The utility model discloses an automatic water replenishing device for ALD (
Atomic Layer Deposition) equipment, which comprises a PLC (
Programmable Logic Controller), a process
water bottle and a
water storage bottle, the top of the process
water bottle is provided with a middle water inlet interface, an equipment water replenishing interface, a first air inlet interface and a socket provided with a monitor; the top of the
water storage bottle is provided with a middle water supplementing connector, a water inlet connector, a second air inlet connector and an
insertion opening provided with a liquid level monitor. An equipment water supplementing pipeline is installed on the equipment water supplementing connector, the first air inlet connector is externally connected with high-pressure
nitrogen through a high-pressure air
pipe, the middle water inlet connector and the middle water supplementing connector are connected in a sealed mode through a
siphon pipeline, the water inlet connector is provided with a water inlet pipeline, and the second air inlet connector is externally connected with high-pressure
nitrogen through a high-pressure air
pipe. All the pipelines are provided with corresponding valves, and all the valves and the liquid level monitor are in
signal connection with the PLC. By means of the mode, automatic water replenishing of the ALD equipment can be achieved, production efficiency is improved, and production pauses are reduced.