The invention discloses a
hot plate rapid cooling
system and method.The
system comprises a shell, an air supply device and a liquid supply device, a
hot plate module and a TCP module are both arranged in the shell, and the air supply device communicates with the shell; a circulating water path is distributed in a transmission hand of the TCP module, the circulating water path is connected with a liquid supply device, and the liquid supply device conveys cooling liquid into the circulating water path. According to the rapid cooling
system for the
hot plate, on the basis of an existing scheme, only the hot plate is arranged in the shell, the air supply device and the liquid supply device are additionally arranged, and the system is slightly modified. According to the scheme, the hot plate and the
wafer are cooled for three times, the cooling amplitude of each time is controlled within the bearing range of the hot core of the hot plate and the
wafer, it is guaranteed that the
temperature difference of each time of cooling is large, heat of the hot plate and the
wafer can be rapidly taken away, and the hot plate and the wafer are rapidly and safely cooled to the target temperature.