control instructions is scheduled in a unified mode through a priority arbitration mechanism, cooperative operation among event pre-control,
time management and control and real-time feedback is ensured, and the control efficiency is improved. The method ensures that the
system can always execute the optimal speed regulation scheme under complex working conditions, enhances stability and reliability, combines post cleanliness linkage with rule self-learning ability, can reversely correct and optimize parameters in an event rule base according to the actual effect of regulation each time, continuously improves the control precision, and reduces the manual calibration frequency.