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48 results about "Thermal index" patented technology

Smart city energy management system based on energy conservation and emission reduction

The invention discloses a smart city energy management system based on energy conservation and emission reduction, and relates to the technical field of smart city energy management. By using an intelligent sensor group, illumination related data of illumination equipment is obtained, an illumination related data set R is constructed, and a light attenuation factor Gs, a convective heat transfer index DL and a use intensity factor Qd are extracted; the method comprises the following steps: dynamically evaluating the thermal load intensity of an urban area, scientifically dividing thermal risk grades, combining performance brightness prediction and control strategy matching to realize subarea and lamp-divided refined dimming control, using a feedback self-evaluation and optimization regulation and control mechanism, carrying out power reestimation and strategy alternation on an area with a substandard control effect, and carrying out power control on the area with the substandard control effect. Redundant energy consumption is effectively reduced, heat accumulation is restrained, and the lighting efficiency and the environment comfort degree are improved.
Owner:ZHANG JIA GANG CHI SHENG KE JI YOU XIAN GONG SI

Three-phase asynchronous motor operation control management method and system

The invention relates to the technical field of motor control, and discloses a three-phase asynchronous motor operation control management method and system, and the method comprises the following steps: 1, obtaining the pulse number per revolution of an encoder, the rated rotating speed of a motor nameplate, the acceleration time, the sliding stalling time, a thermal permission threshold, a load shedding threshold, a jump gate threshold, the upper limit of a start-stop token, and an expected rotation direction; determining the maximum allowable acceleration time and the minimum cooling locking time; 2, starting access judgment is carried out according to the three-phase existence state, the under-voltage state and the time condition; 3, pulse accumulation and rotation direction comparison are executed to generate a start judgment result, and the number of start-stop tokens is deducted; 4, calculating a thermal index based on temperature detection during operation, comparing the thermal index with each threshold, and outputting an operation continuing, load shedding or shutdown instruction; and 5, updating the thermal index, and outputting an unlocking result when an unlocking condition is met. According to the invention, safe management of the whole process of starting determination, operation regulation and control and shutdown unlocking of the three-phase asynchronous motor is realized.
Owner:FUZHOU WONDER ELECTRIC

Sectional type thermal management system of stator core structure of block type motor

The invention relates to the technical field of industrial data control, in particular to a segmented thermal management system for a stator core structure of a segmented motor, and the system is used for obtaining the liquid temperature difference, liquid flow velocity data and temperature data, gap temperature and actual power of an inlet and an outlet of a water flow channel of each unit stator core; segmenting the unit stator cores according to the temperature data of every two adjacent unit stator cores at all monitoring positions in combination with the gap temperature and the inlet and outlet liquid temperature difference to obtain characteristic segments; according to the temperature data distribution characteristics of the adjacent unit stator iron cores in each characteristic section, the overall heat dissipation index is obtained by combining the position distribution between the monitoring position and the gap; and adjusting the actual power of the motor, adjusting the liquid flow rate data of the unit stator iron core of each characteristic section, and determining a sectional type heat management scheme. According to the invention, segmented accurate heat management is realized, and the heat management effect of the motor is improved.
Owner:AIDES AUTOMOTIVE MOTOR WUXI CO LTD

Heat dissipation performance evaluation method and system for backlight source

The invention discloses a heat dissipation performance evaluation method and system for a backlight source. The backlight module is powered on in a first test period, a module infrared image is obtained, color features are extracted based on a color histogram, and backlight sub-regions are divided by adopting agglomeration hierarchical clustering; in the second test period, the sub-regions and the whole are electrified respectively, RGB color features and temperature differences of two tests are extracted, color feature differences and temperature differences are calculated, the heat dissipation index of each region is evaluated, and the index can comprehensively reflect the heat dissipation performance of different regions and effectively guide the backlight module to carry out structure adjustment and production optimization; and the production test efficiency and the performance evaluation accuracy are improved.
Owner:SHENZHEN HENGXIN SHENGDA PHOTOELECTRIC CO LTD

Environment control device

An environment control device includes a control unit usable to control an environment adjustment portion that controls a thermal environment of a space. The control unit estimates a sensation indicating comfort or discomfort of a target person based on sensation information about the target person in the space. The control unit determines, based on an appearance frequency of each sensation corresponding to a thermal index value as a value of thermal index, a range of the thermal index value indicating comfort or discomfort as a sensation region. The control unit sets a target value of the thermal index in the space based on the sensation region. The control unit determines a duration of comfort or discomfort sensation. The control unit determines the sensation region by excluding the thermal index value where the duration of the comfort or discomfort sensation is shorter than a predetermined time.
Owner:DAIKIN INDUSTRIES LTD

A subway station environmental control and temperature control method and system

The present invention discloses a method for environmental control and temperature control of subway stations, including: the present invention introduces a dynamic thermal comfort model, which takes the relative thermal index RWI as the core, comprehensively considers multiple influencing factors such as human metabolic rate, ambient temperature, and clothing thermal resistance, and can accurately evaluate the thermal comfort of passengers under different environmental conditions. By real-time monitoring of outdoor temperature changes and combining the thermal comfort needs of passengers during the ride, the system can intelligently adjust the temperature of the station hall and platform to match the physiological and psychological feelings of the passengers. This dynamic adjustment mechanism can not only significantly improve the passenger's riding experience and reduce passenger dissatisfaction caused by temperature discomfort, but also effectively reduce energy consumption and reduce operating costs. In short, the present invention realizes the personalization, intelligence and greening of subway station environmental control through scientific methods and advanced technologies, providing passengers with a more comfortable and healthy riding environment.
Owner:CHENGDU RAIL TRANSIT GRP CO LTD

Explosion-proof intelligent lighting remote monitoring method and system based on Internet of Things

The invention discloses an anti-explosion intelligent lighting remote monitoring method and system based on the Internet of Things, and relates to the technical field of lighting monitoring. The method comprises the following steps: dynamically monitoring through a sensor network to obtain real-time sensor information; the edge controller is activated to analyze the real-time sensor information to obtain a real-time illumination decision; the real-time illumination decision and the real-time sensor information are transmitted to a remote monitoring center through a ZigBee wireless radio frequency device, and the remote monitoring center analyzes the real-time illumination decision and the real-time sensor information to obtain a predicted thermal index; if the predicted thermal index reaches a preset limit value, a remote heat dissipation instruction is sent out, and remote heat dissipation is conducted on the anti-explosion intelligent lighting equipment based on the remote heat dissipation instruction. The technical problems that in the prior art, the operation state of anti-explosion lighting equipment is not monitored in time, and heat dissipation control response is lagged are solved, remote monitoring of the anti-explosion intelligent lighting equipment is achieved through the Internet of Things technology, and the technical effects of improving the heat dissipation response speed and guaranteeing stable operation of the equipment are achieved.
Owner:JIANGSU OURUI EXPLOSION-PROOF ELECTRIC APPLIANCE CO LTD

System to monitor for and alert on risk of heat stress in school classrooms

ActiveUS12683827B2Heat stressThermal index
A method includes receiving a first personal registration indicating a first responsibility position of a first person, the first personal registration further indicating a first device ID; receiving a first trigger signal including first heat data identifying a first heat index; determining that the first heat index exceeds a first predetermined threshold; determining the first device ID, at least in part based on the first responsibility position; and performing a first notification, at least in part based on the first device ID.
Owner:INTRADO LIFE & SAFETY INC

Environmental control device

This environment control device is provided with a control unit (100) for controlling an environment adjustment unit (A) that controls a warm environment in a space (I), and the control unit (100) estimates, on the basis of emotion information about a subject (T) in the space (I), an emotion indicating that the subject (T) is comfortable or uncomfortable; the control unit (100) determines, on the basis of the frequency of occurrence of each emotion corresponding to a warming index value, which is a value indicating a warming index, a range of the warming index value indicating comfort or discomfort as an emotion region, and sets, on the basis of the emotion region, a target value for the warming index in the space (I).
Owner:DAIKIN INDUSTRIES LTD

Coral whitening risk monitoring method based on multi-source environmental information

The invention relates to the field of marine environment data processing and analysis, and discloses a coral whitening risk monitoring method based on multi-source environment information, and the method comprises the steps: obtaining the multi-source environment information of a target monitoring sea area in a historical period; performing correlation analysis on the multi-source environment information in the historical time period, and calculating a correlation coefficient between a weekly heat index and each marine environment parameter; when a correlation coefficient between the weekly heat index and any marine environment parameter is greater than or equal to a preset coefficient threshold value, removing the corresponding marine environment parameter from the multi-source environment information to obtain screened multi-source environment information; constructing a Bayesian prediction model according to the screened multi-source environment information; the Bayesian prediction model comprises fixed effect items, and the fixed effect items comprise independent action items and interaction action items; and based on the Bayesian prediction model, calculating the coral whitening probability of the target monitoring sea area in the to-be-monitored time period. According to the invention, the accuracy and reliability of the coral whitening risk monitoring and early warning result can be improved.
Owner:SANYA INST OF OCEANOGRAPHY OCEAN UNIV OF CHINA +1

Multifunctional black globe thermometer index instrument (WBGT-EM783)

ActiveCN309744909SMechanical engineeringThermal index
1. The name of the design product: multifunctional black globe thermal index instrument (WBGT-EM783). 2. The use of the design product: for black globe thermal index instrument. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.
Owner:FUJIAN EMAX INTELLIGENT CO LTD

Magnet wire with thermoplastic insulation

Magnet wire including extruded insulation formed from a blend of different polymeric materials is described. A magnet wire may include a conductor and insulation formed around the conductor. The insulation may include base enamel insulation and at least one layer of extruded insulation formed from a blend of at least three different polymeric materials. The enamel insulation may include either filled polyimide or filled polyamideimide. For the blend, a first polymeric material, such as polyetheretherketone, may have a thermal index above 240° C. Second and third polymeric materials, such as polyphenylsulfone and polyethersulfone, may have lower thermal indexes.
Owner:ESSEX SOLUTIONS USA LLC

Mattress assembly with reduced heat index

Mattress assemblies that provide reduced heat index during use include a thermally conductive layer and a spacer layer and in direct contact with the thermally conductive layer. Optionally, the thermally conductive foam layer can be perforated. In some embodiments, the thermally conductive layer and the spacer layer can overlay an innerspring mattress core, one or more foam layers, or a hybrid of foam and innersprings. In other embodiments, the mattress assemblies include a foam layer such as a viscoelastic foam layer overlying the thermally conductive layer and the spacer layer. Also, disclosed are processes for reducing the heat index in a mattress assembly.
Owner:DREAMWELL LTD

A method for evaluating the activity of a blast furnace hearth

A method for evaluating the activity of a blast furnace hearth is disclosed, relating to the field of automated monitoring technology for blast furnace ironmaking. The beneficial effects of this invention are as follows: This invention constructs a multi-parameter quantitative evaluation model by integrating eight dimensions, including physical thermal index, sidewall temperature change, tapping index, blast pressure stability, lower temperature stability, permeability index, FeO content, and lower valve box temperature. Combined with a dynamic weight allocation mechanism and a visual monitoring platform, it achieves real-time online monitoring and accurate evaluation of blast furnace hearth activity. The scoring update frequency can reach 30 times / hour, the prediction accuracy is improved to over 90%, the early warning time is advanced to 6 hours before anomalies occur, the accuracy of control measures is improved by 35%, and the number of production reductions due to furnace condition fluctuations is reduced by 42%. It effectively overcomes the shortcomings of traditional methods, such as strong lag, single indicators, and reliance on manual experience. It has good universality and long-term optimization capabilities, providing reliable technical support for stable and smooth blast furnace operation and low-consumption, high-efficiency production.
Owner:FUJIAN SANGANG MINGUANG +1

Geothermal resource exploration method and system based on multi-parameter fusion

The invention relates to the technical field of resource exploration, and discloses a geothermal resource exploration method and system based on multi-parameter fusion, and the method comprises the steps: obtaining the temperature gradient, heat flux and rock thermal conductivity data of a geothermal exploration region measurement point, carrying out the data quality verification, obtaining a geothermal parameter data set, and carrying out the time-space reference standardization, obtaining a standard geothermal parameter data set; according to the standard geothermal parameter data set, carrying out multi-parameter correlation modeling to obtain a parameter fusion model and carrying out thermal index calculation to obtain thermal index distribution of the measuring points; according to the thermal index distribution of the measuring points, vertical layered modeling is carried out, a three-dimensional layered thermal field model is obtained, thermal storage potential area identification is carried out, and candidate thermal storage layer space distribution is obtained; and according to the spatial distribution of the candidate heat storage layers, resource quality grading is carried out, a graded heat storage resource distribution map is obtained, development priority area evaluation is carried out, and a target development area is determined. According to the method, high-precision thermal field modeling and efficient thermal reservoir identification can be realized.
Owner:SINOPEC GREEN ENERGY GEOTHERMAL DEV CO LTD

A method and system for evaluating heat dissipation performance of a backlight

The application discloses a heat dissipation performance evaluation method and system for a backlight source. In a first test period, a backlight module is powered on, and an infrared image of the module is acquired, color features are extracted based on a color histogram, and a backlight sub-region is divided by adopting condensed hierarchical clustering. In a second test period, the sub-region and the whole are powered on respectively, RGB color features and temperature differences in the two tests are extracted, color feature differences and temperature differences are calculated, and a heat dissipation index of each region is evaluated. The index can comprehensively reflect the heat dissipation performance of different regions, effectively guide structural adjustment and production optimization of the backlight module, and improve production test efficiency and performance evaluation accuracy.
Owner:SHENZHEN HENGXIN SHENGDA PHOTOELECTRIC CO LTD

Climate Control for Turbine Aircraft

A hybrid climate control system for a turbine aircraft, including a separate climate controller for each area of the turbine aircraft which can be configured to manually, semi-automatically, or automatically control temperature and fan speeds in that area. Streamlined user interfaces allow for state selections between fully manual, automatic temperature and manual fans, and fully automatic control, where fully automatic control virtually eliminates user distractions caused by climate control issues. A novel means of automatic aircraft fan control is performed by reducing the differential between an actual heat index and a target heat index of an aircraft area, using automatic fan adjustments; where heat index is a user comfort level derived from both temperature and humidity. For further improvements to safety and efficiency, fan speeds are automatically adjusted to accommodate power saving needs, and automatic systems are automatically transitioned to manual control if a fault is detected in the system.
Owner:TEXTRON INNOVATIONS INC

Intelligent rice fertilizer efficiency regulation and control system based on multi-source data

The invention discloses an intelligent rice fertilizer efficiency regulation and control system based on multi-source data, and particularly relates to the technical field of intelligent agriculture. A temperature gradient value is generated by continuously collecting field temperature data to calculate a time change rate, and a predicted deviation value is generated by synchronously comparing a meteorological predicted temperature with a real-time temperature; environment temperature and humidity parameters are separated and processed, and independent weight coefficients are applied to generate thermal index values; comparing the gradient value, the deviation value and the thermal index value with a preset critical threshold value, a tolerance range and a thermal threshold value in real time to generate a three-level dynamic adjustment amount, executing weighted average operation by adopting a weight coefficient, and acting a result on a basic fertilization threshold value to generate a self-adaptive threshold value; and finally, performing proportional fine adjustment on the fertilizing amount. According to the method, quick response of environment sudden change is realized, decision timeliness of a temperature sudden change scene is improved, a high-temperature and high-humidity composite stress effect is effectively quantified, fertilization precision is optimized through a multi-factor dynamic compensation mechanism, and the problem that environment parameter coupling influence of a traditional system is not quantified is solved.
Owner:重庆三峡农业科学院(重庆市万州区甘宁蚕种场)

Ecological environment quality prediction method

The invention discloses an ecological environment quality prediction method, and relates to the technical field of ecological environment, and the method comprises the steps: obtaining remote sensing images of a research region in different periods, and calculating a vegetation normalization index NDVI, a humidity index WET, a heat index LST, a dryness index NDBSI, a PM2.5 concentration difference index DI and a comprehensive salinity index CSI of the research region in different periods; constructing a novel remote sensing ecological index RSEInew by using a principal component analysis method, and dividing the novel remote sensing ecological index RSEInew into five ecological environment quality levels; calculating novel remote sensing ecological indexes RSEInew of the monthly scale, the annual scale and the different seasonal scales of the research area, and determining ecological environment quality levels of the monthly scale, the annual scale and the different seasonal scales of the research area; a CA-Markov model is constructed, the novel remote sensing ecological indexes RSEInew of the monthly scale, the annual scale and different seasonal scales of the research area and the ecological environment quality level are used as data sources, and the data sources are input into the CA-Markov model to predict the ecological environment quality; in conclusion, the method can accurately evaluate and predict the environment quality.
Owner:XINJIANG NORMAL UNIVERSITY

Air insulation index test experimental device

1. The name of the design product: air thermal insulation index test experimental device. 2. The use of the design product: air thermal insulation index test experimental device. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1. 5. The bottom surface of the design product is the part that is not easy to see or cannot be seen during use, and the top view is omitted.
Owner:ZHEJIANG TIANHUANG TECH INDAL

A seasonal thermal management device suitable for data centers

The present application relates to the technical field of data center energy management and waste heat recovery, and particularly relates to a seasonal thermal management device suitable for a data center, comprising: data acquisition through a heat production information acquisition module and an environment information acquisition module; an analysis module determines a seasonal working condition thermal data adjustment range based on the environment data, and determines a plurality of comprehensive thermal indexes of the data center based on the seasonal working condition thermal data adjustment range, and divides thermal management areas; a control module determines each thermal management area based on the threshold of each thermal management area, and adjusts the load distribution of each cabinet based on the distribution state of each thermal management area; the analysis module further judges whether a corresponding chip protection strategy needs to be executed according to a hardware health degree model to optimize the equipment life. The present application realizes the collaborative and accurate control of the data center load and the liquid cooling system by dynamically identifying the thermal distribution and combining the seasonal working condition, and significantly improves the thermal management efficiency and the system energy efficiency.
Owner:SHANDONG QIANSHUI ENERGY SAVING TECH CO LTD

Air conditioner and air conditioning system

PCT designated stageWO2025197099A1Mechanical apparatusHeat indexControl cell
An air conditioner (2) is a device that can reduce the risk of a user developing heatstroke, and comprises: a receiving unit (211) that receives alert information relating to heatstroke; a temperature sensor (201) that detects the temperature of a space to be air-conditioned; a humidity sensor (202) that detects the humidity of the space; a calculating unit (23) that, when the alert information is received by the reception unit (211), calculates a heat index for the space on the basis of the temperature detected by the temperature sensor (201) and the humidity detected by the humidity sensor (202); and a control unit (20) that, if the calculated value of the heat index obtained by the calculating unit (23) is greater than a predetermined threshold value, controls the operation of the air conditioning of the space such that the heat index decreases.
Owner:MITSUBISHI ELECTRIC CORP

Integrated dispatching method for central heating system based on operation data

The invention relates to a centralized heating system comprehensive scheduling method based on operation data, and aims to solve the technical problems of excessive heating and uneven cooling and heating of a current heating system. The technical scheme is that the method comprises the steps of data acquisition and transmission, construction of a dynamic thermal index model based on multi-dimensional data, and guidance of accurate distribution of heat; dynamic regulation and control of heat are realized through linkage of an algorithm and equipment; the actual energy consumption and the index energy consumption are compared, the user complaint rate and the room temperature standard reaching rate are combined, a heating station grading assessment result is generated, and the system stability and the prediction precision are continuously improved. Whole-network comprehensive energy consumption indexes with the heating stations as units are established, energy consumption indexes of heat, coal, gas, water, electricity and the like of the whole network are formulated according to the overall comprehensive energy consumption level of a company, the energy consumption indexes of the heating stations are refined through the average room temperature, and a scheduling process and evaluation system according to the indexes of the heating stations based on the intelligent heat supply platform is established.
Owner:TAIYUAN THERMAL GRP CO LTD

Control system for ultrasonic handpiece

A control system for an ultrasonic handpiece is provided. The control system includes: a perfusion pressure sensor configured to measure a pressure of a perfusion fluid; an ultrasonic power source configured to provide power to the ultrasonic transducer; and a controller. The controller is configured to: receive a selection of an ultrasonic power modality; generating a control signal based on the selected ultrasonic power modality; providing the control signal to the ultrasonic power source; determining a perfusion flow rate according to the measured perfusion pressure provided by the perfusion pressure sensor; calculating a thermal index value based on the perfusion flow and the selected ultrasound power modality; and adjust the control signal based on the thermal index value in response to the thermal index value reaching a threshold. The ultrasonic power mode is one of a two-dimensional power mode and a three-dimensional power mode.
Owner:ALCON INC

Substrate conveyance device and cooling method for arm

The present disclosure relates to a substrate conveyance device and a cooling method for an arm. A substrate conveyance device for conveying a substrate includes: a conveyance arm having a substrate support portion for supporting the substrate and an arm linked to the substrate support portion for moving the substrate support portion; a cooling mechanism that supplies cooling fluid from a fluid supply source to each of a plurality of cooling target regions of the arm; a measurement portion that measures the temperature of each of the cooling target regions; and a control portion that, for each of the cooling target regions, calculates a thermal index based on the amount of change in the temperature of the cooling target region measured by the measurement portion with respect to a reference temperature and the degree to which the temperature of the cooling target region affects the movement accuracy of the substrate support portion, and that determines the distribution ratio at which the cooling mechanism distributes the cooling fluid from the fluid supply source based on the thermal index.
Owner:TOKYO ELECTRON LTD

A method for adjusting the heat supply balance of the entire network based on room temperature imbalance rate

The present invention discloses a whole-network heat supply balance adjustment method based on room temperature imbalance rate, which comprises the following steps: step S1: under the condition that the air tightness of the building remains unchanged and the thermal inertia of the building is not considered, the heat load of the heat exchange station is calculated according to the indoor temperature set value; step S2: according to the building type served by the heat exchange station, the room temperature actual value is obtained by reading, or according to the building type served by the heat exchange station and the heat load of the heat exchange station, the room temperature calculated value is obtained by calculating; step S3: according to the room temperature actual value or the room temperature calculated value, the single-network imbalance rate of the heat exchange station is calculated; step S4: when the single-network imbalance rate of the heat exchange station is ≠0, the primary flow rate or the primary return water temperature of the heat exchange station is adjusted; the present invention uses the room temperature imbalance rate as a standard for evaluating whether a certain heat exchange station is balanced; when predicting the load, the thermal index in the specification is corrected in combination with the actual situation to reduce the error; when the heat source output is insufficient, the initially set indoor temperature is corrected.
Owner:XIAN SIAN YUNCHUANG TECH CO LTD

Warming index estimation system

A thermal index estimation system is provided with: a housing that defines an internal space and is provided with a vent hole that communicates the internal space with an external space of the housing; a temperature measuring unit which is disposed inside the housing and measures the temperature of the internal space; a detection unit that detects movement information indicating movement of the housing; a light amount measurement unit that measures the amount of light received by the housing; and an estimation unit that estimates a warm index in the external space on the basis of the temperature of the internal space, the motion information, and the light amount.
Owner:NAT INST FOR ENVIRONMENTAL STUDIES

Machine learning techniques for assessing thermal durability characteristics of physical materials

Systems and methods for assessing thermal durability characteristics of a material, such as relative thermal index (RTI), using machine learning are disclosed. According to certain aspects, an electronic device may train a machine learning model using a training data set that includes coordinates indicative of a plurality of characteristics of a plurality of materials and that is marked with at least one thermal durability characteristic for each of the plurality of materials. The trained machine learning model may analyze a set of coordinates associated with a candidate material and output at least one thermal durability characteristic of the candidate material. The machine learning model may also be continuously updated and used for subsequent analysis.
Owner:UL LLC

A method for urban block light-heat human factor prediction and evaluation based on multi-modal behavior coupling

This invention discloses a method for predicting and evaluating urban street light and heat human factors based on multimodal behavioral coupling, belonging to the field of urban microclimate environment and human comfort assessment technology. The method includes the following specific steps: S1 Multimodal data acquisition; S2 Data preprocessing and multimodal input fusion; S3 Light-heat-human factor coupling modeling; S4 Response prediction and deep learning modeling; S5 Exposure integral index calculation; S6 Interpretable output of results; S7 Digital twin feedback and optimization. This invention is the first to deeply couple light environment factors with thermal environment factors and human behavioral responses, overcoming the limitations of traditional thermal comfort assessments that only focus on a single thermal index. By automatically extracting complex relationships through a deep learning model, it improves the accuracy and robustness of comfort prediction. Compared with methods that simply use indices such as PMV / UTCI, this invention provides more accurate predictions of subjective thermal sensation in outdoor dynamic environments, and its prediction of behavioral responses fills a gap in existing technology.
Owner:TIANJIN UNIV

Substrate transfer device and method of cooling arm

A substrate transfer device that transfers a substrate, includes: a transfer arm including a substrate support and an arm; a cooler configured to distribute and supply a cooling fluid from a fluid supply source to each of cooling target regions of the arm; a measuring part configured to measure a temperature of each of the cooling target regions; and a controller. The controller is configured to: calculate a thermal index for each of the cooling target regions based on the amount of change of the temperature of the cooling target region measured by the measuring part from a reference temperature and a degree of influence of the temperature of the cooling target region affecting a movement accuracy of the substrate support; and determine a distribution ratio of the cooling fluid from the fluid supply source by the cooler based on the thermal index.
Owner:TOKYO ELECTRON LTD